FR2062437A5 - - Google Patents

Info

Publication number
FR2062437A5
FR2062437A5 FR7034143A FR7034143A FR2062437A5 FR 2062437 A5 FR2062437 A5 FR 2062437A5 FR 7034143 A FR7034143 A FR 7034143A FR 7034143 A FR7034143 A FR 7034143A FR 2062437 A5 FR2062437 A5 FR 2062437A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7034143A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Application granted granted Critical
Publication of FR2062437A5 publication Critical patent/FR2062437A5/fr
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10Crucibles or containers for supporting the melt
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/14Heating of the melt or the crystallised materials
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10Apparatus
    • Y10T117/1024Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032Seed pulling
    • Y10T117/1068Seed pulling including heating or cooling details [e.g., shield configuration]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
FR7034143A 1969-09-24 1970-09-21 Expired FR2062437A5 (no)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19691948194 DE1948194A1 (de) 1969-09-24 1969-09-24 Verfahren zum Ziehen eines kristallinen Koerpers aus einem mindestens auf die Schmelztemperatur erhitzten Schmelzgut und Vorrichtung zur Durchfuehrung dieses Verfahrens

Publications (1)

Publication Number Publication Date
FR2062437A5 true FR2062437A5 (no) 1971-06-25

Family

ID=5746317

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7034143A Expired FR2062437A5 (no) 1969-09-24 1970-09-21

Country Status (10)

Country Link
US (1) US3759670A (no)
AT (1) AT309390B (no)
BE (1) BE756590A (no)
CH (1) CH534541A (no)
DE (1) DE1948194A1 (no)
DK (1) DK124175B (no)
FR (1) FR2062437A5 (no)
GB (1) GB1284068A (no)
NL (1) NL7010531A (no)
SE (1) SE368663B (no)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4049384A (en) * 1975-04-14 1977-09-20 Arthur D. Little, Inc. Cold crucible system
US4224100A (en) * 1978-06-16 1980-09-23 Litton Systems, Inc. Method and apparatus for making crystals
US4259278A (en) * 1979-07-09 1981-03-31 Ultra Carbon Corporation Method of reshaping warped graphite enclosures and the like
DE3316547C2 (de) * 1983-05-06 1985-05-30 Philips Patentverwaltung Gmbh, 2000 Hamburg Kalter Tiegel für das Erschmelzen nichtmetallischer anorganischer Verbindungen
AT385059B (de) * 1983-05-31 1988-02-10 Avl Verbrennungskraft Messtech Verfahren zum zuechten von kristallen, insbesondere einkristallen sowie vorrichtung zur durchfuehrung des verfahrens
CA1309755C (en) * 1987-03-30 1992-11-03 Hiroyoshi Nozaki Method of and apparatus for baking coating layer
JPH04331792A (ja) * 1991-04-30 1992-11-19 Osaka Titanium Co Ltd シリコン単結晶製造方法
US5885344A (en) * 1997-08-08 1999-03-23 Memc Electronic Materials, Inc. Non-dash neck method for single crystal silicon growth

Also Published As

Publication number Publication date
BE756590A (fr) 1971-03-24
SE368663B (no) 1974-07-15
CH534541A (de) 1973-03-15
AT309390B (de) 1973-08-10
US3759670A (en) 1973-09-18
DK124175B (da) 1972-09-25
NL7010531A (no) 1971-03-26
DE1948194A1 (de) 1971-04-01
GB1284068A (en) 1972-08-02

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Legal Events

Date Code Title Description
ST Notification of lapse