FR2132176B1 - - Google Patents

Info

Publication number
FR2132176B1
FR2132176B1 FR7211021A FR7211021A FR2132176B1 FR 2132176 B1 FR2132176 B1 FR 2132176B1 FR 7211021 A FR7211021 A FR 7211021A FR 7211021 A FR7211021 A FR 7211021A FR 2132176 B1 FR2132176 B1 FR 2132176B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7211021A
Other languages
French (fr)
Other versions
FR2132176A1 (ref
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Siemens Corp
Original Assignee
Siemens AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG, Siemens Corp filed Critical Siemens AG
Publication of FR2132176A1 publication Critical patent/FR2132176A1/fr
Application granted granted Critical
Publication of FR2132176B1 publication Critical patent/FR2132176B1/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/16—Heating of the molten zone
    • C30B13/20—Heating of the molten zone by induction, e.g. hot wire technique
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/28—Controlling or regulating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
FR7211021A 1971-03-31 1972-03-29 Expired FR2132176B1 (ref)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19712115650 DE2115650C3 (de) 1971-03-31 1971-03-31 Verfahren zum Herstellen von einkristallinem Silicium

Publications (2)

Publication Number Publication Date
FR2132176A1 FR2132176A1 (ref) 1972-11-17
FR2132176B1 true FR2132176B1 (ref) 1974-08-02

Family

ID=5803427

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7211021A Expired FR2132176B1 (ref) 1971-03-31 1972-03-29

Country Status (10)

Country Link
JP (1) JPS5432437B1 (ref)
BE (1) BE781581A (ref)
CA (1) CA966763A (ref)
CH (1) CH584569A5 (ref)
DE (1) DE2115650C3 (ref)
DK (1) DK134665C (ref)
FR (1) FR2132176B1 (ref)
GB (1) GB1332272A (ref)
IT (1) IT959577B (ref)
NL (1) NL7114423A (ref)

Also Published As

Publication number Publication date
BE781581A (fr) 1972-07-17
NL7114423A (ref) 1972-10-03
DE2115650A1 (de) 1972-10-12
GB1332272A (en) 1973-10-03
CH584569A5 (ref) 1977-02-15
DE2115650C3 (de) 1980-01-17
DK134665B (da) 1976-12-20
DK134665C (da) 1977-05-23
IT959577B (it) 1973-11-10
FR2132176A1 (ref) 1972-11-17
CA966763A (en) 1975-04-29
DE2115650B2 (de) 1979-05-23
JPS5432437B1 (ref) 1979-10-15

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Legal Events

Date Code Title Description
ST Notification of lapse