FR1600784A - - Google Patents

Info

Publication number
FR1600784A
FR1600784A FR1600784DA FR1600784A FR 1600784 A FR1600784 A FR 1600784A FR 1600784D A FR1600784D A FR 1600784DA FR 1600784 A FR1600784 A FR 1600784A
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
French (fr)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of FR1600784A publication Critical patent/FR1600784A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02002—Preparing wafers
    • H01L21/02005—Preparing bulk and homogeneous wafers
    • H01L21/02008—Multistep processes
    • H01L21/0201—Specific process step
    • H01L21/02013—Grinding, lapping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00—Other grinding machines or devices
    • B24B27/0023—Other grinding machines or devices grinding machines with a plurality of working posts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
    • B24B37/105—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
FR1600784D 1968-03-22 1968-12-30 Expired FR1600784A (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US71535068A 1968-03-22 1968-03-22

Publications (1)

Publication Number Publication Date
FR1600784A true FR1600784A (enrdf_load_stackoverflow) 1970-07-27

Family

ID=24873677

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1600784D Expired FR1600784A (enrdf_load_stackoverflow) 1968-03-22 1968-12-30

Country Status (4)

Country Link
US (1) US3550325A (enrdf_load_stackoverflow)
DE (1) DE1914082C3 (enrdf_load_stackoverflow)
FR (1) FR1600784A (enrdf_load_stackoverflow)
GB (1) GB1258514A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2175283C1 (ru) * 2000-06-22 2001-10-27 Воронежская государственная технологическая академия Устройство для шлифовки полупроводниковых пластин
RU2191674C1 (ru) * 2001-08-06 2002-10-27 Государственное образовательное учреждение Воронежская государственная технологическая академия Устройство для шлифования полупроводниковых пластин

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2144354B (en) * 1983-07-15 1987-03-11 Helical Springs Limited Grinding apparatus
US4680893A (en) * 1985-09-23 1987-07-21 Motorola, Inc. Apparatus for polishing semiconductor wafers
US5534106A (en) * 1994-07-26 1996-07-09 Kabushiki Kaisha Toshiba Apparatus for processing semiconductor wafers
DE19756536A1 (de) * 1997-12-18 1999-07-01 Wacker Siltronic Halbleitermat Verfahren zum Polieren von scheibenförmigen Werkstücken und Vorrichtung zur Durchführung des Verfahrens
DE10004578C1 (de) * 2000-02-03 2001-07-26 Wacker Siltronic Halbleitermat Verfahren zur Herstellung einer Halbleiterscheibe mit polierter Kante
US20040157539A1 (en) * 2002-07-26 2004-08-12 Stenftenagel John R. Scuffing machine for finishing wood products
CN111515838A (zh) * 2019-07-23 2020-08-11 杭州友邻电子有限公司 一种高效率的智能锁外壳加工设备
CN110918338A (zh) * 2019-10-17 2020-03-27 福清市海威钓具有限公司 一种环保型鱼竿喷漆装置及喷漆工艺
CN112123197B (zh) * 2020-09-24 2024-03-22 郑州方铭高温陶瓷新材料有限公司 一种双轨道滑板砖平面研磨机
CN113997176B (zh) * 2021-10-21 2023-02-28 西安银马实业发展有限公司 磨头自浮动石材磨削抛光机

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2175283C1 (ru) * 2000-06-22 2001-10-27 Воронежская государственная технологическая академия Устройство для шлифовки полупроводниковых пластин
RU2191674C1 (ru) * 2001-08-06 2002-10-27 Государственное образовательное учреждение Воронежская государственная технологическая академия Устройство для шлифования полупроводниковых пластин

Also Published As

Publication number Publication date
US3550325A (en) 1970-12-29
DE1914082C3 (de) 1980-03-13
DE1914082B2 (de) 1979-07-05
GB1258514A (enrdf_load_stackoverflow) 1971-12-30
DE1914082A1 (de) 1969-10-02

Similar Documents

Publication Publication Date Title
AU428130B2 (enrdf_load_stackoverflow)
AU2374870A (enrdf_load_stackoverflow)
AU5184069A (enrdf_load_stackoverflow)
AU6168869A (enrdf_load_stackoverflow)
AU6171569A (enrdf_load_stackoverflow)
AU429879B2 (enrdf_load_stackoverflow)
AU416157B2 (enrdf_load_stackoverflow)
AU2581067A (enrdf_load_stackoverflow)
AU4811568A (enrdf_load_stackoverflow)
AU421558B1 (enrdf_load_stackoverflow)
AU3789668A (enrdf_load_stackoverflow)
AU4744468A (enrdf_load_stackoverflow)
AU3224368A (enrdf_load_stackoverflow)
AU2580267A (enrdf_load_stackoverflow)
AU479393A (enrdf_load_stackoverflow)
BE708888A (enrdf_load_stackoverflow)
AU4503667A (enrdf_load_stackoverflow)
AU4558658A (enrdf_load_stackoverflow)
AU463027A (enrdf_load_stackoverflow)
AU4270368A (enrdf_load_stackoverflow)
BE727788A (enrdf_load_stackoverflow)
AU479894A (enrdf_load_stackoverflow)
AU4224469A (enrdf_load_stackoverflow)
AU3083868A (enrdf_load_stackoverflow)
AU2889368A (enrdf_load_stackoverflow)

Legal Events

Date Code Title Description
ST Notification of lapse