FR2115679A5 - Ultra-fine sinter fabrication - by deposition of a metal on a substrate - Google Patents

Ultra-fine sinter fabrication - by deposition of a metal on a substrate

Info

Publication number
FR2115679A5
FR2115679A5 FR7042894A FR7042894A FR2115679A5 FR 2115679 A5 FR2115679 A5 FR 2115679A5 FR 7042894 A FR7042894 A FR 7042894A FR 7042894 A FR7042894 A FR 7042894A FR 2115679 A5 FR2115679 A5 FR 2115679A5
Authority
FR
France
Prior art keywords
substrate
metal
ultra
deposition
fabrication
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7042894A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide SA
Original Assignee
Air Liquide SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide SA filed Critical Air Liquide SA
Priority to FR7042894A priority Critical patent/FR2115679A5/en
Application granted granted Critical
Publication of FR2115679A5 publication Critical patent/FR2115679A5/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

Molten metal in a crucible is evaporated onto a substrate with a pore size greater than 1 mu in an inert or reducing gas atmos. at a pressure of 10-2 to 50 torr. The distance between the crucible and substrate, 5-10 cm is such that the metal is deposited in an ultra-fine state. The interstices at the surface of the substrate are stopped up with a filler material prior to deposition of the metal which can be removed later by dissolution. The surface is then rendered smooth and flat until anchoring zones of substrate appear. The metal is then deposited.
FR7042894A 1970-11-30 1970-11-30 Ultra-fine sinter fabrication - by deposition of a metal on a substrate Expired FR2115679A5 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7042894A FR2115679A5 (en) 1970-11-30 1970-11-30 Ultra-fine sinter fabrication - by deposition of a metal on a substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7042894A FR2115679A5 (en) 1970-11-30 1970-11-30 Ultra-fine sinter fabrication - by deposition of a metal on a substrate

Publications (1)

Publication Number Publication Date
FR2115679A5 true FR2115679A5 (en) 1972-07-07

Family

ID=9064907

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7042894A Expired FR2115679A5 (en) 1970-11-30 1970-11-30 Ultra-fine sinter fabrication - by deposition of a metal on a substrate

Country Status (1)

Country Link
FR (1) FR2115679A5 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3447001A1 (en) * 1983-12-27 1985-09-12 Sharp K.K., Osaka Process for producing a humidity-permeable electrode for humidity sensors

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3447001A1 (en) * 1983-12-27 1985-09-12 Sharp K.K., Osaka Process for producing a humidity-permeable electrode for humidity sensors

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Legal Events

Date Code Title Description
ST Notification of lapse