FR1445481A - Dispositif de fusion par zone sans creuset - Google Patents

Dispositif de fusion par zone sans creuset

Info

Publication number
FR1445481A
FR1445481A FR2632A FR2632A FR1445481A FR 1445481 A FR1445481 A FR 1445481A FR 2632 A FR2632 A FR 2632A FR 2632 A FR2632 A FR 2632A FR 1445481 A FR1445481 A FR 1445481A
Authority
FR
France
Prior art keywords
crucible
melting device
zone melting
zone
melting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR2632A
Other languages
English (en)
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Schuckertwerke AG
Siemens AG
Original Assignee
Siemens Schuckertwerke AG
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Schuckertwerke AG, Siemens AG filed Critical Siemens Schuckertwerke AG
Application granted granted Critical
Publication of FR1445481A publication Critical patent/FR1445481A/fr
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/16Heating of the molten zone
    • C30B13/20Heating of the molten zone by induction, e.g. hot wire technique
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00Heating by electric, magnetic or electromagnetic fields
    • H05B6/02Induction heating
    • H05B6/22Furnaces without an endless core
    • H05B6/30Arrangements for remelting or zone melting
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10Apparatus
    • Y10T117/1024Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1076Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone
    • Y10T117/1088Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone including heating or cooling details

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Silicon Compounds (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
FR2632A 1964-02-08 1965-01-20 Dispositif de fusion par zone sans creuset Expired FR1445481A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES89439A DE1260439B (de) 1964-02-08 1964-02-08 Vorrichtung zum tiegelfreien Zonenschmelzen

Publications (1)

Publication Number Publication Date
FR1445481A true FR1445481A (fr) 1966-07-15

Family

ID=7515113

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2632A Expired FR1445481A (fr) 1964-02-08 1965-01-20 Dispositif de fusion par zone sans creuset

Country Status (7)

Country Link
US (1) US3342970A (bs)
BE (1) BE659252A (bs)
CH (1) CH414553A (bs)
DE (1) DE1260439B (bs)
FR (1) FR1445481A (bs)
GB (1) GB1022427A (bs)
SE (1) SE302116B (bs)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3660062A (en) * 1968-02-29 1972-05-02 Siemens Ag Method for crucible-free floating zone melting a crystalline rod, especially of semi-crystalline material
US3935059A (en) * 1969-07-21 1976-01-27 U.S. Philips Corporation Method of producing single crystals of semiconductor material by floating-zone melting
DE2538854B2 (de) * 1975-09-01 1979-02-15 Wacker-Chemitronic Gesellschaft Fuer Elektronik-Grundstoffe Mbh, 8263 Burghausen Einwindige Induktionsheizspule zum tiegelfreien Zonenschmelzen
US4184135A (en) * 1978-04-10 1980-01-15 Monsanto Company Breakapart single turn RF induction apparatus
US4458127A (en) * 1981-05-26 1984-07-03 Park-Ohio Industries, Inc. Inductor for annealing work hardened portions of structural beams
DE3143146A1 (de) * 1981-10-30 1983-05-11 Siemens AG, 1000 Berlin und 8000 München Als flachspule ausgebildete induktionsheizspule zum tiegelfreien zonenschmelzen
DE3226713A1 (de) * 1982-07-16 1984-01-19 Siemens AG, 1000 Berlin und 8000 München Als flachspule ausgebildete induktionsheizspule zum tiegelfreien zonenschmelzen
DE3229461A1 (de) * 1982-08-06 1984-02-09 Siemens AG, 1000 Berlin und 8000 München Vorrichtung zum tiegelfreien zonenschmelzen eines, insbesondere aus silicium bestehenden halbleiterstabes
US4549051A (en) * 1984-02-15 1985-10-22 Ness Richard A Induction heating device for nozzles of containers
JPS63291888A (ja) * 1987-05-25 1988-11-29 Shin Etsu Handotai Co Ltd 半導体単結晶製造装置
DE3938937A1 (de) * 1989-11-24 1991-05-29 Wacker Chemitronic Verfahren und vorrichtung zur herstellung von siliciumstaeben mit hohem sauerstoffgehalt durch tiegelfreies zonenziehen, dadurch erhaeltliche siliciumstaebe und daraus hergestellte siliciumscheiben
US20110073591A1 (en) * 2008-07-17 2011-03-31 Seiichi Sawatsubashi Guide Chip Structure for High-Frequency Induction Heating Coil

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL61586C (bs) * 1944-04-26
BE561654A (bs) * 1953-09-25 1900-01-01
NL258961A (bs) * 1959-12-23
US3100250A (en) * 1961-04-07 1963-08-06 Herczog Andrew Zone melting apparatus
FR1358425A (fr) * 1963-01-22 1964-04-17 Traitements Electrolytiques & Perfectionnement au chalumeau à plasma haute fréquence

Also Published As

Publication number Publication date
BE659252A (bs) 1965-08-04
CH414553A (de) 1966-06-15
GB1022427A (en) 1966-03-16
US3342970A (en) 1967-09-19
DE1260439B (de) 1968-02-08
SE302116B (bs) 1968-07-08

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