FR1545473A - Dispositif semi-conducteur à isolation par espace d'air - Google Patents

Dispositif semi-conducteur à isolation par espace d'air

Info

Publication number
FR1545473A
FR1545473A FR130112A FR130112A FR1545473A FR 1545473 A FR1545473 A FR 1545473A FR 130112 A FR130112 A FR 130112A FR 130112 A FR130112 A FR 130112A FR 1545473 A FR1545473 A FR 1545473A
Authority
FR
France
Prior art keywords
semiconductor device
air space
space isolation
isolation
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR130112A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Raytheon Co
Original Assignee
Raytheon Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Raytheon Co filed Critical Raytheon Co
Priority to FR130112A priority Critical patent/FR1545473A/fr
Application granted granted Critical
Publication of FR1545473A publication Critical patent/FR1545473A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
    • H01L21/76264—SOI together with lateral isolation, e.g. using local oxidation of silicon, or dielectric or polycristalline material refilled trench or air gap isolation regions, e.g. completely isolated semiconductor islands
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
    • H01L21/76264—SOI together with lateral isolation, e.g. using local oxidation of silicon, or dielectric or polycristalline material refilled trench or air gap isolation regions, e.g. completely isolated semiconductor islands
    • H01L21/76289—Lateral isolation by air gap

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
FR130112A 1966-12-01 1967-11-29 Dispositif semi-conducteur à isolation par espace d'air Expired FR1545473A (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR130112A FR1545473A (fr) 1966-12-01 1967-11-29 Dispositif semi-conducteur à isolation par espace d'air

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US59847766A 1966-12-01 1966-12-01
FR130112A FR1545473A (fr) 1966-12-01 1967-11-29 Dispositif semi-conducteur à isolation par espace d'air

Publications (1)

Publication Number Publication Date
FR1545473A true FR1545473A (fr) 1968-11-08

Family

ID=26181220

Family Applications (1)

Application Number Title Priority Date Filing Date
FR130112A Expired FR1545473A (fr) 1966-12-01 1967-11-29 Dispositif semi-conducteur à isolation par espace d'air

Country Status (1)

Country Link
FR (1) FR1545473A (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2628569A1 (fr) * 1988-03-08 1989-09-15 Thomson Hybrides Microondes Circuit integre hyperfrequence et son procede de fabrication
WO1995024737A1 (fr) * 1994-03-07 1995-09-14 National Semiconductor Corporation Appareil et procede destines a l'isolation thermique et mecanique de parties de circuits integres monolithiques

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2628569A1 (fr) * 1988-03-08 1989-09-15 Thomson Hybrides Microondes Circuit integre hyperfrequence et son procede de fabrication
WO1995024737A1 (fr) * 1994-03-07 1995-09-14 National Semiconductor Corporation Appareil et procede destines a l'isolation thermique et mecanique de parties de circuits integres monolithiques

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