FR2197237A1 - Semiconductor with two layers of different compsns - formed by gradually changing compsn deposited from one to the other - Google Patents
Semiconductor with two layers of different compsns - formed by gradually changing compsn deposited from one to the otherInfo
- Publication number
- FR2197237A1 FR2197237A1 FR7229954A FR7229954A FR2197237A1 FR 2197237 A1 FR2197237 A1 FR 2197237A1 FR 7229954 A FR7229954 A FR 7229954A FR 7229954 A FR7229954 A FR 7229954A FR 2197237 A1 FR2197237 A1 FR 2197237A1
- Authority
- FR
- France
- Prior art keywords
- compsn
- semiconductor
- deposited
- gradually changing
- layers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title abstract 3
- 238000000151 deposition Methods 0.000 abstract 2
- 239000007791 liquid phase Substances 0.000 abstract 1
- 239000012071 phase Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 238000001947 vapour-phase growth Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02538—Group 13/15 materials
- H01L21/02543—Phosphides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02387—Group 13/15 materials
- H01L21/02395—Arsenides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02538—Group 13/15 materials
- H01L21/02546—Arsenides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Formation Of Insulating Films (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7229954A FR2197237A1 (en) | 1972-08-22 | 1972-08-22 | Semiconductor with two layers of different compsns - formed by gradually changing compsn deposited from one to the other |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7229954A FR2197237A1 (en) | 1972-08-22 | 1972-08-22 | Semiconductor with two layers of different compsns - formed by gradually changing compsn deposited from one to the other |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2197237A1 true FR2197237A1 (en) | 1974-03-22 |
FR2197237B1 FR2197237B1 (cs) | 1978-02-10 |
Family
ID=9103436
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7229954A Granted FR2197237A1 (en) | 1972-08-22 | 1972-08-22 | Semiconductor with two layers of different compsns - formed by gradually changing compsn deposited from one to the other |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2197237A1 (cs) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2386145A1 (fr) * | 1977-04-01 | 1978-10-27 | Charmakadze Revaz | Dispositif electroluminescent a semi-conducteurs |
-
1972
- 1972-08-22 FR FR7229954A patent/FR2197237A1/fr active Granted
Non-Patent Citations (3)
Title |
---|
*REVUE US "BULLETIN OF THE AMERICAN PHYSICAL SOCIETY", SERIES II, VOL. 17, NO. 3, MARS 1972, ABSTRACT AC4 "HETEROEPITAXIAL THERMAL GRADIENT SOLUTION GROWTH OF GAN" R.A. LOGAN ET C.D. THURMOND * |
PAGE 233) * |
REVUE US "JOURNAL OF APPLIED PHYSICS", VOL. 43, JANVIER 1972, NO. 1, "TWO-STAGE EPITAXIAL GROWTH OF GAAS E1 DIODES ON SPINEL" I.LADANY ET C.C.WANG, PAGES 236-238 * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2386145A1 (fr) * | 1977-04-01 | 1978-10-27 | Charmakadze Revaz | Dispositif electroluminescent a semi-conducteurs |
Also Published As
Publication number | Publication date |
---|---|
FR2197237B1 (cs) | 1978-02-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |