FR2236963B1 - - Google Patents

Info

Publication number
FR2236963B1
FR2236963B1 FR7325855A FR7325855A FR2236963B1 FR 2236963 B1 FR2236963 B1 FR 2236963B1 FR 7325855 A FR7325855 A FR 7325855A FR 7325855 A FR7325855 A FR 7325855A FR 2236963 B1 FR2236963 B1 FR 2236963B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7325855A
Other versions
FR2236963A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Original Assignee
Alcatel CIT SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel CIT SA filed Critical Alcatel CIT SA
Priority to FR7325855A priority Critical patent/FR2236963B1/fr
Priority to BE145826A priority patent/BE816798A/fr
Priority to GB2954374A priority patent/GB1442515A/en
Priority to CH937674A priority patent/CH584294A5/xx
Priority to US486933A priority patent/US3886896A/en
Priority to NL7409415A priority patent/NL7409415A/xx
Priority to DE2433382A priority patent/DE2433382C2/de
Priority to IT69227/74A priority patent/IT1016580B/it
Priority to JP49079291A priority patent/JPS5039288A/ja
Publication of FR2236963A1 publication Critical patent/FR2236963A1/fr
Application granted granted Critical
Publication of FR2236963B1 publication Critical patent/FR2236963B1/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/228—Gas flow assisted PVD deposition
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
FR7325855A 1973-07-13 1973-07-13 Expired FR2236963B1 (fr)

Priority Applications (9)

Application Number Priority Date Filing Date Title
FR7325855A FR2236963B1 (fr) 1973-07-13 1973-07-13
BE145826A BE816798A (fr) 1973-07-13 1974-06-25 Perfectionnement aux dispositifs de depot de couches minces sous vide
GB2954374A GB1442515A (en) 1973-07-13 1974-07-03 Device for use in the deposition of thin layers under vacuum
CH937674A CH584294A5 (fr) 1973-07-13 1974-07-08
US486933A US3886896A (en) 1973-07-13 1974-07-09 Device for plasma depositing of thin layers onto substrates
NL7409415A NL7409415A (nl) 1973-07-13 1974-07-11 Inrichting voor het afzetten van dunne lagen onder vacuum.
DE2433382A DE2433382C2 (de) 1973-07-13 1974-07-11 Vorrichtung zur Aufdampfung von dünnen Schichten unter Vakuum
IT69227/74A IT1016580B (it) 1973-07-13 1974-07-12 Dispositivo per la deposizione di strati sottili sotto vuoto
JP49079291A JPS5039288A (fr) 1973-07-13 1974-07-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7325855A FR2236963B1 (fr) 1973-07-13 1973-07-13

Publications (2)

Publication Number Publication Date
FR2236963A1 FR2236963A1 (fr) 1975-02-07
FR2236963B1 true FR2236963B1 (fr) 1977-02-18

Family

ID=9122584

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7325855A Expired FR2236963B1 (fr) 1973-07-13 1973-07-13

Country Status (9)

Country Link
US (1) US3886896A (fr)
JP (1) JPS5039288A (fr)
BE (1) BE816798A (fr)
CH (1) CH584294A5 (fr)
DE (1) DE2433382C2 (fr)
FR (1) FR2236963B1 (fr)
GB (1) GB1442515A (fr)
IT (1) IT1016580B (fr)
NL (1) NL7409415A (fr)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2290126A1 (fr) * 1974-10-31 1976-05-28 Anvar Perfectionnements apportes aux dispositifs d'excitation, par des ondes hf, d'une colonne de gaz enfermee dans une enveloppe
FR2456787A1 (fr) * 1979-05-18 1980-12-12 Thomson Csf Dispositif hyperfrequence pour le depot de films minces sur des solides
GB2085482B (en) * 1980-10-06 1985-03-06 Optical Coating Laboratory Inc Forming thin film oxide layers using reactive evaporation techniques
JPS5863399A (ja) * 1981-10-14 1983-04-15 Nitto Boseki Co Ltd 新規なプラスミン測定用基質
US4466380A (en) * 1983-01-10 1984-08-21 Xerox Corporation Plasma deposition apparatus for photoconductive drums
US5216330A (en) * 1992-01-14 1993-06-01 Honeywell Inc. Ion beam gun
USRE40963E1 (en) * 1993-01-12 2009-11-10 Tokyo Electron Limited Method for plasma processing by shaping an induced electric field
KR100238627B1 (ko) * 1993-01-12 2000-01-15 히가시 데쓰로 플라즈마 처리장치
US6136140A (en) * 1993-01-12 2000-10-24 Tokyo Electron Limited Plasma processing apparatus
JP3553688B2 (ja) * 1995-05-10 2004-08-11 アネルバ株式会社 プラズマ処理装置及びプラズマ処理方法
US5630880A (en) * 1996-03-07 1997-05-20 Eastlund; Bernard J. Method and apparatus for a large volume plasma processor that can utilize any feedstock material
CN1539090A (zh) 2001-04-12 2004-10-20 �ź㴫 高折射率差纤维波导及其应用
AU2003295929A1 (en) * 2002-11-22 2004-06-18 Omniguide, Inc. Dielectric waveguide and method of making the same
JP5683785B2 (ja) * 2005-05-04 2015-03-11 エーリコン・トレイディング・アーゲー・トリューバッハ プラズマ処理プラント用プラズマ増幅器
JP4405973B2 (ja) * 2006-01-17 2010-01-27 キヤノンアネルバ株式会社 薄膜作製装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH417118A (de) * 1961-11-23 1966-07-15 Ciba Geigy Verfahren zur Herstellung von Tantal oder Niob durch Reduktion von Tantal- oder Niobpentachlorid im Wasserstoff-Plasmastrahl
US3264508A (en) * 1962-06-27 1966-08-02 Lai William Plasma torch
GB1160895A (en) * 1965-08-25 1969-08-06 Rank Xerox Ltd Coating Surfaces by Vapour Deposition
US3736175A (en) * 1972-06-02 1973-05-29 Du Pont Vacuum coating method

Also Published As

Publication number Publication date
BE816798A (fr) 1974-12-27
US3886896A (en) 1975-06-03
FR2236963A1 (fr) 1975-02-07
JPS5039288A (fr) 1975-04-11
NL7409415A (nl) 1975-01-15
GB1442515A (en) 1976-07-14
DE2433382C2 (de) 1982-08-19
CH584294A5 (fr) 1977-01-31
IT1016580B (it) 1977-06-20
DE2433382A1 (de) 1975-01-30

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Legal Events

Date Code Title Description
ST Notification of lapse