FR2231106B1 - - Google Patents
Info
- Publication number
- FR2231106B1 FR2231106B1 FR7417810A FR7417810A FR2231106B1 FR 2231106 B1 FR2231106 B1 FR 2231106B1 FR 7417810 A FR7417810 A FR 7417810A FR 7417810 A FR7417810 A FR 7417810A FR 2231106 B1 FR2231106 B1 FR 2231106B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE2326279A DE2326279A1 (de) | 1973-05-23 | 1973-05-23 | Ionenstrahlschnellschaltung zur erzielung definierter festkoerperdotierungen durch ionenimplantation |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2231106A1 FR2231106A1 (fr) | 1974-12-20 |
FR2231106B1 true FR2231106B1 (fr) | 1978-01-27 |
Family
ID=5881909
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7417810A Expired FR2231106B1 (fr) | 1973-05-23 | 1974-05-22 |
Country Status (13)
Country | Link |
---|---|
US (1) | US3970854A (fr) |
JP (1) | JPS5021673A (fr) |
AT (1) | AT353845B (fr) |
BE (1) | BE815436A (fr) |
CA (1) | CA1024865A (fr) |
CH (1) | CH568654A5 (fr) |
DE (1) | DE2326279A1 (fr) |
FR (1) | FR2231106B1 (fr) |
GB (1) | GB1458908A (fr) |
IT (1) | IT1012721B (fr) |
LU (1) | LU70135A1 (fr) |
NL (1) | NL7405857A (fr) |
SE (1) | SE393483B (fr) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5439873A (en) * | 1977-09-06 | 1979-03-27 | Nippon Denso Co | Incombustible ypet flexible printed wiring board |
FR2412939A1 (fr) * | 1977-12-23 | 1979-07-20 | Anvar | Implanteur d'ions a fort courant |
JPS57130358A (en) * | 1981-02-05 | 1982-08-12 | Nippon Telegr & Teleph Corp <Ntt> | Full automatic ion implantation device |
HU190959B (en) * | 1984-04-20 | 1986-12-28 | Gyulai,Jozsef,Hu | Method and apparatus for the irradiation of solid materials with ions |
US4825080A (en) * | 1986-03-25 | 1989-04-25 | Universite De Reims Champagne-Ardenne | Electrical particle gun |
US4719349A (en) * | 1986-05-27 | 1988-01-12 | The United States Of America As Represented By The Department Of Health And Human Services | Electrochemical sample probe for use in fast-atom bombardment mass spectrometry |
EP0304525A1 (fr) * | 1987-08-28 | 1989-03-01 | FISONS plc | Faisceaux d'ions pulsés et microfocalisés |
US5132544A (en) * | 1990-08-29 | 1992-07-21 | Nissin Electric Company Ltd. | System for irradiating a surface with atomic and molecular ions using two dimensional magnetic scanning |
JP3034009B2 (ja) * | 1990-10-22 | 2000-04-17 | 株式会社日立製作所 | イオン打込み装置 |
JP3123345B2 (ja) * | 1994-05-31 | 2001-01-09 | 株式会社日立製作所 | イオン打込み装置 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3117022A (en) * | 1960-09-06 | 1964-01-07 | Space Technhology Lab Inc | Deposition arrangement |
NL294850A (fr) * | 1962-07-05 | |||
DE1498936B2 (de) * | 1963-12-28 | 1971-01-14 | Nihon Densht K K , Tokio | Verfahren und Vorrichtung zur Steue rung der Expositionszeit in einem Massen spektrographen |
US3476906A (en) * | 1966-11-21 | 1969-11-04 | United Aircraft Corp | Resistance monitoring apparatus |
US3547074A (en) * | 1967-04-13 | 1970-12-15 | Block Engineering | Apparatus for forming microelements |
GB1280013A (en) * | 1969-09-05 | 1972-07-05 | Atomic Energy Authority Uk | Improvements in or relating to apparatus bombarding a target with ions |
US3789185A (en) * | 1969-12-15 | 1974-01-29 | Ibm | Electron beam deflection control apparatus |
US3682729A (en) * | 1969-12-30 | 1972-08-08 | Ibm | Method of changing the physical properties of a metallic film by ion beam formation and devices produced thereby |
FR2076567A5 (fr) * | 1970-01-20 | 1971-10-15 | Commissariat Energie Atomique | |
GB1331113A (en) * | 1970-11-05 | 1973-09-19 | Secr Defence | Control apparatus for an electron beam welding machine |
-
1973
- 1973-05-23 DE DE2326279A patent/DE2326279A1/de active Pending
-
1974
- 1974-04-16 GB GB1648774A patent/GB1458908A/en not_active Expired
- 1974-05-01 NL NL7405857A patent/NL7405857A/xx not_active Application Discontinuation
- 1974-05-02 AT AT363074A patent/AT353845B/de not_active IP Right Cessation
- 1974-05-08 CH CH630274A patent/CH568654A5/xx not_active IP Right Cessation
- 1974-05-15 SE SE7406471A patent/SE393483B/xx unknown
- 1974-05-20 US US05/471,283 patent/US3970854A/en not_active Expired - Lifetime
- 1974-05-21 LU LU70135A patent/LU70135A1/xx unknown
- 1974-05-22 FR FR7417810A patent/FR2231106B1/fr not_active Expired
- 1974-05-22 CA CA200,486A patent/CA1024865A/fr not_active Expired
- 1974-05-22 IT IT23056/74A patent/IT1012721B/it active
- 1974-05-22 BE BE144663A patent/BE815436A/fr unknown
- 1974-05-23 JP JP49058331A patent/JPS5021673A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
BE815436A (fr) | 1974-09-16 |
US3970854A (en) | 1976-07-20 |
CA1024865A (fr) | 1978-01-24 |
FR2231106A1 (fr) | 1974-12-20 |
CH568654A5 (fr) | 1975-10-31 |
AT353845B (de) | 1979-12-10 |
NL7405857A (fr) | 1974-11-26 |
SE393483B (sv) | 1977-05-09 |
ATA363074A (de) | 1979-05-15 |
DE2326279A1 (de) | 1974-12-19 |
IT1012721B (it) | 1977-03-10 |
LU70135A1 (fr) | 1974-10-09 |
GB1458908A (en) | 1976-12-15 |
JPS5021673A (fr) | 1975-03-07 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |