FI921371A - Anordning foer maetning av ett ledande skikt - Google Patents

Anordning foer maetning av ett ledande skikt Download PDF

Info

Publication number
FI921371A
FI921371A FI921371A FI921371A FI921371A FI 921371 A FI921371 A FI 921371A FI 921371 A FI921371 A FI 921371A FI 921371 A FI921371 A FI 921371A FI 921371 A FI921371 A FI 921371A
Authority
FI
Finland
Prior art keywords
ledande
skikt
ett
anordning foer
foer maetning
Prior art date
Application number
FI921371A
Other languages
English (en)
Other versions
FI921371A0 (fi
Inventor
Jean-Yves Boniort
Georges Roussy
Original Assignee
Alcatel Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel Nv filed Critical Alcatel Nv
Publication of FI921371A0 publication Critical patent/FI921371A0/fi
Publication of FI921371A publication Critical patent/FI921371A/fi

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
    • G01B15/02—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N22/00—Investigating or analysing materials by the use of microwaves or radio waves, i.e. electromagnetic waves with a wavelength of one millimetre or more
    • G01N22/02—Investigating the presence of flaws

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
FI921371A 1991-03-29 1992-03-27 Anordning foer maetning av ett ledande skikt FI921371A (fi)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9103878A FR2674623B1 (fr) 1991-03-29 1991-03-29 Dispositif de mesure en continu et sans contact de l'epaisseur d'une mince couche conductrice sur un support isolant, du genre fibre ou ruban, qui defile.

Publications (2)

Publication Number Publication Date
FI921371A0 FI921371A0 (fi) 1992-03-27
FI921371A true FI921371A (fi) 1992-09-30

Family

ID=9411299

Family Applications (1)

Application Number Title Priority Date Filing Date
FI921371A FI921371A (fi) 1991-03-29 1992-03-27 Anordning foer maetning av ett ledande skikt

Country Status (7)

Country Link
US (1) US5241279A (fi)
EP (1) EP0508854B1 (fi)
JP (1) JP2592564B2 (fi)
CA (1) CA2064372C (fi)
DE (1) DE69202616T2 (fi)
FI (1) FI921371A (fi)
FR (1) FR2674623B1 (fi)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5440238A (en) * 1991-11-07 1995-08-08 Sandia Corporation Surface property detection apparatus and method
GB2271637B (en) * 1992-10-15 1996-01-03 Marconi Gec Ltd Measurement of gas and water content in oil
US5372622A (en) * 1993-04-30 1994-12-13 At&T Corp. Large aperture device for controlling thickness of conductive coatings on optical fibers
DE19650112C1 (de) * 1996-12-03 1998-05-20 Wagner Int Einrichtung und Verfahren zum Messen eines Pulver-Massestromes
IL122273A (en) 1997-11-21 2001-07-24 Sela Semiconductor Eng Laboratories Remote resistivity measurement
DE10102578C2 (de) 2001-01-20 2003-01-09 Univ Braunschweig Tech Resonanter Mikrowellensensor
US20040227524A1 (en) * 2003-05-12 2004-11-18 Boris Kesil Method and system for measuring thickness of thin films with automatic stabilization of measurement accuracy
DE102005008880A1 (de) * 2004-09-09 2006-07-13 Mts Mikrowellen-Technologie Und Sensoren Gmbh Mikrowellensensor zur hochgenauen Niveaumessung in einer Luftfeder
CZ303181B6 (cs) * 2010-07-02 2012-05-16 Ceské vysoké ucení technické v Praze Fakulta elektrotechnická Bezkontaktní mikrovlnný meric malých diferencí tlouštek reflexních vrstev
EP2620741A1 (en) * 2012-01-24 2013-07-31 Johann Hinken Device for measuring coating thickness
US10520302B2 (en) * 2015-10-02 2019-12-31 Honeywell International Inc. Monitoring thickness uniformity

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2491418A (en) * 1946-04-04 1949-12-13 Socony Vacuum Oil Co Inc Automatic inspection device
US2548598A (en) * 1950-02-17 1951-04-10 Gen Electric Apparatus for detection of flaws by means of microwaves
GB1106185A (en) * 1964-05-29 1968-03-13 Nils Bertil Agdur Device for measuring a property of a material
US3401333A (en) * 1965-08-25 1968-09-10 Western Electric Co Coupled-line apparatus for measuring the thickness of thin films
US3710243A (en) * 1971-08-18 1973-01-09 Lockheed Aircraft Corp Microwave gage for monitoring thickness of a conductive workpiece, flaws therein or displacement relative thereto
DE3107675C2 (de) * 1981-02-28 1985-06-20 Elektro-Physik Hans Nix & Dr.-Ing. E. Steingroever KG, 5000 Köln Verfahren und Vorrichtung zur elektronischen Messung der Dicke sehr dünner elektrisch leitfähiger Schichten auf nichtleitendem Trägermaterial
US4571544A (en) * 1983-11-10 1986-02-18 Aluminum Company Of America Microwave examination of semiconductive shields
US4841223A (en) * 1987-06-17 1989-06-20 The Institute Of Paper Chemistry Method and apparatus for measuring fiber orientation anisotropy
FI80542C (fi) * 1988-10-27 1990-06-11 Lk Products Oy Resonatorkonstruktion.
DE3927394A1 (de) * 1989-08-19 1991-02-28 Fraunhofer Ges Forschung Vorrichtung zur dickenmessung

Also Published As

Publication number Publication date
FR2674623A1 (fr) 1992-10-02
DE69202616D1 (de) 1995-06-29
US5241279A (en) 1993-08-31
FR2674623B1 (fr) 1993-06-04
EP0508854B1 (fr) 1995-05-24
JPH0599645A (ja) 1993-04-23
EP0508854A1 (fr) 1992-10-14
JP2592564B2 (ja) 1997-03-19
CA2064372A1 (fr) 1992-09-30
FI921371A0 (fi) 1992-03-27
CA2064372C (fr) 1996-05-14
DE69202616T2 (de) 1995-09-21

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