FR2056427A5 - - Google Patents
Info
- Publication number
- FR2056427A5 FR2056427A5 FR7024184A FR7024184A FR2056427A5 FR 2056427 A5 FR2056427 A5 FR 2056427A5 FR 7024184 A FR7024184 A FR 7024184A FR 7024184 A FR7024184 A FR 7024184A FR 2056427 A5 FR2056427 A5 FR 2056427A5
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H10P14/69215—
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/401—Oxides containing silicon
- C23C16/402—Silicon dioxide
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- H10P14/6334—
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- H10P14/6682—
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/118—Oxide films
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/935—Gas flow control
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Formation Of Insulating Films (AREA)
- Silicon Compounds (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19691933664 DE1933664C3 (de) | 1969-07-02 | Verfahren zum Überziehen von Halbleiterscheiben mit einer Schicht aus Siliciumdioxyd |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| FR2056427A5 true FR2056427A5 (enExample) | 1971-05-14 |
Family
ID=5738701
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7024184A Expired FR2056427A5 (enExample) | 1969-07-02 | 1970-06-30 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US3681132A (enExample) |
| AT (1) | AT324423B (enExample) |
| CA (1) | CA942602A (enExample) |
| CH (1) | CH542936A (enExample) |
| FR (1) | FR2056427A5 (enExample) |
| GB (1) | GB1281298A (enExample) |
| NL (1) | NL7005770A (enExample) |
| SE (1) | SE359195B (enExample) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3991234A (en) * | 1974-09-30 | 1976-11-09 | American Optical Corporation | Process for coating a lens of synthetic polymer with a durable abrasion resistant vitreous composition |
| US4052520A (en) * | 1974-09-30 | 1977-10-04 | American Optical Corporation | Process for coating a synthetic polymer sheet material with a durable abrasion-resistant vitreous composition |
| DE2447224A1 (de) * | 1974-10-03 | 1976-04-15 | Ibm Deutschland | Verfahren zum aufwachsen von pyrolitischen siliciumdioxidschichten |
| JPS51144183A (en) * | 1975-06-06 | 1976-12-10 | Hitachi Ltd | Semiconductor element containing surface protection film |
| AU3994785A (en) * | 1984-02-13 | 1985-08-27 | Schmitt, J.J. 111 | Method and apparatus for the gas jet deposition of conductingand dielectric thin solid films and products produced there by |
| US4707313A (en) * | 1986-07-02 | 1987-11-17 | A. O. Smith Corporation | Method of making a laminated structure for use in an electrical apparatus |
| KR0170391B1 (ko) * | 1989-06-16 | 1999-03-30 | 다카시마 히로시 | 피처리체 처리장치 및 처리방법 |
| DE3936654C1 (enExample) * | 1989-11-03 | 1990-12-20 | Schott Glaswerke, 6500 Mainz, De | |
| US5262204A (en) * | 1989-11-03 | 1993-11-16 | Schott Glaswerke | Glass-ceramic article decorated with ceramic color and process for its production |
| FR2679898B1 (fr) * | 1991-07-31 | 1993-11-05 | Air Liquide | Procede de formation d'une couche de silice sur une surface d'un objet en verre. |
| WO2006114686A1 (en) * | 2005-04-25 | 2006-11-02 | CARL ZEISS VISION SOUTH AFRICA (Pty) LTD | A method and apparatus for coating objects |
| US20060266793A1 (en) * | 2005-05-24 | 2006-11-30 | Caterpillar Inc. | Purging system having workpiece movement device |
-
1970
- 1970-04-21 NL NL7005770A patent/NL7005770A/xx unknown
- 1970-06-24 CA CA086,393A patent/CA942602A/en not_active Expired
- 1970-06-25 US US49618A patent/US3681132A/en not_active Expired - Lifetime
- 1970-06-30 CH CH985270A patent/CH542936A/de not_active IP Right Cessation
- 1970-06-30 FR FR7024184A patent/FR2056427A5/fr not_active Expired
- 1970-06-30 AT AT588570A patent/AT324423B/de not_active IP Right Cessation
- 1970-07-01 GB GB31837/70A patent/GB1281298A/en not_active Expired
- 1970-07-02 SE SE09223/70A patent/SE359195B/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| AT324423B (de) | 1975-08-25 |
| SE359195B (enExample) | 1973-08-20 |
| NL7005770A (enExample) | 1971-01-05 |
| GB1281298A (en) | 1972-07-12 |
| DE1933664B2 (de) | 1976-01-22 |
| DE1933664A1 (de) | 1971-01-14 |
| CH542936A (de) | 1973-10-15 |
| CA942602A (en) | 1974-02-26 |
| US3681132A (en) | 1972-08-01 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |