FR2104604A5 - - Google Patents

Info

Publication number
FR2104604A5
FR2104604A5 FR7130437A FR7130437A FR2104604A5 FR 2104604 A5 FR2104604 A5 FR 2104604A5 FR 7130437 A FR7130437 A FR 7130437A FR 7130437 A FR7130437 A FR 7130437A FR 2104604 A5 FR2104604 A5 FR 2104604A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7130437A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Application granted granted Critical
Publication of FR2104604A5 publication Critical patent/FR2104604A5/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/84—Traps for removing or diverting unwanted particles, e.g. negative ions, fringing electrons; Arrangements for velocity or mass selection
    • H01J29/845—Traps for removing or diverting unwanted particles, e.g. negative ions, fringing electrons; Arrangements for velocity or mass selection by means of magnetic systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
FR7130437A 1970-08-21 1971-08-20 Expired FR2104604A5 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7012388A NL7012388A (de) 1970-08-21 1970-08-21

Publications (1)

Publication Number Publication Date
FR2104604A5 true FR2104604A5 (de) 1972-04-14

Family

ID=19810828

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7130437A Expired FR2104604A5 (de) 1970-08-21 1971-08-20

Country Status (5)

Country Link
CA (1) CA934075A (de)
DE (1) DE2137510C3 (de)
FR (1) FR2104604A5 (de)
GB (1) GB1364930A (de)
NL (1) NL7012388A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000036630A1 (en) * 1998-12-17 2000-06-22 Philips Electron Optics B.V. Particle-optical apparatus involving detection of auger electrons

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7404363A (nl) * 1974-04-01 1975-10-03 Philips Nv Elektronenmikroskoop met energieanalysator.
FR2584234B1 (fr) * 1985-06-28 1988-12-09 Cameca Testeur de circuit integre a faisceau d'electrons
EP0555911B1 (de) * 1992-02-12 1999-01-07 Koninklijke Philips Electronics N.V. Verfahren zur Verringerung einer räumlichen energiedispersiven Streuung eines Elektronenstrahlenbündels und eine für den Einsatz eines solchen Verfahrens geeignete Elektronenstrahlvorrichtung
US6184524B1 (en) 1996-08-07 2001-02-06 Gatan, Inc. Automated set up of an energy filtering transmission electron microscope
US5798524A (en) * 1996-08-07 1998-08-25 Gatan, Inc. Automated adjustment of an energy filtering transmission electron microscope
JP3757371B2 (ja) * 1999-07-05 2006-03-22 日本電子株式会社 エネルギーフィルタ及びそれを用いた電子顕微鏡
US6410924B1 (en) * 1999-11-16 2002-06-25 Schlumberger Technologies, Inc. Energy filtered focused ion beam column
EP1521289B1 (de) * 2003-09-11 2008-06-25 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Einstufiges System zur Reduktion der Energieverteilung eines Teilchenstrahls für ein Teilchenstrahlsystem
EP1783811A3 (de) 2005-11-02 2008-02-27 FEI Company Korrektor zur Korrektion von chromatischen Aberrationen in einem korpuskularoptiachen Apparat
GB0700754D0 (en) * 2007-01-15 2007-02-21 Oxford Instr Analytical Ltd Charged particle analyser and method
EP2166557A1 (de) 2008-09-22 2010-03-24 FEI Company Verfahren zur Berichtigung von Verzerrungen in einer teilchenoptischen Vorrichtung
EP2325862A1 (de) 2009-11-18 2011-05-25 Fei Company Korrektor für axiale Aberrationen einer teilchenoptischen Linse
EP2511936B1 (de) 2011-04-13 2013-10-02 Fei Company Verzerrungsfreie Stigmation eines TEM

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000036630A1 (en) * 1998-12-17 2000-06-22 Philips Electron Optics B.V. Particle-optical apparatus involving detection of auger electrons

Also Published As

Publication number Publication date
GB1364930A (en) 1974-08-29
CA934075A (en) 1973-09-18
DE2137510C3 (de) 1978-11-09
NL7012388A (de) 1972-02-23
DE2137510A1 (de) 1972-02-24
DE2137510B2 (de) 1978-03-16

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Legal Events

Date Code Title Description
ST Notification of lapse