FR2143069A1 - Smooth ceramic substrate - for microcircuits consisting of very dense aluminium oxide with nonporous surface - Google Patents

Smooth ceramic substrate - for microcircuits consisting of very dense aluminium oxide with nonporous surface

Info

Publication number
FR2143069A1
FR2143069A1 FR7222014A FR7222014A FR2143069A1 FR 2143069 A1 FR2143069 A1 FR 2143069A1 FR 7222014 A FR7222014 A FR 7222014A FR 7222014 A FR7222014 A FR 7222014A FR 2143069 A1 FR2143069 A1 FR 2143069A1
Authority
FR
France
Prior art keywords
microcircuits
ceramic substrate
surface layer
smooth ceramic
density
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR7222014A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DUPLATE CANADA Ltd
Original Assignee
DUPLATE CANADA Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by DUPLATE CANADA Ltd filed Critical DUPLATE CANADA Ltd
Publication of FR2143069A1 publication Critical patent/FR2143069A1/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/12—Mountings, e.g. non-detachable insulating substrates
    • H01L23/14—Mountings, e.g. non-detachable insulating substrates characterised by the material or its electrical properties
    • H01L23/15—Ceramic or glass substrates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/10—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on aluminium oxide
    • C04B35/111—Fine ceramics
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N97/00—Electric solid-state thin-film or thick-film devices, not otherwise provided for
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/03—Use of materials for the substrate
    • H05K1/0306—Inorganic insulating substrates, e.g. ceramic, glass

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

Shaped unglazed, smooth ceramic substrate has a density of >=90% the theoretical density of crystalline Al2O3 and a surface layer of randomly oriented, tightly packed crystals of Al2O3 with a hexagonal prismatic shape, so that the surface layer has a density practically equal to that of crystalline Al2O3 a porosity of practically nil and a surface smoothness of 0.00020mm, pref. 0.00013 mm. Prods. is used for prodn. of electronic components esp. thin layer microcircuits. The substrate having good electrical props. and a surface layer of low porosity and very high smoothness, which is very suitable for the deposition of very thin metal layers.
FR7222014A 1971-06-21 1972-06-19 Smooth ceramic substrate - for microcircuits consisting of very dense aluminium oxide with nonporous surface Withdrawn FR2143069A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US15498371A 1971-06-21 1971-06-21
US15498171A 1971-06-21 1971-06-21

Publications (1)

Publication Number Publication Date
FR2143069A1 true FR2143069A1 (en) 1973-02-02

Family

ID=26851916

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7222014A Withdrawn FR2143069A1 (en) 1971-06-21 1972-06-19 Smooth ceramic substrate - for microcircuits consisting of very dense aluminium oxide with nonporous surface

Country Status (3)

Country Link
DE (1) DE2230339A1 (en)
FR (1) FR2143069A1 (en)
NL (1) NL7208387A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2394506A1 (en) * 1977-06-16 1979-01-12 Siemens Ag PROCESS FOR MANUFACTURING CERAMIC SUBSTRATES
FR2628674A1 (en) * 1988-03-19 1989-09-22 Hoechst Ceram Tec Ag PROCESS FOR INCREASING THE COOKING REMOVAL OF CERAMIC CASTING MATERIALS FOR SHEETS
EP0711738A3 (en) * 1994-11-09 1996-08-07 Ngk Insulators Ltd Ceramic green sheet and method for producing ceramic substrate

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2394506A1 (en) * 1977-06-16 1979-01-12 Siemens Ag PROCESS FOR MANUFACTURING CERAMIC SUBSTRATES
FR2628674A1 (en) * 1988-03-19 1989-09-22 Hoechst Ceram Tec Ag PROCESS FOR INCREASING THE COOKING REMOVAL OF CERAMIC CASTING MATERIALS FOR SHEETS
EP0711738A3 (en) * 1994-11-09 1996-08-07 Ngk Insulators Ltd Ceramic green sheet and method for producing ceramic substrate
US5733499A (en) * 1994-11-09 1998-03-31 Ngk Insulators, Ltd. Method for producing ceramic substrate
US5955392A (en) * 1994-11-09 1999-09-21 Ngk Insulators, Ltd. Zirconia ceramic green sheet

Also Published As

Publication number Publication date
DE2230339A1 (en) 1973-01-11
NL7208387A (en) 1972-12-27

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Legal Events

Date Code Title Description
ST Notification of lapse