FR2204884A1 - - Google Patents

Info

Publication number
FR2204884A1
FR2204884A1 FR7338544A FR7338544A FR2204884A1 FR 2204884 A1 FR2204884 A1 FR 2204884A1 FR 7338544 A FR7338544 A FR 7338544A FR 7338544 A FR7338544 A FR 7338544A FR 2204884 A1 FR2204884 A1 FR 2204884A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7338544A
Other languages
French (fr)
Other versions
FR2204884B1 (enrdf_load_stackoverflow
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of FR2204884A1 publication Critical patent/FR2204884A1/fr
Application granted granted Critical
Publication of FR2204884B1 publication Critical patent/FR2204884B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
FR7338544A 1972-10-30 1973-10-29 Expired FR2204884B1 (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10795172A JPS532599B2 (enrdf_load_stackoverflow) 1972-10-30 1972-10-30

Publications (2)

Publication Number Publication Date
FR2204884A1 true FR2204884A1 (enrdf_load_stackoverflow) 1974-05-24
FR2204884B1 FR2204884B1 (enrdf_load_stackoverflow) 1977-05-27

Family

ID=14472173

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7338544A Expired FR2204884B1 (enrdf_load_stackoverflow) 1972-10-30 1973-10-29

Country Status (3)

Country Link
US (1) US3881108A (enrdf_load_stackoverflow)
JP (1) JPS532599B2 (enrdf_load_stackoverflow)
FR (1) FR2204884B1 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0075949A3 (en) * 1981-09-30 1986-02-05 Hitachi, Ltd. Ion beam processing apparatus and method of correcting mask defects

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3916190A (en) * 1974-03-01 1975-10-28 Minnesota Mining & Mfg Depth profile analysis apparatus
JPS5646299Y2 (enrdf_load_stackoverflow) * 1974-12-09 1981-10-29
USRE33193E (en) * 1981-09-30 1990-04-03 Hitachi, Ltd. Ion beam processing apparatus and method of correcting mask defects
JPS5871541A (ja) * 1981-10-23 1983-04-28 Hitachi Ltd イオンマイクロアナライザ
DE3240653A1 (de) * 1982-11-04 1984-05-10 Dr.-Ing. Rudolf Hell Gmbh, 2300 Kiel Verfahren zur kontrolle von mittels elektronenstrahlgravierten druckformoberflaechen
DE3335625A1 (de) * 1983-09-30 1985-04-11 Siemens AG, 1000 Berlin und 8000 München Verfahren und vorrichtung zur speicherung der messdaten aus teilbereichen eines sputterkraters, der in einem sekundaerionen-massenspektrometer erzeugt und analysiert wird
US4661702A (en) * 1984-10-24 1987-04-28 The Perkin-Elmer Corporation Primary ion beam raster gating technique for secondary ion mass spectrometer system
US4874946A (en) * 1985-04-30 1989-10-17 The United States Of America As Represented By The United States Department Of Energy Method and apparatus for analyzing the internal chemistry and compositional variations of materials and devices
US4719349A (en) * 1986-05-27 1988-01-12 The United States Of America As Represented By The Department Of Health And Human Services Electrochemical sample probe for use in fast-atom bombardment mass spectrometry
DE3636506A1 (de) * 1986-10-27 1988-04-28 Atomika Tech Physik Gmbh Spiralabtastverfahren
JP2585616B2 (ja) * 1987-08-12 1997-02-26 株式会社日立製作所 二次イオン質量分析計方法
JPH02183150A (ja) * 1989-01-09 1990-07-17 Hitachi Ltd イオンの質量分析法および装置
DE4421517A1 (de) * 1993-06-28 1995-01-05 Schlumberger Technologies Inc Verfahren zum Abtrag oder Auftrag von Material mittels eines Partikelstrahls und Vorrichtung zu seiner Durchführung
CN101091101A (zh) * 2004-12-27 2007-12-19 新科实业有限公司 通过俄歇电子能谱测量纳米薄膜厚度的方法
JP6233194B2 (ja) * 2014-05-30 2017-11-22 富士通株式会社 二次イオン質量分析装置の制御方法及び制御プログラム、二次イオン質量分析装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3502870A (en) * 1967-07-05 1970-03-24 Hitachi Ltd Apparatus for simultaneously displaying a plurality of images of an object being analyzed in an electron beam device
US3614311A (en) * 1968-02-28 1971-10-19 Hitachi Ltd Apparatus for simultaneously displaying a plurality of images of an object being analyzed in an electron beam device
US3600573A (en) * 1968-10-09 1971-08-17 Jeol Ltd Ion beam intensity control with pulsed beam deflection and synchronized ion source blanking
JPS5034439B1 (enrdf_load_stackoverflow) * 1969-05-16 1975-11-08

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
NEANT *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0075949A3 (en) * 1981-09-30 1986-02-05 Hitachi, Ltd. Ion beam processing apparatus and method of correcting mask defects

Also Published As

Publication number Publication date
FR2204884B1 (enrdf_load_stackoverflow) 1977-05-27
US3881108A (en) 1975-04-29
JPS532599B2 (enrdf_load_stackoverflow) 1978-01-30
JPS4966396A (enrdf_load_stackoverflow) 1974-06-27

Similar Documents

Publication Publication Date Title
FR2244782A1 (enrdf_load_stackoverflow)
FR2204884B1 (enrdf_load_stackoverflow)
FR2199995B1 (enrdf_load_stackoverflow)
FR2198980A1 (enrdf_load_stackoverflow)
JPS496458A (enrdf_load_stackoverflow)
JPS4984425A (enrdf_load_stackoverflow)
JPS4977669A (enrdf_load_stackoverflow)
JPS5043194Y2 (enrdf_load_stackoverflow)
JPS50394Y1 (enrdf_load_stackoverflow)
JPS5118879B2 (enrdf_load_stackoverflow)
JPS4912376U (enrdf_load_stackoverflow)
JPS48103079A (enrdf_load_stackoverflow)
CS157405B1 (enrdf_load_stackoverflow)
CS157373B1 (enrdf_load_stackoverflow)
CS156370B1 (enrdf_load_stackoverflow)
CS156331B1 (enrdf_load_stackoverflow)
JPS4921040U (enrdf_load_stackoverflow)
CH592627A5 (enrdf_load_stackoverflow)
CH583178A5 (enrdf_load_stackoverflow)
CH613273A4 (enrdf_load_stackoverflow)
CH605877A5 (enrdf_load_stackoverflow)
BG22874A1 (enrdf_load_stackoverflow)
CH592131A5 (enrdf_load_stackoverflow)
CH590797A5 (enrdf_load_stackoverflow)
CH587857A5 (enrdf_load_stackoverflow)

Legal Events

Date Code Title Description
ST Notification of lapse