FR2128647A1 - - Google Patents

Info

Publication number
FR2128647A1
FR2128647A1 FR7207653A FR7207653A FR2128647A1 FR 2128647 A1 FR2128647 A1 FR 2128647A1 FR 7207653 A FR7207653 A FR 7207653A FR 7207653 A FR7207653 A FR 7207653A FR 2128647 A1 FR2128647 A1 FR 2128647A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7207653A
Other languages
French (fr)
Other versions
FR2128647B1 (ko
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of FR2128647A1 publication Critical patent/FR2128647A1/fr
Application granted granted Critical
Publication of FR2128647B1 publication Critical patent/FR2128647B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/02—Induction heating
    • H05B6/10—Induction heating apparatus, other than furnaces, for specific applications
    • H05B6/105—Induction heating apparatus, other than furnaces, for specific applications using a susceptor
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/12—Substrate holders or susceptors
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/14—Substrate holders or susceptors
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/02—Induction heating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
FR7207653A 1971-03-06 1972-03-06 Expired FR2128647B1 (ko)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7103019A NL7103019A (ko) 1971-03-06 1971-03-06

Publications (2)

Publication Number Publication Date
FR2128647A1 true FR2128647A1 (ko) 1972-10-20
FR2128647B1 FR2128647B1 (ko) 1977-07-15

Family

ID=19812633

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7207653A Expired FR2128647B1 (ko) 1971-03-06 1972-03-06

Country Status (7)

Country Link
US (1) US3754110A (ko)
JP (1) JPS5624368B1 (ko)
DE (1) DE2209782A1 (ko)
FR (1) FR2128647B1 (ko)
GB (1) GB1370717A (ko)
IT (1) IT949866B (ko)
NL (1) NL7103019A (ko)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7209297A (ko) * 1972-07-01 1974-01-03
US3980854A (en) * 1974-11-15 1976-09-14 Rca Corporation Graphite susceptor structure for inductively heating semiconductor wafers
US4099041A (en) * 1977-04-11 1978-07-04 Rca Corporation Susceptor for heating semiconductor substrates
US4334354A (en) * 1977-07-12 1982-06-15 Trw Inc. Method of fabricating a solar array
US4409451A (en) * 1981-08-31 1983-10-11 United Technologies Corporation Induction furnace having improved thermal profile
DE19630703C2 (de) * 1996-07-30 2000-02-10 Mtu Muenchen Gmbh Verfahren und Vorrichtung zum Reparaturschweissen von Teilen aus Ni-Basis-Legierungen sowie Anwendung des Verfahrens und Vorrichtung
US8603248B2 (en) * 2006-02-10 2013-12-10 Veeco Instruments Inc. System and method for varying wafer surface temperature via wafer-carrier temperature offset
EP2562291A1 (en) * 2008-08-29 2013-02-27 Veeco Instruments Inc. Wafer carrier with varying thermal resistance
US10316412B2 (en) 2012-04-18 2019-06-11 Veeco Instruments Inc. Wafter carrier for chemical vapor deposition systems
US10167571B2 (en) 2013-03-15 2019-01-01 Veeco Instruments Inc. Wafer carrier having provisions for improving heating uniformity in chemical vapor deposition systems
CN106030761B (zh) 2014-01-27 2019-09-13 威科仪器有限公司 用于化学气相沉积系统的晶片载体及其制造方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1360497A (fr) * 1963-06-12 1964-05-08 Siemens Ag Procédé pour réaliser des couches cristallines en des substances peu volatiles, notamment des substances semi-conductrices
US3399651A (en) * 1967-05-26 1968-09-03 Philco Ford Corp Susceptor for growing polycrystalline silicon on wafers of monocrystalline silicon
US3505499A (en) * 1968-04-04 1970-04-07 Siemens Ag Device for thermal processing of disc shaped objects for semiconductors
FR2027422A1 (ko) * 1968-12-31 1970-09-25 Texas Instruments Inc
US3539759A (en) * 1968-11-08 1970-11-10 Ibm Susceptor structure in silicon epitaxy

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2773923A (en) * 1953-01-26 1956-12-11 Raytheon Mfg Co Zone-refining apparatus
US3168696A (en) * 1962-06-26 1965-02-02 Erick O Schonstedt Magnetic flux directing cylindrical core having a plurality of serially arranged interruptions
GB1121860A (en) * 1964-11-21 1968-07-31 Tokushu Denki Kabushiki Kaisha A heating rotary drum apparatus
US3524776A (en) * 1967-01-30 1970-08-18 Corning Glass Works Process for coating silicon wafers

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1360497A (fr) * 1963-06-12 1964-05-08 Siemens Ag Procédé pour réaliser des couches cristallines en des substances peu volatiles, notamment des substances semi-conductrices
US3399651A (en) * 1967-05-26 1968-09-03 Philco Ford Corp Susceptor for growing polycrystalline silicon on wafers of monocrystalline silicon
US3505499A (en) * 1968-04-04 1970-04-07 Siemens Ag Device for thermal processing of disc shaped objects for semiconductors
US3539759A (en) * 1968-11-08 1970-11-10 Ibm Susceptor structure in silicon epitaxy
FR2027422A1 (ko) * 1968-12-31 1970-09-25 Texas Instruments Inc

Also Published As

Publication number Publication date
IT949866B (it) 1973-06-11
JPS5624368B1 (ko) 1981-06-05
NL7103019A (ko) 1972-09-08
GB1370717A (en) 1974-10-16
FR2128647B1 (ko) 1977-07-15
US3754110A (en) 1973-08-21
DE2209782A1 (de) 1972-09-14

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Legal Events

Date Code Title Description
ST Notification of lapse