FR2041547A5 - Permanent ion source - Google Patents

Permanent ion source

Info

Publication number
FR2041547A5
FR2041547A5 FR6913565A FR6913565A FR2041547A5 FR 2041547 A5 FR2041547 A5 FR 2041547A5 FR 6913565 A FR6913565 A FR 6913565A FR 6913565 A FR6913565 A FR 6913565A FR 2041547 A5 FR2041547 A5 FR 2041547A5
Authority
FR
France
Prior art keywords
ion source
ions
ion
heated
permanent ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR6913565A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MAUVE HENRI
Original Assignee
MAUVE HENRI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MAUVE HENRI filed Critical MAUVE HENRI
Priority to FR6913565A priority Critical patent/FR2041547A5/en
Application granted granted Critical
Publication of FR2041547A5 publication Critical patent/FR2041547A5/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The material to be ionised is first heated to a temperature near its ionisation temperature by passage through a narrow, heated tube. Relatively low voltages (a few thousand volts) can then be applied to extract the ions, afterwards handled by classical ion optics. The system is a convenient source of ions for ion implantation of semiconductors, for ion machining or welding, oxidation, nitriding or alloying.
FR6913565A 1969-04-29 1969-04-29 Permanent ion source Expired FR2041547A5 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR6913565A FR2041547A5 (en) 1969-04-29 1969-04-29 Permanent ion source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR6913565A FR2041547A5 (en) 1969-04-29 1969-04-29 Permanent ion source

Publications (1)

Publication Number Publication Date
FR2041547A5 true FR2041547A5 (en) 1971-01-29

Family

ID=9033226

Family Applications (1)

Application Number Title Priority Date Filing Date
FR6913565A Expired FR2041547A5 (en) 1969-04-29 1969-04-29 Permanent ion source

Country Status (1)

Country Link
FR (1) FR2041547A5 (en)

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Legal Events

Date Code Title Description
ST Notification of lapse