FR2090384B1 - - Google Patents
Info
- Publication number
- FR2090384B1 FR2090384B1 FR7119644A FR7119644A FR2090384B1 FR 2090384 B1 FR2090384 B1 FR 2090384B1 FR 7119644 A FR7119644 A FR 7119644A FR 7119644 A FR7119644 A FR 7119644A FR 2090384 B1 FR2090384 B1 FR 2090384B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
- C23C16/18—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metallo-organic compounds
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Chemically Coating (AREA)
- Chemical Vapour Deposition (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU1432551 | 1970-05-29 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2090384A1 FR2090384A1 (fr) | 1972-01-14 |
FR2090384B1 true FR2090384B1 (fr) | 1976-03-05 |
Family
ID=20452367
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7119644A Expired FR2090384B1 (fr) | 1970-05-29 | 1971-05-28 |
Country Status (6)
Country | Link |
---|---|
US (1) | US3729335A (fr) |
CA (1) | CA935336A (fr) |
DE (1) | DE2124400C3 (fr) |
FR (1) | FR2090384B1 (fr) |
GB (1) | GB1306784A (fr) |
SE (1) | SE359322B (fr) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4042006A (en) * | 1973-01-05 | 1977-08-16 | Siemens Aktiengesellschaft | Pyrolytic process for producing a band-shaped metal layer on a substrate |
US3961926A (en) * | 1974-12-27 | 1976-06-08 | International Telephone And Telegraph Corporation | Preparation of germania cores in optical fibers |
US4297150A (en) | 1979-07-07 | 1981-10-27 | The British Petroleum Company Limited | Protective metal oxide films on metal or alloy substrate surfaces susceptible to coking, corrosion or catalytic activity |
DE2941896A1 (de) * | 1979-10-17 | 1981-04-30 | Ruhrchemie Ag, 4200 Oberhausen | Verfahren zur herstellung von haftfaehigen schichten auf polyolefinen |
WO1981002008A1 (fr) * | 1980-01-09 | 1981-07-23 | Battelle Memorial Institute | Fibre de verre protegee contre la corrosion et un procede d'obtention de celle-ci. |
US4608473A (en) * | 1982-05-28 | 1986-08-26 | At&T Technologies, Inc. | Modified zirconia induction furnace |
US4533378A (en) * | 1982-05-28 | 1985-08-06 | At&T Technologies, Inc. | Modified zirconia induction furnace |
US4886683A (en) * | 1986-06-20 | 1989-12-12 | Raytheon Company | Low temperature metalorganic chemical vapor depostion growth of group II-VI semiconductor materials |
US4924936A (en) * | 1987-08-05 | 1990-05-15 | M&T Chemicals Inc. | Multiple, parallel packed column vaporizer |
GB2229453A (en) * | 1989-02-02 | 1990-09-26 | Nat Res Dev | Forming a metal coating |
EP0528795A1 (fr) * | 1990-04-30 | 1993-03-03 | International Business Machines Corporation | Appareil pour le depot par voie chimique en phase vapeur et a basse temperature des metaux de haute purete |
US5098326A (en) * | 1990-12-13 | 1992-03-24 | General Electric Company | Method for applying a protective coating to a high-intensity metal halide discharge lamp |
US9683286B2 (en) | 2006-04-28 | 2017-06-20 | Gtat Corporation | Increased polysilicon deposition in a CVD reactor |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE533644C (de) * | 1930-04-16 | 1931-09-18 | Patra Patent Treuhand | Verfahren zur Herstellung von UEberzuegen auf elektrisch leitenden Draehten, Faeden,Baendern o. dgl. |
-
1971
- 1971-04-21 CA CA110968A patent/CA935336A/en not_active Expired
- 1971-04-22 US US00136481A patent/US3729335A/en not_active Expired - Lifetime
- 1971-05-03 GB GB1278371*[A patent/GB1306784A/en not_active Expired
- 1971-05-17 DE DE2124400A patent/DE2124400C3/de not_active Expired
- 1971-05-28 SE SE06954/71A patent/SE359322B/xx unknown
- 1971-05-28 FR FR7119644A patent/FR2090384B1/fr not_active Expired
Also Published As
Publication number | Publication date |
---|---|
DE2124400B2 (de) | 1974-07-11 |
CA935336A (en) | 1973-10-16 |
US3729335A (en) | 1973-04-24 |
GB1306784A (en) | 1973-02-14 |
SE359322B (fr) | 1973-08-27 |
FR2090384A1 (fr) | 1972-01-14 |
DE2124400C3 (de) | 1975-02-27 |
DE2124400A1 (de) | 1971-12-23 |