CA966763A - Method of achieving a uniform dislocation density in a zone-melted semiconductor rod - Google Patents

Method of achieving a uniform dislocation density in a zone-melted semiconductor rod

Info

Publication number
CA966763A
CA966763A CA135,926A CA135926A CA966763A CA 966763 A CA966763 A CA 966763A CA 135926 A CA135926 A CA 135926A CA 966763 A CA966763 A CA 966763A
Authority
CA
Canada
Prior art keywords
achieving
zone
dislocation density
semiconductor rod
melted semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA135,926A
Other languages
English (en)
Other versions
CA135926S (en
Inventor
Wolfgang Keller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Application granted granted Critical
Publication of CA966763A publication Critical patent/CA966763A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/16—Heating of the molten zone
    • C30B13/20—Heating of the molten zone by induction, e.g. hot wire technique
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/28—Controlling or regulating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
CA135,926A 1971-03-31 1972-03-01 Method of achieving a uniform dislocation density in a zone-melted semiconductor rod Expired CA966763A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19712115650 DE2115650C3 (de) 1971-03-31 1971-03-31 Verfahren zum Herstellen von einkristallinem Silicium

Publications (1)

Publication Number Publication Date
CA966763A true CA966763A (en) 1975-04-29

Family

ID=5803427

Family Applications (1)

Application Number Title Priority Date Filing Date
CA135,926A Expired CA966763A (en) 1971-03-31 1972-03-01 Method of achieving a uniform dislocation density in a zone-melted semiconductor rod

Country Status (10)

Country Link
JP (1) JPS5432437B1 (ref)
BE (1) BE781581A (ref)
CA (1) CA966763A (ref)
CH (1) CH584569A5 (ref)
DE (1) DE2115650C3 (ref)
DK (1) DK134665C (ref)
FR (1) FR2132176B1 (ref)
GB (1) GB1332272A (ref)
IT (1) IT959577B (ref)
NL (1) NL7114423A (ref)

Also Published As

Publication number Publication date
BE781581A (fr) 1972-07-17
NL7114423A (ref) 1972-10-03
DE2115650A1 (de) 1972-10-12
GB1332272A (en) 1973-10-03
CH584569A5 (ref) 1977-02-15
DE2115650C3 (de) 1980-01-17
DK134665B (da) 1976-12-20
FR2132176B1 (ref) 1974-08-02
DK134665C (da) 1977-05-23
IT959577B (it) 1973-11-10
FR2132176A1 (ref) 1972-11-17
DE2115650B2 (de) 1979-05-23
JPS5432437B1 (ref) 1979-10-15

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