FI964637A0 - Anturi paineen ja kiihtyvyyden mittaamiseksi - Google Patents

Anturi paineen ja kiihtyvyyden mittaamiseksi

Info

Publication number
FI964637A0
FI964637A0 FI964637A FI964637A FI964637A0 FI 964637 A0 FI964637 A0 FI 964637A0 FI 964637 A FI964637 A FI 964637A FI 964637 A FI964637 A FI 964637A FI 964637 A0 FI964637 A0 FI 964637A0
Authority
FI
Finland
Prior art keywords
acceleration
sensor
pressure
measuring pressure
measuring
Prior art date
Application number
FI964637A
Other languages
English (en)
Swedish (sv)
Other versions
FI964637A (fi
FI102114B1 (fi
FI102114B (fi
Inventor
Kari Kirjavainen
Jukka Lekkala
Hannu Nykaenen
Seppo Uosukainen
Original Assignee
Vtt
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vtt filed Critical Vtt
Publication of FI964637A0 publication Critical patent/FI964637A0/fi
Priority to FI964637A priority Critical patent/FI102114B/fi
Priority to EP97913206A priority patent/EP0941457B1/en
Priority to AT97913206T priority patent/ATE226318T1/de
Priority to DE69716462T priority patent/DE69716462T2/de
Priority to US09/308,323 priority patent/US6178820B1/en
Priority to AU50543/98A priority patent/AU5054398A/en
Priority to PCT/FI1997/000706 priority patent/WO1998022785A1/en
Publication of FI964637A publication Critical patent/FI964637A/fi
Application granted granted Critical
Publication of FI102114B1 publication Critical patent/FI102114B1/fi
Publication of FI102114B publication Critical patent/FI102114B/fi

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Measuring Fluid Pressure (AREA)
  • Electrophonic Musical Instruments (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Air Bags (AREA)
  • Pressure Sensors (AREA)
FI964637A 1996-11-20 1996-11-20 Anturi äänenpaineen ja kiihtyvyyden mittaamiseksi FI102114B (fi)

Priority Applications (7)

Application Number Priority Date Filing Date Title
FI964637A FI102114B (fi) 1996-11-20 1996-11-20 Anturi äänenpaineen ja kiihtyvyyden mittaamiseksi
EP97913206A EP0941457B1 (en) 1996-11-20 1997-11-19 Sensor for measuring acceleration and sound pressure
AT97913206T ATE226318T1 (de) 1996-11-20 1997-11-19 Beschleunigungs -und schalldruckfühler
DE69716462T DE69716462T2 (de) 1996-11-20 1997-11-19 Beschleunigungs -und schalldruckfühler
US09/308,323 US6178820B1 (en) 1996-11-20 1997-11-19 Sensor for measuring acceleration and sound pressure
AU50543/98A AU5054398A (en) 1996-11-20 1997-11-19 Sensor for measuring acceleration and sound pressure
PCT/FI1997/000706 WO1998022785A1 (en) 1996-11-20 1997-11-19 Sensor for measuring acceleration and sound pressure

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI964637A FI102114B (fi) 1996-11-20 1996-11-20 Anturi äänenpaineen ja kiihtyvyyden mittaamiseksi
FI964637 1996-11-20

Publications (4)

Publication Number Publication Date
FI964637A0 true FI964637A0 (fi) 1996-11-20
FI964637A FI964637A (fi) 1998-05-21
FI102114B1 FI102114B1 (fi) 1998-10-15
FI102114B FI102114B (fi) 1998-10-15

Family

ID=8547099

Family Applications (1)

Application Number Title Priority Date Filing Date
FI964637A FI102114B (fi) 1996-11-20 1996-11-20 Anturi äänenpaineen ja kiihtyvyyden mittaamiseksi

Country Status (7)

Country Link
US (1) US6178820B1 (fi)
EP (1) EP0941457B1 (fi)
AT (1) ATE226318T1 (fi)
AU (1) AU5054398A (fi)
DE (1) DE69716462T2 (fi)
FI (1) FI102114B (fi)
WO (1) WO1998022785A1 (fi)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6873863B2 (en) 2001-03-19 2005-03-29 Nokia Mobile Phones Ltd. Touch sensitive navigation surfaces for mobile telecommunication systems
JP4342174B2 (ja) * 2002-12-27 2009-10-14 新光電気工業株式会社 電子デバイス及びその製造方法
GB0302271D0 (en) * 2003-01-31 2003-03-05 Melexis Nv Integrated pressure and acceleration measurement device and a method of manufacture thereof
DE10350919A1 (de) * 2003-10-31 2005-05-25 Robert Bosch Gmbh Steuergerät und Beschleunigungssensorik
CN100357718C (zh) * 2004-05-28 2007-12-26 哈尔滨工业大学 声和振动集成多功能传感器及其制作方法
DE102005032635A1 (de) * 2005-07-13 2007-01-25 Robert Bosch Gmbh Mikromechanische Vorrichtung mit zwei Sensorstrukturen, Verfahren zur Herstellung einer mikromechanischen Vorrichtung
US7331236B2 (en) * 2006-03-21 2008-02-19 Radi Medical Systems Ab Pressure sensor
US9339224B2 (en) 2011-02-24 2016-05-17 Rochester Institute Of Technology Event dosimeter devices and methods thereof
US10292445B2 (en) 2011-02-24 2019-05-21 Rochester Institute Of Technology Event monitoring dosimetry apparatuses and methods thereof
DE102016112041A1 (de) * 2016-06-30 2018-01-04 Infineon Technologies Ag Dämpfung eines sensors
US10725480B2 (en) * 2018-05-31 2020-07-28 Aurora Flight Sciences Corporation Systems and methods for ground integrity measurement

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3651353A (en) * 1969-10-13 1972-03-21 Sundstrand Data Control Piezoelectric pressure transducer with acceleration compensation
US4604544A (en) * 1983-10-17 1986-08-05 Jeco Co., Ltd. Piezoelectric pressure indicator
US4654546A (en) 1984-11-20 1987-03-31 Kari Kirjavainen Electromechanical film and procedure for manufacturing same
GB2235533B (en) 1989-08-11 1994-02-09 Stc Plc Piezoelectric sensor device
JP2921232B2 (ja) * 1991-12-27 1999-07-19 日産自動車株式会社 能動型不快波制御装置
US5519637A (en) * 1993-08-20 1996-05-21 Mcdonnell Douglas Corporation Wavenumber-adaptive control of sound radiation from structures using a `virtual` microphone array method
DE4342169A1 (de) 1993-12-10 1995-06-14 Sennheiser Electronic Elektromechanischer Wandler, wie Mikrofon
US5434371A (en) * 1994-02-01 1995-07-18 A.T. Cross Company Hand-held electronic writing tool
DE4410794C2 (de) 1994-03-28 1998-03-19 Ads Mestechnik Gmbh Barometrisches Meßsystem
JP3446359B2 (ja) 1994-12-28 2003-09-16 株式会社デンソー 半導体装置用マイクロキャビティおよびその製造方法

Also Published As

Publication number Publication date
ATE226318T1 (de) 2002-11-15
AU5054398A (en) 1998-06-10
EP0941457A1 (en) 1999-09-15
WO1998022785A1 (en) 1998-05-28
DE69716462D1 (de) 2002-11-21
US6178820B1 (en) 2001-01-30
DE69716462T2 (de) 2003-04-03
FI964637A (fi) 1998-05-21
EP0941457B1 (en) 2002-10-16
FI102114B1 (fi) 1998-10-15
FI102114B (fi) 1998-10-15

Similar Documents

Publication Publication Date Title
EP0387906A3 (en) Sensor having a cantilever
DK0723143T3 (da) Indretning til måling af tryk eller differenstryk
WO2005045385A3 (en) Method for determining a surface contact force
DE69822770D1 (de) Dickschicht-Piezoresistive-Fühleranordnung
KR950701072A (ko) 기체센서(gas sensors)
FI964637A0 (fi) Anturi paineen ja kiihtyvyyden mittaamiseksi
DE753728T1 (de) Halbleiter-Druckdifferenzmessvorrichtung
NO943838D0 (no) System for måling av filmtykkelse
DE59008839D1 (de) Differenzdruckmessgerät.
DE69631400D1 (de) System für das Messen von Dünnfilmen
DE69202386T2 (de) Einrichtung zum Bestimmen der Aktivierung eines Sensors für das Luft-Kraftstoff-Verhältnis.
NO890624L (no) Innretning for maaling av tykkelsen av transporterte pengesedler e.l.
DE69008936T2 (de) Druck-/Differenzdruck-Messvorrichtung.
JPS5284781A (en) Fault detector for sensing system using piezoelectric sensors
FR2681692B1 (fr) Capteur de mesure de tension superficielle.
CA2043218A1 (en) Device for and method of measuring absolute rotations in several directions in space
DE59202195D1 (de) Kompensiertes Differenzdruckmessgerät.
FR2764693B1 (fr) Capteur de mesure de pression
ITMI942466A0 (it) Sistema e relativa apparecchiatura per la taratura di un sensore per la misurazione dell'umidita' di materiali in fogli nastri o film
DE59402720D1 (de) Papierdicken-Messvorrichtung
DE69804963D1 (de) Blattdicken-messvorrichtung
SE0100699D0 (sv) A method and a device for determining the wrap angle
KR970010693U (ko) 진공게이지의 비교측정장치
FR2723443B1 (fr) Dispositif de mesure de la pression en differents points de mesure
KR970020877U (ko) 기압차를 응용한 계량용 투약기

Legal Events

Date Code Title Description
FG Patent granted

Owner name: VTT

MA Patent expired