FR1538797A - Dispositif à faisceau d'électrons - Google Patents

Dispositif à faisceau d'électrons

Info

Publication number
FR1538797A
FR1538797A FR8692A FR06008692A FR1538797A FR 1538797 A FR1538797 A FR 1538797A FR 8692 A FR8692 A FR 8692A FR 06008692 A FR06008692 A FR 06008692A FR 1538797 A FR1538797 A FR 1538797A
Authority
FR
France
Prior art keywords
electron beam
beam device
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8692A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of FR1538797A publication Critical patent/FR1538797A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes
    • H01J1/20—Cathodes heated indirectly by an electric current; Cathodes heated by electron or ion bombardment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/02—Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
    • H01J29/04—Cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/065—Construction of guns or parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/07—Eliminating deleterious effects due to thermal effects or electric or magnetic fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/075—Electron guns using thermionic emission from cathodes heated by particle bombardment or by irradiation, e.g. by laser

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Solid Thermionic Cathode (AREA)
FR8692A 1966-10-24 1967-09-06 Dispositif à faisceau d'électrons Expired FR1538797A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US58910466A 1966-10-24 1966-10-24

Publications (1)

Publication Number Publication Date
FR1538797A true FR1538797A (fr) 1968-09-06

Family

ID=24356607

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8692A Expired FR1538797A (fr) 1966-10-24 1967-09-06 Dispositif à faisceau d'électrons

Country Status (7)

Country Link
US (1) US3462635A (fr)
BE (1) BE703101A (fr)
CH (1) CH455947A (fr)
FR (1) FR1538797A (fr)
GB (1) GB1150516A (fr)
NL (1) NL159526B (fr)
SE (1) SE319840B (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1291221A (en) * 1968-07-07 1972-10-04 Smith Kenneth C A Electron probe forming system
US3621324A (en) * 1968-11-05 1971-11-16 Westinghouse Electric Corp High-power cathode
US3631290A (en) * 1970-08-17 1971-12-28 Ibm Thermionic cathode for electron beam apparatus
US3727093A (en) * 1971-01-20 1973-04-10 Westinghouse Electric Corp Electron beam apparatus
NL7101954A (fr) * 1971-02-13 1972-08-15
US4055780A (en) * 1975-04-10 1977-10-25 National Institute For Researches In Inorganic Materials Thermionic emission cathode having a tip of a single crystal of lanthanum hexaboride
US4054946A (en) * 1976-09-28 1977-10-18 Bell Telephone Laboratories, Incorporated Electron source of a single crystal of lanthanum hexaboride emitting surface of (110) crystal plane
EP2264738B1 (fr) * 2009-06-18 2017-12-06 Carl Zeiss NTS Ltd. Canon à électrons utilisé dans un dispositif de faisceau à particules
CN110400731A (zh) * 2018-04-24 2019-11-01 大连纳晶科技有限公司 空心阴极旁热式六硼化镧电子束枪

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1334312A (fr) * 1960-06-14 1963-08-09 Lignes Telegraph Telephon Perfectionnements aux tubes électroniques du type magnétron
US3221203A (en) * 1962-06-01 1965-11-30 Rca Corp Sintered metal conductor support
US3312856A (en) * 1963-03-26 1967-04-04 Gen Electric Rhenium supported metallic boride cathode emitters

Also Published As

Publication number Publication date
DE1589974B2 (de) 1975-07-17
US3462635A (en) 1969-08-19
NL159526B (nl) 1979-02-15
DE1589974A1 (de) 1970-05-21
SE319840B (fr) 1970-01-26
CH455947A (de) 1968-05-15
NL6714182A (fr) 1968-04-25
BE703101A (fr) 1968-01-15
GB1150516A (en) 1969-04-30

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