FR2197230B1 - - Google Patents
Info
- Publication number
- FR2197230B1 FR2197230B1 FR7330340A FR7330340A FR2197230B1 FR 2197230 B1 FR2197230 B1 FR 2197230B1 FR 7330340 A FR7330340 A FR 7330340A FR 7330340 A FR7330340 A FR 7330340A FR 2197230 B1 FR2197230 B1 FR 2197230B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/063—Geometrical arrangement of electrodes for beam-forming
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47083891A JPS58148B2 (ja) | 1972-08-22 | 1972-08-22 | デンシジユウ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2197230A1 FR2197230A1 (ja) | 1974-03-22 |
| FR2197230B1 true FR2197230B1 (ja) | 1976-09-17 |
Family
ID=13815254
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7330340A Expired FR2197230B1 (ja) | 1972-08-22 | 1973-08-21 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US3890533A (ja) |
| JP (1) | JPS58148B2 (ja) |
| FR (1) | FR2197230B1 (ja) |
| GB (1) | GB1430964A (ja) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5075765A (ja) * | 1973-11-06 | 1975-06-21 | ||
| JPS576790B2 (ja) * | 1974-05-13 | 1982-02-06 | ||
| JPS57128433A (en) * | 1980-12-27 | 1982-08-10 | Denki Kagaku Kogyo Kk | High luminance electron gun |
| US4695773A (en) * | 1981-12-18 | 1987-09-22 | The Perkin-Elmer Corporation | Field emission gun electrode geometry for improved focus stability |
| JPS61173443A (ja) * | 1985-01-25 | 1986-08-05 | Natl Inst For Res In Inorg Mater | 電界放射型電子銃 |
| JPH0648619B2 (ja) * | 1989-04-20 | 1994-06-22 | 北海道電力株式会社 | 電子銃装置 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE434952A (ja) * | 1938-07-16 | |||
| US3141993A (en) * | 1959-12-24 | 1964-07-21 | Zeiss Jena Veb Carl | Very fine beam electron gun |
| US3185882A (en) * | 1961-01-16 | 1965-05-25 | Eitel Mccullough Inc | Electron discharge device including cathode-focus electrode assemblies therefor |
| NL278366A (ja) * | 1961-05-27 | |||
| US3383536A (en) * | 1964-09-22 | 1968-05-14 | Westinghouse Electric Corp | Cathode ray tube generating circular beam by lineal filament critically spaced from circular aperture |
-
1972
- 1972-08-22 JP JP47083891A patent/JPS58148B2/ja not_active Expired
-
1973
- 1973-06-28 GB GB3093573A patent/GB1430964A/en not_active Expired
- 1973-07-09 US US377812A patent/US3890533A/en not_active Expired - Lifetime
- 1973-08-21 FR FR7330340A patent/FR2197230B1/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE2336851B2 (de) | 1976-08-12 |
| GB1430964A (en) | 1976-04-07 |
| US3890533A (en) | 1975-06-17 |
| FR2197230A1 (ja) | 1974-03-22 |
| JPS58148B2 (ja) | 1983-01-05 |
| JPS4940475A (ja) | 1974-04-16 |
| DE2336851A1 (de) | 1974-03-21 |