FR2220597B3 - - Google Patents

Info

Publication number
FR2220597B3
FR2220597B3 FR7400286A FR7400286A FR2220597B3 FR 2220597 B3 FR2220597 B3 FR 2220597B3 FR 7400286 A FR7400286 A FR 7400286A FR 7400286 A FR7400286 A FR 7400286A FR 2220597 B3 FR2220597 B3 FR 2220597B3
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7400286A
Other languages
French (fr)
Other versions
FR2220597A1 (fi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19732311217 external-priority patent/DE2311217C3/de
Application filed by Siemens AG filed Critical Siemens AG
Publication of FR2220597A1 publication Critical patent/FR2220597A1/fr
Application granted granted Critical
Publication of FR2220597B3 publication Critical patent/FR2220597B3/fr
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14Metallic material, boron or silicon
    • C23C14/20Metallic material, boron or silicon on organic substrates
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Vapour Deposition (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Extrusion Moulding Of Plastics Or The Like (AREA)
  • Moulding By Coating Moulds (AREA)
  • Laminated Bodies (AREA)
  • Insulating Bodies (AREA)
FR7400286A 1973-03-07 1974-01-04 Expired FR2220597B3 (fi)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19732311217 DE2311217C3 (de) 1973-03-07 Vorrichtung zum Metallisieren einer Kunststoffolie

Publications (2)

Publication Number Publication Date
FR2220597A1 FR2220597A1 (fi) 1974-10-04
FR2220597B3 true FR2220597B3 (fi) 1976-10-22

Family

ID=5874001

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7400286A Expired FR2220597B3 (fi) 1973-03-07 1974-01-04

Country Status (11)

Country Link
US (1) US3924563A (fi)
JP (1) JPS49119968A (fi)
AT (1) AT333396B (fi)
BR (1) BR7400027D0 (fi)
ES (1) ES422264A1 (fi)
FI (1) FI55526C (fi)
FR (1) FR2220597B3 (fi)
GB (1) GB1430534A (fi)
IT (1) IT1000750B (fi)
LU (1) LU69013A1 (fi)
SE (1) SE397843B (fi)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56163526A (en) * 1980-05-20 1981-12-16 Fuji Photo Film Co Ltd Production of magnetic recording medium
US4462332A (en) * 1982-04-29 1984-07-31 Energy Conversion Devices, Inc. Magnetic gas gate
US4440107A (en) * 1982-07-12 1984-04-03 Energy Conversion Devices, Inc. Magnetic apparatus for reducing substrate warpage
US4482622A (en) * 1983-03-31 1984-11-13 Xerox Corporation Multistage deposition process
JPS6130669A (ja) * 1984-07-24 1986-02-12 Matsushita Electric Ind Co Ltd 金属薄膜の製造方法
US4829189A (en) * 1986-07-18 1989-05-09 Sando Iron Works Co., Ltd. Apparatus for low-temperature plasma treatment of sheet material
DE4118807C2 (de) * 1991-06-07 1995-07-20 Eltex Elektrostatik Gmbh Vorrichtung zur Erhöhung des Wärmeübergangs an Kühlwalzen von Offset-Rollenrotationsmaschinen
US5803976A (en) * 1993-11-09 1998-09-08 Imperial Chemical Industries Plc Vacuum web coating
US7025833B2 (en) * 2002-02-27 2006-04-11 Applied Process Technologies, Inc. Apparatus and method for web cooling in a vacuum coating chamber
EP2119813A1 (en) * 2008-05-16 2009-11-18 Applied Materials, Inc. Coating device with insulation
JP2010163693A (ja) * 2010-04-12 2010-07-29 Ulvac Japan Ltd 巻取式真空蒸着方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3082735A (en) * 1960-09-20 1963-03-26 Columbia Ribbon & Carbon Apparatus for feeding and coating a web
US2978636A (en) * 1957-04-30 1961-04-04 Viking Instr Inc Flaw detecting apparatus
NL264252A (fi) * 1960-05-03 1900-01-01
US3364421A (en) * 1966-06-29 1968-01-16 Kimberly Clark Co Method and apparatus for assaying dielectric properties of a paper web by means of applied voltage pulses

Also Published As

Publication number Publication date
ES422264A1 (es) 1976-04-01
LU69013A1 (fi) 1974-02-22
GB1430534A (en) 1976-03-31
BR7400027D0 (pt) 1974-10-29
ATA3974A (de) 1976-03-15
AT333396B (de) 1976-11-25
IT1000750B (it) 1976-04-10
DE2311217A1 (de) 1974-09-26
FR2220597A1 (fi) 1974-10-04
DE2311217B2 (de) 1976-12-23
SE397843B (sv) 1977-11-21
FI55526C (fi) 1979-08-10
JPS49119968A (fi) 1974-11-15
FI55526B (fi) 1979-04-30
US3924563A (en) 1975-12-09

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