FR2156543B1 - - Google Patents

Info

Publication number
FR2156543B1
FR2156543B1 FR7224473A FR7224473A FR2156543B1 FR 2156543 B1 FR2156543 B1 FR 2156543B1 FR 7224473 A FR7224473 A FR 7224473A FR 7224473 A FR7224473 A FR 7224473A FR 2156543 B1 FR2156543 B1 FR 2156543B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7224473A
Other languages
French (fr)
Other versions
FR2156543A1 (enExample
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RCA Corp
Original Assignee
RCA Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RCA Corp filed Critical RCA Corp
Publication of FR2156543A1 publication Critical patent/FR2156543A1/fr
Application granted granted Critical
Publication of FR2156543B1 publication Critical patent/FR2156543B1/fr
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D88/00Three-dimensional [3D] integrated devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01Manufacture or treatment
    • H10D84/02Manufacture or treatment characterised by using material-based technologies
    • H10D84/03Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
    • H10D84/038Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/01Manufacture or treatment
    • H10D86/03Manufacture or treatment wherein the substrate comprises sapphire, e.g. silicon-on-sapphire [SOS]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D88/00Three-dimensional [3D] integrated devices
    • H10D88/01Manufacture or treatment
    • H10P90/1906
    • H10P95/00
    • H10W10/021
    • H10W10/061
    • H10W10/181
    • H10W10/20
    • H10W20/40
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00Metal treatment
    • Y10S148/008Bi-level fabrication
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00Metal treatment
    • Y10S148/085Isolated-integrated
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00Metal treatment
    • Y10S148/122Polycrystalline
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00Metal treatment
    • Y10S148/15Silicon on sapphire SOS
FR7224473A 1971-10-21 1972-07-06 Expired FR2156543B1 (enExample)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US19145571A 1971-10-21 1971-10-21

Publications (2)

Publication Number Publication Date
FR2156543A1 FR2156543A1 (enExample) 1973-06-01
FR2156543B1 true FR2156543B1 (enExample) 1977-08-26

Family

ID=22705564

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7224473A Expired FR2156543B1 (enExample) 1971-10-21 1972-07-06

Country Status (12)

Country Link
US (1) US3791024A (enExample)
JP (1) JPS5112992B2 (enExample)
AU (1) AU462435B2 (enExample)
BE (1) BE786089A (enExample)
CA (1) CA967288A (enExample)
DE (1) DE2235185A1 (enExample)
ES (2) ES404273A1 (enExample)
FR (1) FR2156543B1 (enExample)
GB (1) GB1339095A (enExample)
IT (1) IT956533B (enExample)
NL (1) NL7209192A (enExample)
SE (1) SE376327B (enExample)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4074304A (en) * 1974-10-04 1978-02-14 Nippon Electric Company, Ltd. Semiconductor device having a miniature junction area and process for fabricating same
US4094057A (en) * 1976-03-29 1978-06-13 International Business Machines Corporation Field effect transistor lost film fabrication process
JPS5721856B2 (en) * 1977-11-28 1982-05-10 Nippon Telegraph & Telephone Semiconductor and its manufacture
US4199384A (en) * 1979-01-29 1980-04-22 Rca Corporation Method of making a planar semiconductor on insulating substrate device utilizing the deposition of a dual dielectric layer between device islands
JPH0628313B2 (ja) * 1982-01-19 1994-04-13 キヤノン株式会社 半導体素子
US4481707A (en) * 1983-02-24 1984-11-13 The United States Of America As Represented By The Secretary Of The Air Force Method for the fabrication of dielectric isolated junction field effect transistor and PNP transistor
JPS6072243A (ja) * 1983-09-28 1985-04-24 Matsushita Electric Ind Co Ltd 半導体集積回路装置
US4879585A (en) * 1984-03-31 1989-11-07 Kabushiki Kaisha Toshiba Semiconductor device
US4897698A (en) * 1984-10-31 1990-01-30 Texas Instruments Incorporated Horizontal structure thin film transistor
JPH01162376A (ja) * 1987-12-18 1989-06-26 Fujitsu Ltd 半導体装置の製造方法
US5525536A (en) * 1991-12-26 1996-06-11 Rohm Co., Ltd. Method for producing SOI substrate and semiconductor device using the same
US5952695A (en) * 1997-03-05 1999-09-14 International Business Machines Corporation Silicon-on-insulator and CMOS-on-SOI double film structures
US5889293A (en) * 1997-04-04 1999-03-30 International Business Machines Corporation Electrical contact to buried SOI structures
US5834350A (en) * 1997-06-11 1998-11-10 Advanced Micro Devices, Inc. Elevated transistor fabrication technique
US6353246B1 (en) * 1998-11-23 2002-03-05 International Business Machines Corporation Semiconductor device including dislocation in merged SOI/DRAM chips
JP4540146B2 (ja) * 1998-12-24 2010-09-08 ルネサスエレクトロニクス株式会社 半導体装置の製造方法
US6259135B1 (en) 1999-09-24 2001-07-10 International Business Machines Corporation MOS transistors structure for reducing the size of pitch limited circuits
GB2492706B (en) 2010-05-05 2016-06-22 Allsteel Inc Moveable and demountable wall panel system for butt-glazed wall panels

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3290753A (en) * 1963-08-19 1966-12-13 Bell Telephone Labor Inc Method of making semiconductor integrated circuit elements
US3359467A (en) * 1965-02-04 1967-12-19 Texas Instruments Inc Resistors for integrated circuits
US3442011A (en) * 1965-06-30 1969-05-06 Texas Instruments Inc Method for isolating individual devices in an integrated circuit monolithic bar
US3519901A (en) * 1968-01-29 1970-07-07 Texas Instruments Inc Bi-layer insulation structure including polycrystalline semiconductor material for integrated circuit isolation

Also Published As

Publication number Publication date
US3791024A (en) 1974-02-12
JPS5112992B2 (enExample) 1976-04-23
SE376327B (enExample) 1975-05-12
FR2156543A1 (enExample) 1973-06-01
ES410640A1 (es) 1975-12-01
BE786089A (fr) 1972-11-03
CA967288A (en) 1975-05-06
GB1339095A (en) 1973-11-28
JPS4850679A (enExample) 1973-07-17
AU462435B2 (en) 1975-06-26
AU4573072A (en) 1974-03-07
ES404273A1 (es) 1975-06-01
NL7209192A (enExample) 1973-04-25
IT956533B (it) 1973-10-10
DE2235185A1 (de) 1973-04-26

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Legal Events

Date Code Title Description
CL Concession to grant licences
ST Notification of lapse