FR1227127A - Pompe ionique à vide - Google Patents

Pompe ionique à vide

Info

Publication number
FR1227127A
FR1227127A FR797489A FR797489A FR1227127A FR 1227127 A FR1227127 A FR 1227127A FR 797489 A FR797489 A FR 797489A FR 797489 A FR797489 A FR 797489A FR 1227127 A FR1227127 A FR 1227127A
Authority
FR
France
Prior art keywords
vacuum pump
ionic vacuum
ionic
pump
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR797489A
Other languages
English (en)
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US742274A external-priority patent/US3018944A/en
Application filed by Varian Associates Inc filed Critical Varian Associates Inc
Application granted granted Critical
Publication of FR1227127A publication Critical patent/FR1227127A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
FR797489A 1958-06-16 1959-06-15 Pompe ionique à vide Expired FR1227127A (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US742274A US3018944A (en) 1958-06-16 1958-06-16 Electrical vacuum pump apparatus
US151339A US3231175A (en) 1958-06-16 1961-11-09 Electrical vacuum pump

Publications (1)

Publication Number Publication Date
FR1227127A true FR1227127A (fr) 1960-08-18

Family

ID=26848534

Family Applications (1)

Application Number Title Priority Date Filing Date
FR797489A Expired FR1227127A (fr) 1958-06-16 1959-06-15 Pompe ionique à vide

Country Status (4)

Country Link
US (1) US3231175A (de)
DE (1) DE1098668B (de)
FR (1) FR1227127A (de)
GB (3) GB883214A (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3228589A (en) * 1963-10-16 1966-01-11 Gen Electric Ion pump having encapsulated internal magnet assemblies
US3368100A (en) * 1963-11-25 1968-02-06 Gen Electric Vacuum pump having a radially segmented, annular anode
US3377495A (en) * 1965-06-17 1968-04-09 Varian Associates Glow discharge apparatus having a stacked array of magnets
US4687417A (en) * 1985-12-19 1987-08-18 Hughes Aircraft Company High voltage feedthrough for ion pump
US6835048B2 (en) * 2002-12-18 2004-12-28 Varian, Inc. Ion pump having secondary magnetic field
EP2151849B1 (de) * 2008-08-08 2011-12-14 Agilent Technologies Italia S.p.A. Vakuum-Pumpsystem, welches mehrere Zerstäubungsionenpumpen enthält
US8439649B2 (en) * 2009-11-02 2013-05-14 Duniway Stockroom Corp. Sputter ion pump with enhanced anode

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2808980A (en) * 1953-09-23 1957-10-08 Westinghouse Electric Corp Electrical vacuum pump

Also Published As

Publication number Publication date
GB924919A (en) 1963-05-01
GB883214A (en) 1961-11-29
US3231175A (en) 1966-01-25
GB924918A (en) 1963-05-01
DE1098668B (de) 1961-02-02

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