FI864307A - Anordning och foerfarande foer avsaettning av skuggmaskade tunnfilmsmoenster. - Google Patents

Anordning och foerfarande foer avsaettning av skuggmaskade tunnfilmsmoenster. Download PDF

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Publication number
FI864307A
FI864307A FI864307A FI864307A FI864307A FI 864307 A FI864307 A FI 864307A FI 864307 A FI864307 A FI 864307A FI 864307 A FI864307 A FI 864307A FI 864307 A FI864307 A FI 864307A
Authority
FI
Finland
Prior art keywords
tunnfilmsmoenster
skuggmaskade
avsaettning
anordination
faring equipment
Prior art date
Application number
FI864307A
Other languages
English (en)
Other versions
FI82845C (fi
FI82845B (fi
FI864307A0 (fi
Inventor
Robert A Boudreau
Robert J Wilkie
Original Assignee
Gte Prod Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gte Prod Corp filed Critical Gte Prod Corp
Publication of FI864307A0 publication Critical patent/FI864307A0/fi
Publication of FI864307A publication Critical patent/FI864307A/fi
Application granted granted Critical
Publication of FI82845B publication Critical patent/FI82845B/fi
Publication of FI82845C publication Critical patent/FI82845C/fi

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/042—Coating on selected surface areas, e.g. using masks using masks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/682—Mask-wafer alignment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Physics & Mathematics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physical Vapour Deposition (AREA)
  • Electroluminescent Light Sources (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
FI864307A 1985-10-23 1986-10-23 Anordning och foerfarande foer att rikta in figurer av tunnfilmsstruktur. FI82845C (fi)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US79069585 1985-10-23
US06/790,695 US4746548A (en) 1985-10-23 1985-10-23 Method for registration of shadow masked thin-film patterns

Publications (4)

Publication Number Publication Date
FI864307A0 FI864307A0 (fi) 1986-10-23
FI864307A true FI864307A (fi) 1987-04-24
FI82845B FI82845B (fi) 1991-01-15
FI82845C FI82845C (fi) 1991-04-25

Family

ID=25151490

Family Applications (1)

Application Number Title Priority Date Filing Date
FI864307A FI82845C (fi) 1985-10-23 1986-10-23 Anordning och foerfarande foer att rikta in figurer av tunnfilmsstruktur.

Country Status (5)

Country Link
US (1) US4746548A (fi)
EP (1) EP0220685A3 (fi)
JP (1) JPS6299782A (fi)
CA (1) CA1283281C (fi)
FI (1) FI82845C (fi)

Families Citing this family (30)

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Publication number Priority date Publication date Assignee Title
US4952420A (en) * 1988-10-12 1990-08-28 Advanced Dielectric Technologies, Inc. Vapor deposition patterning method
DE3925085C1 (fi) * 1989-07-28 1991-01-10 Battelle-Institut Ev, 6000 Frankfurt, De
US5296916A (en) * 1991-04-18 1994-03-22 International Business Machines Corp. Mask alignment system for components with extremely sensitive surfaces
US5272502A (en) * 1991-07-31 1993-12-21 Minoru Saiki Double-surface concurrent exposure device
JPH05290970A (ja) * 1992-04-14 1993-11-05 Fuji Electric Co Ltd 薄膜エレクトロルミネセンス素子の製造方法
DE4302851A1 (de) * 1993-02-02 1994-08-04 Leybold Ag Vorrichtung zum Anbringen und/oder Entfernen einer Maske an einem Substrat
US6780465B2 (en) * 2000-12-28 2004-08-24 Seiko Epson Corporation Method for making thin film and electronic apparatus
US6581278B2 (en) * 2001-01-16 2003-06-24 St Assembly Test Service Ltd. Process and support carrier for flexible substrates
TW560102B (en) * 2001-09-12 2003-11-01 Itn Energy Systems Inc Thin-film electrochemical devices on fibrous or ribbon-like substrates and methd for their manufacture and design
WO2003022564A1 (en) * 2001-09-12 2003-03-20 Itn Energy Systems, Inc. Apparatus and method for the design and manufacture of multifunctional composite materials with power integration
US20030151118A1 (en) * 2002-02-14 2003-08-14 3M Innovative Properties Company Aperture masks for circuit fabrication
US6897164B2 (en) * 2002-02-14 2005-05-24 3M Innovative Properties Company Aperture masks for circuit fabrication
US6821348B2 (en) * 2002-02-14 2004-11-23 3M Innovative Properties Company In-line deposition processes for circuit fabrication
US7006202B2 (en) * 2002-02-21 2006-02-28 Lg.Philips Lcd Co., Ltd. Mask holder for irradiating UV-rays
KR100480705B1 (ko) * 2002-07-03 2005-04-06 엘지전자 주식회사 유기 ｅｌ 소자 제작용 새도우 마스크 및 그 제조 방법
US7410919B2 (en) * 2003-06-27 2008-08-12 International Business Machines Corporation Mask and substrate alignment for solder bump process
US20060086321A1 (en) * 2004-10-22 2006-04-27 Advantech Global, Ltd Substrate-to-mask alignment and securing system with temperature control for use in an automated shadow mask vacuum deposition process
JP4331707B2 (ja) * 2004-12-16 2009-09-16 三星モバイルディスプレイ株式會社 整列システム、垂直型トレイ移送装置及びこれを具備した蒸着装置
US20070137568A1 (en) * 2005-12-16 2007-06-21 Schreiber Brian E Reciprocating aperture mask system and method
US7763114B2 (en) * 2005-12-28 2010-07-27 3M Innovative Properties Company Rotatable aperture mask assembly and deposition system
US20070262326A1 (en) * 2006-05-10 2007-11-15 Touchtek Corporation LED multi-layer metals primary electrodes manufacturing process & installation
US7690104B2 (en) * 2008-02-20 2010-04-06 Apple Inc. Technique for reducing wasted material on a printed circuit board panel
US20110107964A1 (en) * 2009-11-10 2011-05-12 Molten Corporation Object Holding Apparatus
US20130092085A1 (en) * 2011-10-17 2013-04-18 Synos Technology, Inc. Linear atomic layer deposition apparatus
US9051637B2 (en) * 2011-11-10 2015-06-09 Veeco Ald Inc. Securing of shadow mask and substrate on susceptor of deposition apparatus
US9579680B2 (en) * 2013-01-31 2017-02-28 Wki Holding Company, Inc. Self-centering magnetic masking system
US20140240859A1 (en) * 2013-02-28 2014-08-28 Corning Incorporated Optic obscuration assembly, method and system for working on an optical element, and resulting optical element
CN103882375B (zh) * 2014-03-12 2016-03-09 京东方科技集团股份有限公司 一种掩膜板及其制作方法
KR20180103163A (ko) * 2016-01-28 2018-09-18 어플라이드 머티어리얼스, 인코포레이티드 기판을 마스킹하기 위한 마스크 어레인지먼트 및 마스크를 기판에 대해 정렬하기 위한 방법
US11715662B2 (en) * 2020-12-11 2023-08-01 Applied Materials, Inc. Actively clamped carrier assembly for processing tools

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3510349A (en) * 1966-11-15 1970-05-05 Us Air Force Vacuum deposited interconnection matrix
US3678892A (en) * 1970-05-19 1972-07-25 Western Electric Co Pallet and mask for substrates
US4013502A (en) * 1973-06-18 1977-03-22 Texas Instruments Incorporated Stencil process for high resolution pattern replication
US4096821A (en) * 1976-12-13 1978-06-27 Westinghouse Electric Corp. System for fabricating thin-film electronic components
JPS54103552A (en) * 1978-02-01 1979-08-15 Hitachi Electronics Pattern formation method
US4344988A (en) * 1978-08-01 1982-08-17 Nippon Sheet Glass Co., Ltd. Method for forming patterned coating
US4303489A (en) * 1978-08-21 1981-12-01 Vac-Tec Systems, Inc. Method and apparatus for producing a variable intensity pattern of sputtering material on a substrate
US4278710A (en) * 1979-08-27 1981-07-14 The United States Of America As Represented By The Secretary Of The Navy Apparatus and method for submicron pattern generation
US4305801A (en) * 1980-04-16 1981-12-15 The United States Of America As Represented By The United States Department Of Energy Line-of-sight deposition method
JPS5754265A (ja) * 1980-09-18 1982-03-31 Toshiba Corp Kinzokuhimakukeiseihoho
US4335161A (en) * 1980-11-03 1982-06-15 Xerox Corporation Thin film transistors, thin film transistor arrays, and a process for preparing the same
US4492180A (en) * 1981-03-16 1985-01-08 Applied Magnetics Corporation Apparatus for indexing and registering a selected deposition mask to a substrate and method therefor
US4511599A (en) * 1983-03-01 1985-04-16 Sigmatron Associates Mask for vacuum depositing back metal electrodes on EL panel
JPS59190358A (ja) * 1983-04-12 1984-10-29 Fujitsu Ltd マスク蒸着装置のパタ−ン合わせ構造
US4615781A (en) * 1985-10-23 1986-10-07 Gte Products Corporation Mask assembly having mask stress relieving feature

Also Published As

Publication number Publication date
FI82845C (fi) 1991-04-25
EP0220685A2 (en) 1987-05-06
CA1283281C (en) 1991-04-23
US4746548A (en) 1988-05-24
FI82845B (fi) 1991-01-15
FI864307A0 (fi) 1986-10-23
JPS6299782A (ja) 1987-05-09
EP0220685A3 (en) 1989-03-22

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MM Patent lapsed

Owner name: GTE PRODUCTS CORPORATION