FR1164993A - Lentille électrostatique - Google Patents

Lentille électrostatique

Info

Publication number
FR1164993A
FR1164993A FR1164993DA FR1164993A FR 1164993 A FR1164993 A FR 1164993A FR 1164993D A FR1164993D A FR 1164993DA FR 1164993 A FR1164993 A FR 1164993A
Authority
FR
France
Prior art keywords
electrostatic lens
electrostatic
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Trueb Tauber & Co AG
Original Assignee
Trueb Tauber & Co AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Trueb Tauber & Co AG filed Critical Trueb Tauber & Co AG
Application granted granted Critical
Publication of FR1164993A publication Critical patent/FR1164993A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/12—Lenses electrostatic

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
  • Particle Accelerators (AREA)
  • Electron Sources, Ion Sources (AREA)
FR1164993D 1956-02-28 1957-01-23 Lentille électrostatique Expired FR1164993A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1164993X 1956-02-28

Publications (1)

Publication Number Publication Date
FR1164993A true FR1164993A (fr) 1958-10-16

Family

ID=4560923

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1164993D Expired FR1164993A (fr) 1956-02-28 1957-01-23 Lentille électrostatique

Country Status (3)

Country Link
CH (1) CH337585A (fr)
DE (1) DE1062844B (fr)
FR (1) FR1164993A (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0048864A2 (fr) * 1980-09-29 1982-04-07 Siemens Aktiengesellschaft Système de contôle de faisceau corpusculaire
US9980562B2 (en) 2014-07-18 2018-05-29 Carl H. Schulman Tray table apparatus

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE914168C (de) * 1943-03-12 1954-06-28 Aeg Elektronenmikroskop, insbesondere UEbermikroskop, mit wenigstens teilweise elektrostatisch wirkenden Linsen
DE909608C (de) * 1943-04-03 1954-04-22 Aeg UEbermikroskop
DE876568C (de) * 1951-03-14 1953-05-15 Zeiss Opton Optische Werke Obe Elektrostatische Elektronenlinse

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0048864A2 (fr) * 1980-09-29 1982-04-07 Siemens Aktiengesellschaft Système de contôle de faisceau corpusculaire
EP0048864A3 (en) * 1980-09-29 1982-06-23 Siemens Aktiengesellschaft Berlin Und Munchen Particle beam blanking system
US9980562B2 (en) 2014-07-18 2018-05-29 Carl H. Schulman Tray table apparatus

Also Published As

Publication number Publication date
DE1062844B (de) 1959-08-06
CH337585A (de) 1959-04-15

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