FR1529406A - Colonne de faisceau électronique - Google Patents
Colonne de faisceau électroniqueInfo
- Publication number
- FR1529406A FR1529406A FR8596A FR06008596A FR1529406A FR 1529406 A FR1529406 A FR 1529406A FR 8596 A FR8596 A FR 8596A FR 06008596 A FR06008596 A FR 06008596A FR 1529406 A FR1529406 A FR 1529406A
- Authority
- FR
- France
- Prior art keywords
- electron beam
- beam column
- column
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
- H01J29/52—Arrangements for controlling intensity of ray or beam, e.g. for modulation
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/08—Disposition or mounting of heads or light sources relatively to record carriers
- G11B7/09—Disposition or mounting of heads or light sources relatively to record carriers with provision for moving the light beam or focus plane for the purpose of maintaining alignment of the light beam relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
- G11B7/0908—Disposition or mounting of heads or light sources relatively to record carriers with provision for moving the light beam or focus plane for the purpose of maintaining alignment of the light beam relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following for focusing only
- G11B7/0917—Focus-error methods other than those covered by G11B7/0909 - G11B7/0916
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
- G11C13/04—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using optical elements ; using other beam accessed elements, e.g. electron or ion beam
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
- G11C13/04—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using optical elements ; using other beam accessed elements, e.g. electron or ion beam
- G11C13/048—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using optical elements ; using other beam accessed elements, e.g. electron or ion beam using other optical storage elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
- H01J29/82—Mounting, supporting, spacing, or insulating electron-optical or ion-optical arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/21—Means for adjusting the focus
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/245—Detection characterised by the variable being measured
- H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Electron Beam Exposure (AREA)
- Earth Drilling (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US575731A US3345529A (en) | 1966-08-29 | 1966-08-29 | Electron beam column with demountable flux-generating assembly and beam-forming elements |
Publications (1)
Publication Number | Publication Date |
---|---|
FR1529406A true FR1529406A (fr) | 1968-06-14 |
Family
ID=24301472
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR8596A Expired FR1529406A (fr) | 1966-08-29 | 1967-06-22 | Colonne de faisceau électronique |
Country Status (8)
Country | Link |
---|---|
US (1) | US3345529A (fr) |
BE (1) | BE699990A (fr) |
CH (1) | CH460960A (fr) |
DE (1) | DE1589929C3 (fr) |
FR (1) | FR1529406A (fr) |
GB (1) | GB1162732A (fr) |
NL (1) | NL6710938A (fr) |
SE (1) | SE318952B (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2280134A1 (fr) * | 1974-07-26 | 1976-02-20 | Ibm | Procede et dispositif pour maintenir constante la densite de courant d'un faisceau de particules chargees |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3480817A (en) * | 1967-06-30 | 1969-11-25 | Ibm | Aperture assembly for electron beam device |
US3686527A (en) * | 1969-12-12 | 1972-08-22 | Sanders Associates Inc | High-speed synthesized field focus coil |
DE3328172A1 (de) * | 1983-08-04 | 1985-02-14 | Leybold-Heraeus GmbH, 5000 Köln | Elektronenstrahlkanone |
JPS60230343A (ja) * | 1984-04-27 | 1985-11-15 | Internatl Precision Inc | 電子レンズアセンブリ及びこれを組込んだ電子線装置 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB615257A (en) * | 1946-05-13 | 1949-01-04 | Gerhard Liebmann | Improvements in or relating to electron microscopes and other electronic apparatus employing electron lenses |
BE634472A (fr) * | 1962-07-05 | 1964-01-03 |
-
1966
- 1966-08-29 US US575731A patent/US3345529A/en not_active Expired - Lifetime
-
1967
- 1967-03-02 DE DE1589929A patent/DE1589929C3/de not_active Expired
- 1967-06-15 BE BE699990D patent/BE699990A/xx unknown
- 1967-06-22 FR FR8596A patent/FR1529406A/fr not_active Expired
- 1967-08-01 GB GB35206/67A patent/GB1162732A/en not_active Expired
- 1967-08-09 NL NL6710938A patent/NL6710938A/xx unknown
- 1967-08-28 CH CH1204067A patent/CH460960A/de unknown
- 1967-08-29 SE SE11975/67A patent/SE318952B/xx unknown
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2280134A1 (fr) * | 1974-07-26 | 1976-02-20 | Ibm | Procede et dispositif pour maintenir constante la densite de courant d'un faisceau de particules chargees |
Also Published As
Publication number | Publication date |
---|---|
CH460960A (de) | 1968-08-15 |
SE318952B (fr) | 1969-12-22 |
US3345529A (en) | 1967-10-03 |
GB1162732A (en) | 1969-08-27 |
DE1589929A1 (de) | 1970-06-18 |
DE1589929C3 (de) | 1973-01-04 |
DE1589929B2 (de) | 1972-06-15 |
NL6710938A (fr) | 1968-03-01 |
BE699990A (fr) | 1967-11-16 |
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