FI813795L - Kapacitiv fuktighetkaennare och foerfarande foer dess framstaellning - Google Patents

Kapacitiv fuktighetkaennare och foerfarande foer dess framstaellning

Info

Publication number
FI813795L
FI813795L FI813795A FI813795A FI813795L FI 813795 L FI813795 L FI 813795L FI 813795 A FI813795 A FI 813795A FI 813795 A FI813795 A FI 813795A FI 813795 L FI813795 L FI 813795L
Authority
FI
Finland
Prior art keywords
functional
faring
capacity
capacity functional
functional functional
Prior art date
Application number
FI813795A
Other languages
English (en)
Inventor
Yoshio Imai
Yoichi Nabeta
Tadao Inuzuka
Original Assignee
Phoenix Int Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Phoenix Int Corp filed Critical Phoenix Int Corp
Publication of FI813795L publication Critical patent/FI813795L/fi

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
    • G01N27/225—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity by using hygroscopic materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
    • G01R27/2605—Measuring capacitance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
FI813795A 1980-12-16 1981-11-26 Kapacitiv fuktighetkaennare och foerfarande foer dess framstaellning FI813795L (fi)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55176504A JPS57109319A (en) 1980-12-16 1980-12-16 Capacity type moisture sensor and method of producing same

Publications (1)

Publication Number Publication Date
FI813795L true FI813795L (fi) 1982-06-17

Family

ID=16014790

Family Applications (1)

Application Number Title Priority Date Filing Date
FI813795A FI813795L (fi) 1980-12-16 1981-11-26 Kapacitiv fuktighetkaennare och foerfarande foer dess framstaellning

Country Status (4)

Country Link
US (1) US4393434A (fi)
EP (1) EP0054813A3 (fi)
JP (1) JPS57109319A (fi)
FI (1) FI813795L (fi)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3151630C2 (de) * 1981-12-28 1986-07-03 Endress U. Hauser Gmbh U. Co, 7867 Maulburg Feuchtigkeitsfühler und Verfahren zu seiner Herstellung
JPS59168354A (ja) * 1983-03-16 1984-09-22 Imai Yoshio 容量式薄膜湿度センサの製造方法
JPS59200951A (ja) * 1983-04-28 1984-11-14 Sharp Corp 感湿素子
US4603372A (en) * 1984-11-05 1986-07-29 Direction De La Meteorologie Du Ministere Des Transports Method of fabricating a temperature or humidity sensor of the thin film type, and sensors obtained thereby
USRE33651E (en) * 1984-12-28 1991-07-30 At&T Bell Laboratories Variable gap device and method of manufacture
JPS6486053A (en) * 1987-09-29 1989-03-30 Toshiba Corp Sensitive element
CH674085A5 (fi) * 1988-03-03 1990-04-30 Martin Ineichen
GB2246633A (en) * 1990-07-11 1992-02-05 Brownell Limited Improvements in or relating to leak location
JPH0599877A (ja) * 1991-06-25 1993-04-23 Yamatake Honeywell Co Ltd 感湿装置
FR2685963A1 (fr) * 1991-12-20 1993-07-09 Coed Sa Dispositif de mesure de l'humidite relative d'equilibre d'un produit, notamment d'un produit alimentaire.
DE4427627C2 (de) * 1994-08-04 1999-03-11 Leybold Ag Regensensor
JP3054850B2 (ja) * 1994-09-16 2000-06-19 科学技術振興事業団 湿度検知方法
US6566893B2 (en) 1997-02-28 2003-05-20 Ust Umweltsensortechnik Gmbh Method and arrangement for monitoring surfaces for the presence of dew
JP3855950B2 (ja) * 2003-03-19 2006-12-13 株式会社デンソー 容量式湿度センサ
JP2005106802A (ja) * 2003-07-10 2005-04-21 Canon Inc 環境センサー、環境測定装置及び環境測定システム
WO2007098774A1 (de) * 2006-02-22 2007-09-07 Testo Ag Gassensor und verfahren zu dessen herstellung
CN102639993B (zh) * 2009-12-22 2015-03-25 纳米及先进材料研发院有限公司 应用阳极氧化铝膜的快速响应的相对湿度传感器
US8739623B2 (en) 2012-03-09 2014-06-03 The University Of Kentucky Research Foundation Moisture sensors on conductive substrates

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2690403A (en) * 1953-07-24 1954-09-28 Gen Am Transport Chemical nickel plating on nonmetallic materials
US3350941A (en) * 1965-05-20 1967-11-07 Johnson Service Co Humidity sensing element
US3453143A (en) * 1965-10-13 1969-07-01 Singer General Precision Method of making a moisture sensitive capacitor
US3492152A (en) * 1967-01-30 1970-01-27 Gen Dynamics Corp Method of vacuum vapor depositing a material on a substrate including reconstitution of decomposed portions of the material
JPS5014893B1 (fi) * 1970-02-05 1975-05-31
GB1513371A (en) * 1975-08-07 1978-06-07 Rockliff P Sensor or detector element for an electrical hygrometer
JPS5378170A (en) * 1976-12-22 1978-07-11 Toshiba Corp Continuous processor for gas plasma etching
JPS54139097A (en) * 1978-04-19 1979-10-29 Matsushita Electric Ind Co Ltd Preparation of humidity sensor
DE2938434C2 (de) * 1979-09-22 1981-07-09 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 8000 München Kapazitiver Feuchtigkeitsfühler und Verfahren zur Herstellung des Fühlers

Also Published As

Publication number Publication date
EP0054813A2 (en) 1982-06-30
JPS57109319A (en) 1982-07-07
EP0054813A3 (en) 1984-07-25
US4393434A (en) 1983-07-12

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Legal Events

Date Code Title Description
FD Application lapsed

Owner name: PHOENIX INTERNATIONAL CORP.