FR2116931A5 - Dispositif de protection d'appareillages d'etude d'echantillons a l'aide d'un pinceau d'electrons - Google Patents

Dispositif de protection d'appareillages d'etude d'echantillons a l'aide d'un pinceau d'electrons

Info

Publication number
FR2116931A5
FR2116931A5 FR7044739A FR7044739A FR2116931A5 FR 2116931 A5 FR2116931 A5 FR 2116931A5 FR 7044739 A FR7044739 A FR 7044739A FR 7044739 A FR7044739 A FR 7044739A FR 2116931 A5 FR2116931 A5 FR 2116931A5
Authority
FR
France
Prior art keywords
protection device
study equipment
sample study
brush
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7044739A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Office National dEtudes et de Recherches Aerospatiales ONERA
Original Assignee
Office National dEtudes et de Recherches Aerospatiales ONERA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Office National dEtudes et de Recherches Aerospatiales ONERA filed Critical Office National dEtudes et de Recherches Aerospatiales ONERA
Priority to FR7044739A priority Critical patent/FR2116931A5/fr
Priority to GB5619871A priority patent/GB1363900A/en
Priority to US00206601A priority patent/US3800152A/en
Priority to JP71100607A priority patent/JPS52666B1/ja
Priority to DE19712161622 priority patent/DE2161622C3/de
Application granted granted Critical
Publication of FR2116931A5 publication Critical patent/FR2116931A5/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • H01J37/226—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
    • H01J37/228—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object whereby illumination or light collection take place in the same area of the discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
FR7044739A 1970-12-11 1970-12-11 Dispositif de protection d'appareillages d'etude d'echantillons a l'aide d'un pinceau d'electrons Expired FR2116931A5 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR7044739A FR2116931A5 (fr) 1970-12-11 1970-12-11 Dispositif de protection d'appareillages d'etude d'echantillons a l'aide d'un pinceau d'electrons
GB5619871A GB1363900A (en) 1970-12-11 1971-12-03 System to protect equipment for studying samples by means of an electron beam
US00206601A US3800152A (en) 1970-12-11 1971-12-10 Electron analysis apparatus with heat-protective shield means spacedly overlying a sample supporting surface
JP71100607A JPS52666B1 (fr) 1970-12-11 1971-12-11
DE19712161622 DE2161622C3 (de) 1970-12-11 1971-12-11 Vorrichtung zur Untersuchung einer Probe be! erhöhter Temperatur

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7044739A FR2116931A5 (fr) 1970-12-11 1970-12-11 Dispositif de protection d'appareillages d'etude d'echantillons a l'aide d'un pinceau d'electrons

Publications (1)

Publication Number Publication Date
FR2116931A5 true FR2116931A5 (fr) 1972-07-21

Family

ID=9065646

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7044739A Expired FR2116931A5 (fr) 1970-12-11 1970-12-11 Dispositif de protection d'appareillages d'etude d'echantillons a l'aide d'un pinceau d'electrons

Country Status (4)

Country Link
US (1) US3800152A (fr)
JP (1) JPS52666B1 (fr)
FR (1) FR2116931A5 (fr)
GB (1) GB1363900A (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2875940B2 (ja) * 1993-08-26 1999-03-31 株式会社日立製作所 試料の高さ計測手段を備えた電子ビーム装置
JP3216474B2 (ja) * 1995-03-30 2001-10-09 株式会社日立製作所 走査型電子顕微鏡
EP1724809A1 (fr) * 2005-05-18 2006-11-22 FEI Company Appareil optique à particules d'irradiation d' un échantillon

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2899556A (en) * 1952-10-17 1959-08-11 Apparatus for the treatment of substances
US3005099A (en) * 1957-10-26 1961-10-17 Centre Nat Rech Scient X-ray diffractograph enabling diagrams to be taken at very high temperatures
NL271119A (fr) * 1961-07-10
US3346736A (en) * 1964-09-22 1967-10-10 Applied Res Lab Inc Electron probe apparatus having an objective lens with an aperture for restricting fluid flow
US3374349A (en) * 1966-11-14 1968-03-19 Victor G. Macres Electron probe having a specific shortfocal length magnetic lens and light microscope
US3549999A (en) * 1968-06-05 1970-12-22 Gen Electric Method and apparatus for testing circuits by measuring secondary emission electrons generated by electron beam bombardment of the pulsed circuit
JPS491058B1 (fr) * 1969-09-24 1974-01-11
US3629579A (en) * 1970-01-16 1971-12-21 Hitachi Ltd Electron probe specimen stage with a scattered electron detector mounted thereon

Also Published As

Publication number Publication date
JPS52666B1 (fr) 1977-01-10
GB1363900A (en) 1974-08-21
US3800152A (en) 1974-03-26
DE2161622A1 (de) 1972-06-15
DE2161622B2 (de) 1976-10-07

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Legal Events

Date Code Title Description
ST Notification of lapse