FR2095259A1 - - Google Patents
Info
- Publication number
- FR2095259A1 FR2095259A1 FR7121454A FR7121454A FR2095259A1 FR 2095259 A1 FR2095259 A1 FR 2095259A1 FR 7121454 A FR7121454 A FR 7121454A FR 7121454 A FR7121454 A FR 7121454A FR 2095259 A1 FR2095259 A1 FR 2095259A1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
- H10W10/01—Manufacture or treatment
- H10W10/011—Manufacture or treatment of isolation regions comprising dielectric materials
- H10W10/012—Manufacture or treatment of isolation regions comprising dielectric materials using local oxidation of silicon [LOCOS]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D99/00—Subject matter not provided for in other groups of this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
- H10W10/10—Isolation regions comprising dielectric materials
- H10W10/13—Isolation regions comprising dielectric materials formed using local oxidation of silicon [LOCOS], e.g. sealed interface localised oxidation [SILO] or side-wall mask isolation [SWAMI]
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5100170 | 1970-06-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2095259A1 true FR2095259A1 (https=) | 1972-02-11 |
| FR2095259B1 FR2095259B1 (https=) | 1975-07-11 |
Family
ID=12874527
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7121454A Expired FR2095259B1 (https=) | 1970-06-15 | 1971-06-14 |
Country Status (3)
| Country | Link |
|---|---|
| DE (1) | DE2128470A1 (https=) |
| FR (1) | FR2095259B1 (https=) |
| GB (1) | GB1314923A (https=) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1571569A (https=) * | 1967-06-08 | 1969-06-20 |
-
1971
- 1971-06-08 DE DE19712128470 patent/DE2128470A1/de active Pending
- 1971-06-14 GB GB2779271A patent/GB1314923A/en not_active Expired
- 1971-06-14 FR FR7121454A patent/FR2095259B1/fr not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1571569A (https=) * | 1967-06-08 | 1969-06-20 |
Non-Patent Citations (6)
| Title |
|---|
| (NITRURE DE SILICIUM" L.PIERRE ) * |
| (REVUE NEERLANDAISE PHILIPS RESEARCH REPORTS,VOL.25,NO.2,AVRIL 1970,PAGES 118-132,"LOCAL * |
| (REVUE NEERLANDAISE PHILIPS RESEARCH REPORTS,VOL.25,NO.2,AVRIL 1970,PAGES 118-132,"LOCAL OXYDATION OF SILICON AND ITS APPLICATION IN SEMINCONDUCTOR-DEVICE TECHNOLOGY" J.A.APPELS ET AL ) * |
| OXYDATION OF SILICON AND ITS APPLICATION IN SEMINCONDUCTOR-DEVICE TECHNOLOGY" J.A.APPELS ET AL ) * |
| RE1970,NO.133,PAGES 325-28"TECHNOLOGIE:C.I.ET(VUE FRANCAISE ELECTRONIQUE INDUSTRIELLE,MAI) * |
| RE1970,NO.133,PAGES 325-28"TECHNOLOGIE:C.I.ETNITRURE DE SILICIUM" L.PIERRE (VUE FRANCAISE ELECTRONIQUE INDUSTRIELLE,MAI) * |
Also Published As
| Publication number | Publication date |
|---|---|
| DE2128470A1 (de) | 1972-01-20 |
| GB1314923A (en) | 1973-04-26 |
| FR2095259B1 (https=) | 1975-07-11 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |