FR2082403A5 - - Google Patents
Info
- Publication number
- FR2082403A5 FR2082403A5 FR7009098A FR7009098A FR2082403A5 FR 2082403 A5 FR2082403 A5 FR 2082403A5 FR 7009098 A FR7009098 A FR 7009098A FR 7009098 A FR7009098 A FR 7009098A FR 2082403 A5 FR2082403 A5 FR 2082403A5
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
- G01B9/02078—Caused by ambiguity
- G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
- G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/70—Using polarization in the interferometer
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7009098A FR2082403A5 (de) | 1970-03-13 | 1970-03-13 | |
DE19712111936 DE2111936C3 (de) | 1970-03-13 | 1971-03-12 | Interferometrische Anordnung zur Lieferung verschachtelter, gegeneinander phasenverschobener elektrischer Signale |
GB2400371A GB1345204A (en) | 1970-03-13 | 1971-04-19 | Interferometer systems for sensing the idsplacement of an object |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7009098A FR2082403A5 (de) | 1970-03-13 | 1970-03-13 |
Publications (1)
Publication Number | Publication Date |
---|---|
FR2082403A5 true FR2082403A5 (de) | 1971-12-10 |
Family
ID=9052235
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7009098A Expired FR2082403A5 (de) | 1970-03-13 | 1970-03-13 |
Country Status (3)
Country | Link |
---|---|
DE (1) | DE2111936C3 (de) |
FR (1) | FR2082403A5 (de) |
GB (1) | GB1345204A (de) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2963043D1 (en) * | 1978-01-13 | 1982-07-29 | Nat Res Dev | Interferometer systems |
DE2926738C2 (de) * | 1979-07-03 | 1982-10-28 | Ibm Deutschland Gmbh, 7000 Stuttgart | Verfahren zur interferometrischen Oberflächenformanalyse |
US4583855A (en) * | 1984-02-17 | 1986-04-22 | Lockheed Missiles & Space Company, Inc. | Optical phase measuring apparatus |
US4702603A (en) * | 1985-07-23 | 1987-10-27 | Cmx Systems, Inc. | Optical phase decoder for interferometers |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1085350B (de) * | 1957-07-02 | 1960-07-14 | Leitz Ernst Gmbh | Interferometer |
NL6515207A (de) * | 1965-11-24 | 1967-05-25 |
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1970
- 1970-03-13 FR FR7009098A patent/FR2082403A5/fr not_active Expired
-
1971
- 1971-03-12 DE DE19712111936 patent/DE2111936C3/de not_active Expired
- 1971-04-19 GB GB2400371A patent/GB1345204A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
DE2111936C3 (de) | 1981-04-23 |
DE2111936B2 (de) | 1980-09-04 |
GB1345204A (en) | 1974-01-30 |
DE2111936A1 (de) | 1971-09-23 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
CL | Concession to grant licenses | ||
ST | Notification of lapse |