FR2265174B3 - - Google Patents

Info

Publication number
FR2265174B3
FR2265174B3 FR7508916A FR7508916A FR2265174B3 FR 2265174 B3 FR2265174 B3 FR 2265174B3 FR 7508916 A FR7508916 A FR 7508916A FR 7508916 A FR7508916 A FR 7508916A FR 2265174 B3 FR2265174 B3 FR 2265174B3
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7508916A
Other languages
French (fr)
Other versions
FR2265174A1 (index.php
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates Inc filed Critical Varian Associates Inc
Publication of FR2265174A1 publication Critical patent/FR2265174A1/fr
Application granted granted Critical
Publication of FR2265174B3 publication Critical patent/FR2265174B3/fr
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02Electron guns
    • H01J3/029Schematic arrangements for beam forming
FR7508916A 1974-03-22 1975-03-21 Expired FR2265174B3 (index.php)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/454,038 US3932749A (en) 1974-03-22 1974-03-22 Electron gun

Publications (2)

Publication Number Publication Date
FR2265174A1 FR2265174A1 (index.php) 1975-10-17
FR2265174B3 true FR2265174B3 (index.php) 1977-04-15

Family

ID=23803032

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7508916A Expired FR2265174B3 (index.php) 1974-03-22 1975-03-21

Country Status (5)

Country Link
US (1) US3932749A (index.php)
JP (1) JPS514950A (index.php)
DE (1) DE2512628C2 (index.php)
FR (1) FR2265174B3 (index.php)
GB (1) GB1489941A (index.php)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4350927A (en) * 1980-05-23 1982-09-21 The United States Of America As Represented By The United States Department Of Energy Means for the focusing and acceleration of parallel beams of charged particles
US4816685A (en) * 1987-10-23 1989-03-28 Lauronics, Inc. Ion volume ring
GB2406704B (en) * 2003-09-30 2007-02-07 Ims Nanofabrication Gmbh Particle-optic electrostatic lens

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3191028A (en) * 1963-04-22 1965-06-22 Albert V Crewe Scanning electron microscope
DE1299088C2 (de) * 1966-06-10 1974-10-17 Siemens AG, Berlin und München, 8000 München Ablenkeinrichtung fuer den korpuskularstrahl in einem korpuskularstrahlgeraet, insbesondere elektronenmikroskop
US3452241A (en) * 1966-09-06 1969-06-24 Rca Corp Electron gun suitable for electron microscope
AT275617B (de) * 1968-02-23 1969-10-27 Zeiss Carl Fa Verfahren und Anordnung zur Justierung des Elektronenstrahles in einem Elektronenmikroskop
DE1802450B1 (de) * 1968-09-02 1970-07-02 Siemens Ag Verfahren zur Scharfstellung eines korpuskularstrahloptischen Bildes
US3787696A (en) * 1972-03-15 1974-01-22 Etec Corp Scanning electron microscope electron-optical column construction
US3801784A (en) * 1972-04-14 1974-04-02 Research Corp Scanning electron microscope operating in area scan and angle scan modes

Also Published As

Publication number Publication date
JPS514950A (index.php) 1976-01-16
US3932749A (en) 1976-01-13
FR2265174A1 (index.php) 1975-10-17
DE2512628A1 (de) 1975-09-25
DE2512628C2 (de) 1985-04-04
GB1489941A (en) 1977-10-26

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Legal Events

Date Code Title Description
ST Notification of lapse