FR2039996A5 - Crystallographically oriented surface - coatings - Google Patents
Crystallographically oriented surface - coatingsInfo
- Publication number
- FR2039996A5 FR2039996A5 FR7010815A FR7010815A FR2039996A5 FR 2039996 A5 FR2039996 A5 FR 2039996A5 FR 7010815 A FR7010815 A FR 7010815A FR 7010815 A FR7010815 A FR 7010815A FR 2039996 A5 FR2039996 A5 FR 2039996A5
- Authority
- FR
- France
- Prior art keywords
- substrate
- coatings
- oriented surface
- crystallographically oriented
- phase used
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The substrate(s) is/are placed in a vacuum reaction chamber within a furnace, and the vapour phase used for uniform crystallographic chemical dposition is introduced at one end. The substrate(s) is/are connected to the terminal of a generator such that the potential difference between it/them and a central electrode is maintained between 100 and 2000 volts. The pressure is reduced to 0.01-20 Torr and the temp. is varied such that chemical thermodynamic equilibrium is set up between the substrate(s) and the particular coating phase used.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
LU58307 | 1969-03-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
FR2039996A5 true FR2039996A5 (en) | 1971-01-15 |
Family
ID=19725980
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7010815A Expired FR2039996A5 (en) | 1969-03-26 | 1970-03-25 | Crystallographically oriented surface - coatings |
Country Status (3)
Country | Link |
---|---|
DE (1) | DE2013011A1 (en) |
FR (1) | FR2039996A5 (en) |
LU (1) | LU58307A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1981003669A1 (en) * | 1980-06-13 | 1981-12-24 | Science & Techn Ets | Method for manufacturing a thin layer with orientated structure,device for implementing such method and products obtained thereby |
-
1969
- 1969-03-26 LU LU58307D patent/LU58307A1/xx unknown
-
1970
- 1970-03-19 DE DE19702013011 patent/DE2013011A1/en active Pending
- 1970-03-25 FR FR7010815A patent/FR2039996A5/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1981003669A1 (en) * | 1980-06-13 | 1981-12-24 | Science & Techn Ets | Method for manufacturing a thin layer with orientated structure,device for implementing such method and products obtained thereby |
Also Published As
Publication number | Publication date |
---|---|
DE2013011A1 (en) | 1971-10-07 |
LU58307A1 (en) | 1969-07-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |