FR2157832A1 - - Google Patents

Info

Publication number
FR2157832A1
FR2157832A1 FR7235403A FR7235403A FR2157832A1 FR 2157832 A1 FR2157832 A1 FR 2157832A1 FR 7235403 A FR7235403 A FR 7235403A FR 7235403 A FR7235403 A FR 7235403A FR 2157832 A1 FR2157832 A1 FR 2157832A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7235403A
Other languages
French (fr)
Other versions
FR2157832B1 (enrdf_load_stackoverflow
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Institut Elektrosvarki Imeni E O Patona Akademii Nauk Ukrainskoi Ssr
Original Assignee
Institut Elektrosvarki Imeni E O Patona Akademii Nauk Ukrainskoi Ssr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Institut Elektrosvarki Imeni E O Patona Akademii Nauk Ukrainskoi Ssr filed Critical Institut Elektrosvarki Imeni E O Patona Akademii Nauk Ukrainskoi Ssr
Publication of FR2157832A1 publication Critical patent/FR2157832A1/fr
Application granted granted Critical
Publication of FR2157832B1 publication Critical patent/FR2157832B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Particle Accelerators (AREA)
FR7235403A 1971-10-26 1972-10-05 Expired FR2157832B1 (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SU711706901A SU370899A1 (ru) 1971-10-26 1971-10-26 Установка дл электроннолучевого нагрева материалов

Publications (2)

Publication Number Publication Date
FR2157832A1 true FR2157832A1 (enrdf_load_stackoverflow) 1973-06-08
FR2157832B1 FR2157832B1 (enrdf_load_stackoverflow) 1976-03-26

Family

ID=20490757

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7235403A Expired FR2157832B1 (enrdf_load_stackoverflow) 1971-10-26 1972-10-05

Country Status (3)

Country Link
US (1) US3814829A (enrdf_load_stackoverflow)
FR (1) FR2157832B1 (enrdf_load_stackoverflow)
SU (1) SU370899A1 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2495878A1 (fr) * 1980-12-09 1982-06-11 Dmitriev Stanislav Dispositif pour irradier des objets par electrons

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU705699A2 (ru) * 1976-05-03 1979-12-25 Орденов Ленина И Трудового Красного Знамени Институт Электросварки Им. Е.О.Патона Установка дл электроннолучевого нагрева материалов
GB2033704B (en) * 1978-10-30 1982-09-29 Electricity Council Electron discharge heating device
US4341569A (en) * 1979-07-24 1982-07-27 Hughes Aircraft Company Semiconductor on insulator laser process
DD208995A1 (de) * 1982-08-03 1984-04-18 Manfred Neumann Einrichtung zum elektronenstrahlbedampfen sehr breiter baender
US4731537A (en) * 1985-06-13 1988-03-15 Sony Corporation Electron beam gun
DE3532888A1 (de) * 1985-09-14 1987-04-02 Leybold Heraeus Gmbh & Co Kg Anordnung zur regelung der ablenkung eines elektronenstrahls
US5346554A (en) * 1990-04-12 1994-09-13 Seiko Instruments Inc. Apparatus for forming a thin film
US7772571B2 (en) 2007-10-08 2010-08-10 Advanced Ion Beam Technology, Inc. Implant beam utilization in an ion implanter
US10290463B2 (en) * 2017-04-27 2019-05-14 Imatrex, Inc. Compact deflecting magnet

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2164931A (en) * 1935-10-31 1939-07-04 Rca Corp Cathode ray tube deflecting device
GB612906A (en) * 1946-06-06 1948-11-19 Eric William Bull Improvements in or relating to magnetic deflecting means for cathode ray tubes

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3390222A (en) * 1965-08-17 1968-06-25 Air Reduction Electron beam apparatus with variable orientation of transverse deflecting field
US3622679A (en) * 1970-09-29 1971-11-23 Air Reduction Heating system for electron beam furnace

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2164931A (en) * 1935-10-31 1939-07-04 Rca Corp Cathode ray tube deflecting device
GB612906A (en) * 1946-06-06 1948-11-19 Eric William Bull Improvements in or relating to magnetic deflecting means for cathode ray tubes

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2495878A1 (fr) * 1980-12-09 1982-06-11 Dmitriev Stanislav Dispositif pour irradier des objets par electrons

Also Published As

Publication number Publication date
DE2234378A1 (de) 1973-05-03
DE2234378B2 (de) 1975-10-02
US3814829A (en) 1974-06-04
SU370899A1 (ru) 1979-04-05
FR2157832B1 (enrdf_load_stackoverflow) 1976-03-26

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Legal Events

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