FR2039996A5 - Crystallographically oriented surface - coatings - Google Patents

Crystallographically oriented surface - coatings

Info

Publication number
FR2039996A5
FR2039996A5 FR7010815A FR7010815A FR2039996A5 FR 2039996 A5 FR2039996 A5 FR 2039996A5 FR 7010815 A FR7010815 A FR 7010815A FR 7010815 A FR7010815 A FR 7010815A FR 2039996 A5 FR2039996 A5 FR 2039996A5
Authority
FR
France
Prior art keywords
substrate
coatings
oriented surface
crystallographically oriented
phase used
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7010815A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Application granted granted Critical
Publication of FR2039996A5 publication Critical patent/FR2039996A5/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

The substrate(s) is/are placed in a vacuum reaction chamber within a furnace, and the vapour phase used for uniform crystallographic chemical dposition is introduced at one end. The substrate(s) is/are connected to the terminal of a generator such that the potential difference between it/them and a central electrode is maintained between 100 and 2000 volts. The pressure is reduced to 0.01-20 Torr and the temp. is varied such that chemical thermodynamic equilibrium is set up between the substrate(s) and the particular coating phase used.
FR7010815A 1969-03-26 1970-03-25 Crystallographically oriented surface - coatings Expired FR2039996A5 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
LU58307 1969-03-26

Publications (1)

Publication Number Publication Date
FR2039996A5 true FR2039996A5 (en) 1971-01-15

Family

ID=19725980

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7010815A Expired FR2039996A5 (en) 1969-03-26 1970-03-25 Crystallographically oriented surface - coatings

Country Status (3)

Country Link
DE (1) DE2013011A1 (en)
FR (1) FR2039996A5 (en)
LU (1) LU58307A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1981003669A1 (en) * 1980-06-13 1981-12-24 Science & Techn Ets Method for manufacturing a thin layer with orientated structure,device for implementing such method and products obtained thereby

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1981003669A1 (en) * 1980-06-13 1981-12-24 Science & Techn Ets Method for manufacturing a thin layer with orientated structure,device for implementing such method and products obtained thereby

Also Published As

Publication number Publication date
LU58307A1 (en) 1969-07-15
DE2013011A1 (en) 1971-10-07

Similar Documents

Publication Publication Date Title
GB1396987A (en) Method of producing artificial diamonds
CA1024721A (en) Manufacture of hydrogen from high temperature steam
AU460194B2 (en) PROCESS FORTHE REMOVAL OF MERCURY from GASES
YU42672A (en) Process for the purification of gases containing gaseous elementary mercury
SU547614A1 (en) The method of manufacture of insulated chamber
GB1160895A (en) Coating Surfaces by Vapour Deposition
GB1405489A (en) Sputtering apparatus
FR2039996A5 (en) Crystallographically oriented surface - coatings
GB1263580A (en) Improvements in or relating to the production of a tubular body of a semiconductor material
CA991530A (en) Low temperature removal of mercury from gas streams
GB1218917A (en) Fluorinated hydrocarbon compositions
YU147772A (en) Process for the separation of gaseous mercury in elementary or combined form from gases
GB1163812A (en) A Process and Apparatus for Producing Solid Explosives and Propellants from Humid Initial Mixtures
GB1202810A (en) Method of ionitriding objects made of iron and steel
BOETTNER et al. The nature of the explosive process of the combustion of hydrogen at high pressures(Explosive combustion of hydrogen at high pressures, showing attainment of constant value of hydrogen peroxide)
US3600292A (en) Localized machining and deposition for microelectronic components by sputtering
SEREDNITSKAIA et al. Calculation of the equilibrium constant and the heat of a dissociation reaction from the viscosity of the dissociating gas(Equilibrium constant and heat of dissociation from dynamic viscosity of dissociating gas, noting dependence on composition and temperature)
Zakharov et al. Influence of surface processes on the penetration of hydrogen through molybdenum(Surface processes effect on hydrogen penetration and diffusion into thick Mo membranes)
GB922280A (en) Improvements in or relating to processes and apparatus for the production of ultra-pure semiconductor substances
JPS5739167A (en) Glow discharge heat treatment apparatus
CS178902B2 (en) Process of removing hydrogen fluoride from gas containing hydrogen fluoride
GB1267700A (en) Improvements in or relating to semiconductors
ES313735A1 (en) Method for deposing thin films on a substrate by cathodic sublimation. (Machine-translation by Google Translate, not legally binding)
CA843383A (en) Chemical vapor deposition of silicon carbide
BURYKINA et al. Investigation of the effect of the ambient medium on the interaction between silicon nitride and titanium

Legal Events

Date Code Title Description
ST Notification of lapse