FR1587123A - - Google Patents

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Publication number
FR1587123A
FR1587123A FR1587123DA FR1587123A FR 1587123 A FR1587123 A FR 1587123A FR 1587123D A FR1587123D A FR 1587123DA FR 1587123 A FR1587123 A FR 1587123A
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FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
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Publication of FR1587123A publication Critical patent/FR1587123A/fr
Expired legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B3/00—Focusing arrangements of general interest for cameras, projectors or printers
    • G03B3/02—Focusing arrangements of general interest for cameras, projectors or printers moving lens along baseboard
FR1587123D 1967-10-20 1968-10-18 Expired FR1587123A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB47867/67A GB1242527A (en) 1967-10-20 1967-10-20 Optical instruments

Publications (1)

Publication Number Publication Date
FR1587123A true FR1587123A (fr) 1970-03-13

Family

ID=10446525

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1587123D Expired FR1587123A (fr) 1967-10-20 1968-10-18

Country Status (5)

Country Link
US (1) US3648587A (fr)
CH (1) CH493861A (fr)
DE (1) DE1803461A1 (fr)
FR (1) FR1587123A (fr)
GB (1) GB1242527A (fr)

Families Citing this family (191)

* Cited by examiner, † Cited by third party
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DE1803461A1 (de) 1969-05-22
GB1242527A (en) 1971-08-11
US3648587A (en) 1972-03-14

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