FR2229083A1 - - Google Patents

Info

Publication number
FR2229083A1
FR2229083A1 FR7411452A FR7411452A FR2229083A1 FR 2229083 A1 FR2229083 A1 FR 2229083A1 FR 7411452 A FR7411452 A FR 7411452A FR 7411452 A FR7411452 A FR 7411452A FR 2229083 A1 FR2229083 A1 FR 2229083A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7411452A
Other languages
French (fr)
Other versions
FR2229083B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
Western Electric Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co Inc filed Critical Western Electric Co Inc
Publication of FR2229083A1 publication Critical patent/FR2229083A1/fr
Application granted granted Critical
Publication of FR2229083B1 publication Critical patent/FR2229083B1/fr
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0002Apparatus or processes for manufacturing printed circuits for manufacturing artworks for printed circuits
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/05Patterning and lithography; Masks; Details of resist
    • H05K2203/0548Masks
    • H05K2203/056Using an artwork, i.e. a photomask for exposing photosensitive layers
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/143Electron beam
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/146Laser beam

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
  • Laminated Bodies (AREA)
FR7411452A 1973-05-09 1974-03-29 Expired FR2229083B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US358728A US3920454A (en) 1973-05-09 1973-05-09 Fabrication of iron oxide pattern

Publications (2)

Publication Number Publication Date
FR2229083A1 true FR2229083A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-12-06
FR2229083B1 FR2229083B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-10-08

Family

ID=23410786

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7411452A Expired FR2229083B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-05-09 1974-03-29

Country Status (7)

Country Link
US (1) US3920454A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPS5134293B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CA (1) CA1042732A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
FR (1) FR2229083B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
GB (1) GB1465110A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
IT (1) IT1014142B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
NL (1) NL160144C (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5427804U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1977-07-25 1979-02-23
US4332879A (en) * 1978-12-01 1982-06-01 Hughes Aircraft Company Process for depositing a film of controlled composition using a metallo-organic photoresist
US4348473A (en) * 1981-03-04 1982-09-07 Xerox Corporation Dry process for the production of microelectronic devices
JPS5993445A (ja) * 1982-11-19 1984-05-29 Hitachi Ltd 金属酸化膜形成用組成物及び該組成物を使用する金属酸化膜形成方法
JPS6232603U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1985-08-09 1987-02-26
IN169343B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1986-04-05 1991-09-28 Cassella Farbwerke Mainkur Ag
RU2158228C1 (ru) * 1999-05-28 2000-10-27 Институт катализа им. Г.К. Борескова СО РАН Способ получения железосодержащих оксидных материалов
US7939129B2 (en) 2004-01-26 2011-05-10 Pilington North America, Inc. Deposition of iron oxide coatings on a glass substrate
JP5819810B2 (ja) * 2012-12-18 2015-11-24 信越化学工業株式会社 ネガ型レジスト材料及びこれを用いたパターン形成方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3335008A (en) * 1964-04-02 1967-08-08 Eastman Kodak Co Photographic elements containing ferrocene derivative and method of processing
GB1095567A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1964-04-15
US3352888A (en) * 1964-11-02 1967-11-14 American Cyanamid Co Organometallo-semiconducting materials
US3577235A (en) * 1969-02-17 1971-05-04 Eastman Kodak Co Electrophotographic composition and element
CA972142A (en) * 1970-04-08 1975-08-05 Minnesota Mining And Manufacturing Company Photoconductive compositions
US3681227A (en) * 1970-06-29 1972-08-01 Corning Glass Works Microcircuit mask and method
US3695908A (en) * 1970-06-29 1972-10-03 Raymond E Szupillo Thin films of alpha fe2o3 and method of forming

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
NEANT *

Also Published As

Publication number Publication date
NL160144B (nl) 1979-04-17
DE2421974B2 (de) 1977-04-28
JPS5019426A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-02-28
FR2229083B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-10-08
IT1014142B (it) 1977-04-20
GB1465110A (en) 1977-02-23
DE2421974A1 (de) 1974-11-28
JPS5134293B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-09-25
US3920454A (en) 1975-11-18
NL160144C (nl) 1979-09-17
NL7406191A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-11-12
CA1042732A (en) 1978-11-21

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Legal Events

Date Code Title Description
ST Notification of lapse