GB1325552A - Combined magnetic and electrostatic lens - Google Patents
Combined magnetic and electrostatic lensInfo
- Publication number
- GB1325552A GB1325552A GB1298670A GB1298670A GB1325552A GB 1325552 A GB1325552 A GB 1325552A GB 1298670 A GB1298670 A GB 1298670A GB 1298670 A GB1298670 A GB 1298670A GB 1325552 A GB1325552 A GB 1325552A
- Authority
- GB
- United Kingdom
- Prior art keywords
- electrostatic lens
- combined magnetic
- july
- plasmaphysik
- gmbh
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/28—Static spectrometers
- H01J49/30—Static spectrometers using magnetic analysers, e.g. Dempster spectrometer
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Lenses (AREA)
Abstract
1325552 Discharge apparatus INSTITUT FUR PLASMAPHYSIK GmbH 7 July 1970 [23 July 1969] 12986/73 Divided out of 1325551 Heading H1D The description is the same as that of Specification 1,325,551 but the claims relate to the lens adapted to focus both electrons and ions.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE1937482A DE1937482C3 (en) | 1969-07-23 | 1969-07-23 | Microbeam probe |
GB3298770A GB1325551A (en) | 1969-07-23 | 1970-07-07 | Ion beam microprobes |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1325552A true GB1325552A (en) | 1973-08-01 |
Family
ID=25757690
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB1298670A Expired GB1325552A (en) | 1969-07-23 | 1970-07-07 | Combined magnetic and electrostatic lens |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB1325552A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0066409B1 (en) * | 1981-05-22 | 1988-03-02 | Hitachi, Ltd. | Charged particle source |
-
1970
- 1970-07-07 GB GB1298670A patent/GB1325552A/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0066409B1 (en) * | 1981-05-22 | 1988-03-02 | Hitachi, Ltd. | Charged particle source |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed [section 19, patents act 1949] | ||
PCNP | Patent ceased through non-payment of renewal fee |