FR90880E - Perfectionnements aux pompes à ionisation - Google Patents

Perfectionnements aux pompes à ionisation

Info

Publication number
FR90880E
FR90880E FR76932A FR76932A FR90880E FR 90880 E FR90880 E FR 90880E FR 76932 A FR76932 A FR 76932A FR 76932 A FR76932 A FR 76932A FR 90880 E FR90880 E FR 90880E
Authority
FR
France
Prior art keywords
ionization
pumps
ionization pumps
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR76932A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Compagnie Francaise Thomson Houston SA
Original Assignee
Compagnie Francaise Thomson Houston SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Compagnie Francaise Thomson Houston SA filed Critical Compagnie Francaise Thomson Houston SA
Application granted granted Critical
Publication of FR90880E publication Critical patent/FR90880E/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
FR76932A 1963-10-16 1966-09-20 Perfectionnements aux pompes à ionisation Expired FR90880E (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US316694A US3228589A (en) 1963-10-16 1963-10-16 Ion pump having encapsulated internal magnet assemblies
US488543A US3325086A (en) 1963-10-16 1965-09-20 Triode ionic vacuum pump

Publications (1)

Publication Number Publication Date
FR90880E true FR90880E (fr) 1968-03-01

Family

ID=26980550

Family Applications (2)

Application Number Title Priority Date Filing Date
FR991338A Expired FR1415012A (fr) 1963-10-16 1964-10-14 Perfectionnements aux pompes à ionisation
FR76932A Expired FR90880E (fr) 1963-10-16 1966-09-20 Perfectionnements aux pompes à ionisation

Family Applications Before (1)

Application Number Title Priority Date Filing Date
FR991338A Expired FR1415012A (fr) 1963-10-16 1964-10-14 Perfectionnements aux pompes à ionisation

Country Status (3)

Country Link
US (2) US3228589A (fr)
FR (2) FR1415012A (fr)
GB (2) GB1073168A (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3353054A (en) * 1964-06-09 1967-11-14 Edwards High Vacuum Int Ltd Penning type vacuum pumps
JPS6351037A (ja) * 1986-08-20 1988-03-04 Toshiba Corp 電子ビ−ム装置の陽極室
US5655886A (en) * 1995-06-06 1997-08-12 Color Planar Displays, Inc. Vacuum maintenance device for high vacuum chambers
WO2001069645A1 (fr) * 2000-03-13 2001-09-20 Ulvac, Inc. Pompe ionique a projection
EP2562786B1 (fr) * 2010-04-02 2019-06-26 National Institute of Information and Communications Technology Système de pompe ionique
US10460917B2 (en) * 2016-05-26 2019-10-29 AOSense, Inc. Miniature ion pump

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2993638A (en) * 1957-07-24 1961-07-25 Varian Associates Electrical vacuum pump apparatus and method
NL95319C (fr) * 1957-09-27
GB924919A (en) * 1958-06-16 1963-05-01 Varian Associates Electrical vacuum pump apparatus
GB910607A (fr) * 1958-08-01
US2906910A (en) * 1958-10-30 1959-09-29 Westinghouse Electric Corp Spark gap device
US2926276A (en) * 1959-06-02 1960-02-23 Saburo M Moriya Apparatus for the ionization of electrons of flowable materials
US3117247A (en) * 1961-05-29 1964-01-07 Varian Associates Vacuum pump
US3141986A (en) * 1961-09-18 1964-07-21 Varian Associates High vacuum sputter-ion gettering apparatus

Also Published As

Publication number Publication date
GB1158486A (en) 1969-07-16
GB1073168A (en) 1967-06-21
US3228589A (en) 1966-01-11
FR1415012A (fr) 1965-10-22
US3325086A (en) 1967-06-13

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