FR2143069A1 - Smooth ceramic substrate - for microcircuits consisting of very dense aluminium oxide with nonporous surface - Google Patents
Smooth ceramic substrate - for microcircuits consisting of very dense aluminium oxide with nonporous surfaceInfo
- Publication number
- FR2143069A1 FR2143069A1 FR7222014A FR7222014A FR2143069A1 FR 2143069 A1 FR2143069 A1 FR 2143069A1 FR 7222014 A FR7222014 A FR 7222014A FR 7222014 A FR7222014 A FR 7222014A FR 2143069 A1 FR2143069 A1 FR 2143069A1
- Authority
- FR
- France
- Prior art keywords
- microcircuits
- ceramic substrate
- surface layer
- smooth ceramic
- density
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
- H01L23/14—Mountings, e.g. non-detachable insulating substrates characterised by the material or its electrical properties
- H01L23/15—Ceramic or glass substrates
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/10—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on aluminium oxide
- C04B35/111—Fine ceramics
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N97/00—Electric solid-state thin-film or thick-film devices, not otherwise provided for
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/0306—Inorganic insulating substrates, e.g. ceramic, glass
Abstract
Shaped unglazed, smooth ceramic substrate has a density of >=90% the theoretical density of crystalline Al2O3 and a surface layer of randomly oriented, tightly packed crystals of Al2O3 with a hexagonal prismatic shape, so that the surface layer has a density practically equal to that of crystalline Al2O3 a porosity of practically nil and a surface smoothness of 0.00020mm, pref. 0.00013 mm. Prods. is used for prodn. of electronic components esp. thin layer microcircuits. The substrate having good electrical props. and a surface layer of low porosity and very high smoothness, which is very suitable for the deposition of very thin metal layers.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US15498371A | 1971-06-21 | 1971-06-21 | |
US15498171A | 1971-06-21 | 1971-06-21 |
Publications (1)
Publication Number | Publication Date |
---|---|
FR2143069A1 true FR2143069A1 (en) | 1973-02-02 |
Family
ID=26851916
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7222014A Withdrawn FR2143069A1 (en) | 1971-06-21 | 1972-06-19 | Smooth ceramic substrate - for microcircuits consisting of very dense aluminium oxide with nonporous surface |
Country Status (3)
Country | Link |
---|---|
DE (1) | DE2230339A1 (en) |
FR (1) | FR2143069A1 (en) |
NL (1) | NL7208387A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2394506A1 (en) * | 1977-06-16 | 1979-01-12 | Siemens Ag | PROCESS FOR MANUFACTURING CERAMIC SUBSTRATES |
FR2628674A1 (en) * | 1988-03-19 | 1989-09-22 | Hoechst Ceram Tec Ag | PROCESS FOR INCREASING THE COOKING REMOVAL OF CERAMIC CASTING MATERIALS FOR SHEETS |
EP0711738A3 (en) * | 1994-11-09 | 1996-08-07 | Ngk Insulators Ltd | Ceramic green sheet and method for producing ceramic substrate |
-
1972
- 1972-06-19 FR FR7222014A patent/FR2143069A1/en not_active Withdrawn
- 1972-06-20 NL NL7208387A patent/NL7208387A/xx unknown
- 1972-06-21 DE DE2230339A patent/DE2230339A1/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2394506A1 (en) * | 1977-06-16 | 1979-01-12 | Siemens Ag | PROCESS FOR MANUFACTURING CERAMIC SUBSTRATES |
FR2628674A1 (en) * | 1988-03-19 | 1989-09-22 | Hoechst Ceram Tec Ag | PROCESS FOR INCREASING THE COOKING REMOVAL OF CERAMIC CASTING MATERIALS FOR SHEETS |
EP0711738A3 (en) * | 1994-11-09 | 1996-08-07 | Ngk Insulators Ltd | Ceramic green sheet and method for producing ceramic substrate |
US5733499A (en) * | 1994-11-09 | 1998-03-31 | Ngk Insulators, Ltd. | Method for producing ceramic substrate |
US5955392A (en) * | 1994-11-09 | 1999-09-21 | Ngk Insulators, Ltd. | Zirconia ceramic green sheet |
Also Published As
Publication number | Publication date |
---|---|
NL7208387A (en) | 1972-12-27 |
DE2230339A1 (en) | 1973-01-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |