JPS52666B1 - - Google Patents

Info

Publication number
JPS52666B1
JPS52666B1 JP71100607A JP10060771A JPS52666B1 JP S52666 B1 JPS52666 B1 JP S52666B1 JP 71100607 A JP71100607 A JP 71100607A JP 10060771 A JP10060771 A JP 10060771A JP S52666 B1 JPS52666 B1 JP S52666B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP71100607A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Office National dEtudes et de Recherches Aerospatiales ONERA
Original Assignee
Office National dEtudes et de Recherches Aerospatiales ONERA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Office National dEtudes et de Recherches Aerospatiales ONERA filed Critical Office National dEtudes et de Recherches Aerospatiales ONERA
Publication of JPS52666B1 publication Critical patent/JPS52666B1/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • H01J37/226—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
    • H01J37/228—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object whereby illumination or light collection take place in the same area of the discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP71100607A 1970-12-11 1971-12-11 Pending JPS52666B1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7044739A FR2116931A5 (fr) 1970-12-11 1970-12-11 Dispositif de protection d'appareillages d'etude d'echantillons a l'aide d'un pinceau d'electrons

Publications (1)

Publication Number Publication Date
JPS52666B1 true JPS52666B1 (ja) 1977-01-10

Family

ID=9065646

Family Applications (1)

Application Number Title Priority Date Filing Date
JP71100607A Pending JPS52666B1 (ja) 1970-12-11 1971-12-11

Country Status (4)

Country Link
US (1) US3800152A (ja)
JP (1) JPS52666B1 (ja)
FR (1) FR2116931A5 (ja)
GB (1) GB1363900A (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2875940B2 (ja) * 1993-08-26 1999-03-31 株式会社日立製作所 試料の高さ計測手段を備えた電子ビーム装置
JP3216474B2 (ja) * 1995-03-30 2001-10-09 株式会社日立製作所 走査型電子顕微鏡
EP1724809A1 (en) * 2005-05-18 2006-11-22 FEI Company Particle-optical apparatus for the irradiation of a sample

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL109549C (ja) * 1952-10-17
US3005099A (en) * 1957-10-26 1961-10-17 Centre Nat Rech Scient X-ray diffractograph enabling diagrams to be taken at very high temperatures
NL271119A (ja) * 1961-07-10
US3346736A (en) * 1964-09-22 1967-10-10 Applied Res Lab Inc Electron probe apparatus having an objective lens with an aperture for restricting fluid flow
US3374349A (en) * 1966-11-14 1968-03-19 Victor G. Macres Electron probe having a specific shortfocal length magnetic lens and light microscope
US3549999A (en) * 1968-06-05 1970-12-22 Gen Electric Method and apparatus for testing circuits by measuring secondary emission electrons generated by electron beam bombardment of the pulsed circuit
JPS491058B1 (ja) * 1969-09-24 1974-01-11
US3629579A (en) * 1970-01-16 1971-12-21 Hitachi Ltd Electron probe specimen stage with a scattered electron detector mounted thereon

Also Published As

Publication number Publication date
GB1363900A (en) 1974-08-21
DE2161622B2 (de) 1976-10-07
US3800152A (en) 1974-03-26
FR2116931A5 (fr) 1972-07-21
DE2161622A1 (de) 1972-06-15

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