FR1415012A - Perfectionnements aux pompes à ionisation - Google Patents

Perfectionnements aux pompes à ionisation

Info

Publication number
FR1415012A
FR1415012A FR991338A FR991338A FR1415012A FR 1415012 A FR1415012 A FR 1415012A FR 991338 A FR991338 A FR 991338A FR 991338 A FR991338 A FR 991338A FR 1415012 A FR1415012 A FR 1415012A
Authority
FR
France
Prior art keywords
ionization
pumps
ionization pumps
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR991338A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Compagnie Francaise Thomson Houston SA
Original Assignee
Compagnie Francaise Thomson Houston SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Compagnie Francaise Thomson Houston SA filed Critical Compagnie Francaise Thomson Houston SA
Application granted granted Critical
Publication of FR1415012A publication Critical patent/FR1415012A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
FR991338A 1963-10-16 1964-10-14 Perfectionnements aux pompes à ionisation Expired FR1415012A (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US316694A US3228589A (en) 1963-10-16 1963-10-16 Ion pump having encapsulated internal magnet assemblies
US488543A US3325086A (en) 1963-10-16 1965-09-20 Triode ionic vacuum pump

Publications (1)

Publication Number Publication Date
FR1415012A true FR1415012A (fr) 1965-10-22

Family

ID=26980550

Family Applications (2)

Application Number Title Priority Date Filing Date
FR991338A Expired FR1415012A (fr) 1963-10-16 1964-10-14 Perfectionnements aux pompes à ionisation
FR76932A Expired FR90880E (fr) 1963-10-16 1966-09-20 Perfectionnements aux pompes à ionisation

Family Applications After (1)

Application Number Title Priority Date Filing Date
FR76932A Expired FR90880E (fr) 1963-10-16 1966-09-20 Perfectionnements aux pompes à ionisation

Country Status (3)

Country Link
US (2) US3228589A (fr)
FR (2) FR1415012A (fr)
GB (2) GB1073168A (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3353054A (en) * 1964-06-09 1967-11-14 Edwards High Vacuum Int Ltd Penning type vacuum pumps
JPS6351037A (ja) * 1986-08-20 1988-03-04 Toshiba Corp 電子ビ−ム装置の陽極室
US5655886A (en) * 1995-06-06 1997-08-12 Color Planar Displays, Inc. Vacuum maintenance device for high vacuum chambers
JP2001332209A (ja) * 2000-03-13 2001-11-30 Ulvac Japan Ltd スパッタイオンポンプ
JP5495145B2 (ja) * 2010-04-02 2014-05-21 独立行政法人情報通信研究機構 イオンポンプシステム
US10460917B2 (en) * 2016-05-26 2019-10-29 AOSense, Inc. Miniature ion pump

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2993638A (en) * 1957-07-24 1961-07-25 Varian Associates Electrical vacuum pump apparatus and method
NL95319C (fr) * 1957-09-27
GB883214A (en) * 1958-06-16 1961-11-29 Varian Associates Electrical vacuum pump apparatus
NL111716C (fr) * 1958-08-01
US2906910A (en) * 1958-10-30 1959-09-29 Westinghouse Electric Corp Spark gap device
US2926276A (en) * 1959-06-02 1960-02-23 Saburo M Moriya Apparatus for the ionization of electrons of flowable materials
US3117247A (en) * 1961-05-29 1964-01-07 Varian Associates Vacuum pump
US3141986A (en) * 1961-09-18 1964-07-21 Varian Associates High vacuum sputter-ion gettering apparatus

Also Published As

Publication number Publication date
GB1158486A (en) 1969-07-16
US3325086A (en) 1967-06-13
FR90880E (fr) 1968-03-01
US3228589A (en) 1966-01-11
GB1073168A (en) 1967-06-21

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