NL7101954A - - Google Patents

Info

Publication number
NL7101954A
NL7101954A NL7101954A NL7101954A NL7101954A NL 7101954 A NL7101954 A NL 7101954A NL 7101954 A NL7101954 A NL 7101954A NL 7101954 A NL7101954 A NL 7101954A NL 7101954 A NL7101954 A NL 7101954A
Authority
NL
Netherlands
Application number
NL7101954A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to NL7101954A priority Critical patent/NL7101954A/xx
Priority to DE19712165192 priority patent/DE2165192A1/de
Priority to US00222149A priority patent/US3755705A/en
Priority to FR7204480A priority patent/FR2125357B1/fr
Priority to GB626472A priority patent/GB1377544A/en
Publication of NL7101954A publication Critical patent/NL7101954A/xx

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06Electron sources; Electron guns
    • H01J37/065Construction of guns or parts thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02Main electrodes
    • H01J1/13Solid thermionic cathodes
    • H01J1/15Cathodes heated directly by an electric current
    • H01J1/16Cathodes heated directly by an electric current characterised by the shape

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Solid Thermionic Cathode (AREA)
NL7101954A 1971-02-13 1971-02-13 NL7101954A (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
NL7101954A NL7101954A (fr) 1971-02-13 1971-02-13
DE19712165192 DE2165192A1 (de) 1971-02-13 1971-12-29 Kathode mit Ausnehmung im Emissionselement
US00222149A US3755705A (en) 1971-02-13 1972-01-31 Cathode having a cavity in the emissive element
FR7204480A FR2125357B1 (fr) 1971-02-13 1972-02-10
GB626472A GB1377544A (en) 1971-02-13 1972-02-10 Thermionic cathode

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7101954A NL7101954A (fr) 1971-02-13 1971-02-13

Publications (1)

Publication Number Publication Date
NL7101954A true NL7101954A (fr) 1972-08-15

Family

ID=19812480

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7101954A NL7101954A (fr) 1971-02-13 1971-02-13

Country Status (5)

Country Link
US (1) US3755705A (fr)
DE (1) DE2165192A1 (fr)
FR (1) FR2125357B1 (fr)
GB (1) GB1377544A (fr)
NL (1) NL7101954A (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2855864A1 (de) * 1978-12-22 1980-07-10 Ibm Deutschland Ionenquelle, insbesondere fuer ionenimplantationsanlagen
EP0287774A3 (fr) * 1987-04-24 1990-03-07 Balzers Aktiengesellschaft Cathode thermionique en épingle à cheveux

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1749780A (en) * 1922-01-31 1930-03-11 Westinghouse Lamp Co Incandescent-cathode device
US3462635A (en) * 1966-10-24 1969-08-19 Ibm Holder for highly reactive cathodes of rare-earth borides such as lanthanum hexaboride,the holder provided with a cooling means opposite to the emissive end of the cathode in order to reduce tendency of holder deterioration

Also Published As

Publication number Publication date
FR2125357A1 (fr) 1972-09-29
US3755705A (en) 1973-08-28
GB1377544A (en) 1974-12-18
FR2125357B1 (fr) 1975-02-14
DE2165192A1 (de) 1972-08-31

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