FR2144678B1 - - Google Patents

Info

Publication number
FR2144678B1
FR2144678B1 FR7222370A FR7222370A FR2144678B1 FR 2144678 B1 FR2144678 B1 FR 2144678B1 FR 7222370 A FR7222370 A FR 7222370A FR 7222370 A FR7222370 A FR 7222370A FR 2144678 B1 FR2144678 B1 FR 2144678B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7222370A
Other languages
French (fr)
Other versions
FR2144678A1 (Direct
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Siemens Corp
Original Assignee
Siemens AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE2133843A external-priority patent/DE2133843A1/de
Priority claimed from DE2133877A external-priority patent/DE2133877A1/de
Priority claimed from DE2133876A external-priority patent/DE2133876A1/de
Application filed by Siemens AG, Siemens Corp filed Critical Siemens AG
Publication of FR2144678A1 publication Critical patent/FR2144678A1/fr
Application granted granted Critical
Publication of FR2144678B1 publication Critical patent/FR2144678B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H10P72/13—
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/14—Substrate holders or susceptors
    • H10P72/0436—
    • H10P72/15—

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
FR7222370A 1971-07-07 1972-06-21 Expired FR2144678B1 (Direct)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE2133843A DE2133843A1 (de) 1971-07-07 1971-07-07 Anordnung zum eindiffundieren von dotierstoffen in halbleiterscheiben
DE2133877A DE2133877A1 (de) 1971-07-07 1971-07-07 Anordnung zum eindiffundieren von dotierstoffen in halbleiterscheiben
DE2133876A DE2133876A1 (de) 1971-07-07 1971-07-07 Anordnung zum eindiffundieren von dotierstoffen

Publications (2)

Publication Number Publication Date
FR2144678A1 FR2144678A1 (Direct) 1973-02-16
FR2144678B1 true FR2144678B1 (Direct) 1975-08-29

Family

ID=27183548

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7222370A Expired FR2144678B1 (Direct) 1971-07-07 1972-06-21

Country Status (4)

Country Link
FR (1) FR2144678B1 (Direct)
GB (1) GB1385730A (Direct)
IT (1) IT962430B (Direct)
NL (1) NL7206014A (Direct)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1502754A (en) * 1975-12-22 1978-03-01 Siemens Ag Heat-treatment of semi-conductor wafers
JPS5595321A (en) * 1979-01-12 1980-07-19 Matsushita Electric Ind Co Ltd Container of semiconductor substrate for liquid-phase epitaxial growth
US4856544A (en) * 1984-05-21 1989-08-15 Cfm Technologies, Inc. Vessel and system for treating wafers with fluids
US4633893A (en) * 1984-05-21 1987-01-06 Cfm Technologies Limited Partnership Apparatus for treating semiconductor wafers
US4577650A (en) * 1984-05-21 1986-03-25 Mcconnell Christopher F Vessel and system for treating wafers with fluids
US4740249A (en) * 1984-05-21 1988-04-26 Christopher F. McConnell Method of treating wafers with fluid
US4738272A (en) * 1984-05-21 1988-04-19 Mcconnell Christopher F Vessel and system for treating wafers with fluids
FR2702088B1 (fr) * 1993-02-24 1995-05-24 Sgs Thomson Microelectronics Nacelle pour plaquettes de silicium.
WO1998035765A1 (en) * 1997-02-18 1998-08-20 Scp Global Technologies Multiple stage wet processing chamber
US6450346B1 (en) 2000-06-30 2002-09-17 Integrated Materials, Inc. Silicon fixtures for supporting wafers during thermal processing
EP1297558B1 (en) * 2000-06-30 2011-04-20 Integrated Materials, Inc. Silicon fixtures for supporting wafers during thermal processing and method of fabrication
US20040188319A1 (en) * 2003-03-28 2004-09-30 Saint-Gobain Ceramics & Plastics, Inc. Wafer carrier having improved processing characteristics
DE102015004419A1 (de) * 2015-04-02 2016-10-06 Centrotherm Photovoltaics Ag Waferboot und Plasma-Behandlungsvorrichtung für Wafer

Also Published As

Publication number Publication date
FR2144678A1 (Direct) 1973-02-16
NL7206014A (Direct) 1973-01-09
IT962430B (it) 1973-12-20
GB1385730A (en) 1975-02-26

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Legal Events

Date Code Title Description
ST Notification of lapse