FI851819A0 - Ellipsometriskt foerfarande samt ellipsometrisk anordning foer undersoekning av de fysikaliska egenskaperna i prov eller ytskikten i prov. - Google Patents

Ellipsometriskt foerfarande samt ellipsometrisk anordning foer undersoekning av de fysikaliska egenskaperna i prov eller ytskikten i prov.

Info

Publication number
FI851819A0
FI851819A0 FI851819A FI851819A FI851819A0 FI 851819 A0 FI851819 A0 FI 851819A0 FI 851819 A FI851819 A FI 851819A FI 851819 A FI851819 A FI 851819A FI 851819 A0 FI851819 A0 FI 851819A0
Authority
FI
Finland
Prior art keywords
prov
testpiece
polarization
ytskikten
undersoekning
Prior art date
Application number
FI851819A
Other languages
English (en)
Other versions
FI851819L (fi
Inventor
Nils Arvid Norman Bjoerk
Erland Torbjoern Sandstroem
Johan Emanuel Stenberg
Lars Bertil Stiblert
Original Assignee
Sagax Instr Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sagax Instr Ab filed Critical Sagax Instr Ab
Publication of FI851819A0 publication Critical patent/FI851819A0/fi
Publication of FI851819L publication Critical patent/FI851819L/fi

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry

Landscapes

  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measuring Or Testing Involving Enzymes Or Micro-Organisms (AREA)
  • Paper (AREA)
  • Preliminary Treatment Of Fibers (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Eye Examination Apparatus (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
FI851819A 1984-05-24 1985-05-08 Ellipsometriskt foerfarande samt ellipsometrisk anordning foer undersoekning av de fysikaliska egenskaperna i prov eller ytskikten i prov. FI851819L (fi)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3419463A DE3419463C1 (de) 1984-05-24 1984-05-24 Vorrichtung zur Erfassung von Stoffeigenschaften von Probenoberflaechen

Publications (2)

Publication Number Publication Date
FI851819A0 true FI851819A0 (fi) 1985-05-08
FI851819L FI851819L (fi) 1985-11-25

Family

ID=6236792

Family Applications (1)

Application Number Title Priority Date Filing Date
FI851819A FI851819L (fi) 1984-05-24 1985-05-08 Ellipsometriskt foerfarande samt ellipsometrisk anordning foer undersoekning av de fysikaliska egenskaperna i prov eller ytskikten i prov.

Country Status (8)

Country Link
US (1) US4647207A (fi)
EP (1) EP0163176B1 (fi)
JP (1) JPS6134442A (fi)
AT (1) ATE51300T1 (fi)
CA (1) CA1229499A (fi)
DE (1) DE3419463C1 (fi)
DK (1) DK226785A (fi)
FI (1) FI851819L (fi)

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KR20130019495A (ko) * 2011-08-17 2013-02-27 한국표준과학연구원 광소자-회전형 타원계측기 및 이를 이용한 시료의 물성 측정 방법
US10451412B2 (en) 2016-04-22 2019-10-22 Kla-Tencor Corporation Apparatus and methods for detecting overlay errors using scatterometry
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US11644412B2 (en) 2020-08-02 2023-05-09 Aizhong Zhang Thin film spectroellipsometric imaging
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CN117928399B (zh) * 2024-03-22 2024-05-28 中国空气动力研究与发展中心超高速空气动力研究所 基于偏振光成像的同轴热电偶绝缘层厚度测量装置及方法

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Also Published As

Publication number Publication date
CA1229499A (en) 1987-11-24
US4647207A (en) 1987-03-03
DK226785D0 (da) 1985-05-22
JPS6134442A (ja) 1986-02-18
EP0163176A3 (en) 1987-06-16
EP0163176A2 (de) 1985-12-04
EP0163176B1 (de) 1990-03-21
FI851819L (fi) 1985-11-25
DK226785A (da) 1985-11-25
DE3419463C1 (de) 1985-09-12
ATE51300T1 (de) 1990-04-15

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Owner name: SAGAX INSTRUMENT AB