FR2147904B1 - - Google Patents
Info
- Publication number
- FR2147904B1 FR2147904B1 FR7206875A FR7206875A FR2147904B1 FR 2147904 B1 FR2147904 B1 FR 2147904B1 FR 7206875 A FR7206875 A FR 7206875A FR 7206875 A FR7206875 A FR 7206875A FR 2147904 B1 FR2147904 B1 FR 2147904B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
- H01J49/46—Static spectrometers
- H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
- H01J49/488—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with retarding grids
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US16857571A | 1971-08-03 | 1971-08-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2147904A1 FR2147904A1 (fr) | 1973-03-11 |
| FR2147904B1 true FR2147904B1 (fr) | 1978-03-10 |
Family
ID=22612064
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7206875A Expired FR2147904B1 (fr) | 1971-08-03 | 1972-02-29 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US3749926A (fr) |
| FR (1) | FR2147904B1 (fr) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3935454A (en) * | 1974-06-28 | 1976-01-27 | E. I. Du Pont De Nemours & Company | Electron collection in electron spectrometers |
| FR2335839A1 (fr) * | 1975-12-19 | 1977-07-15 | Commissariat Energie Atomique | Procede d'analyse d'echantillons en matiere isolante par spectrometrie photo-electronique et porte-echantillon pour la mise en oeuvre dudit procede |
| US4546254A (en) * | 1983-03-24 | 1985-10-08 | Shimadzu Corporation | Charged particle energy analyzer |
| US5120968A (en) * | 1990-07-05 | 1992-06-09 | The United States Of America As Represented By The Secretary Of The Navy | Emittance measuring device for charged particle beams |
| DE69924240T2 (de) * | 1999-06-23 | 2006-02-09 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Ladungsträgerteilchenstrahlvorrichtung |
| GB2428868B (en) * | 2005-10-28 | 2008-11-19 | Thermo Electron Corp | Spectrometer for surface analysis and method therefor |
| JP4878501B2 (ja) * | 2006-05-25 | 2012-02-15 | 株式会社日立ハイテクノロジーズ | 荷電粒子線応用装置 |
| JP5545577B2 (ja) * | 2009-08-28 | 2014-07-09 | 独立行政法人産業技術総合研究所 | 電極部材、電子エネルギー分析器、光電子エネルギー分析器、及び温度測定装置 |
| US9437408B2 (en) | 2012-03-06 | 2016-09-06 | Scienta Omicron Ab | Analyser arrangement for particle spectrometer |
| JP5815826B2 (ja) * | 2014-10-07 | 2015-11-17 | ヴィゲー・シエンタ・アーベー | 粒子分光計のための分析装置 |
| JP7008671B2 (ja) | 2019-09-13 | 2022-01-25 | 日本電子株式会社 | 荷電粒子線装置および分析方法 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1439064A (fr) * | 1965-02-09 | 1966-05-20 | Centre Nat Rech Scient | Perfectionnements aux analyseurs ioniques |
| GB1171700A (en) * | 1967-10-31 | 1969-11-26 | Atomic Energy Authority Uk | Improvements in or relating to Ion Beam Intensity Measuring Apparatus and Methods |
-
1971
- 1971-08-03 US US00168575A patent/US3749926A/en not_active Expired - Lifetime
-
1972
- 1972-02-29 FR FR7206875A patent/FR2147904B1/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| FR2147904A1 (fr) | 1973-03-11 |
| US3749926A (en) | 1973-07-31 |