FI20225530A1 - Akustinen aaltoresonaattori - Google Patents
Akustinen aaltoresonaattoriInfo
- Publication number
- FI20225530A1 FI20225530A1 FI20225530A FI20225530A FI20225530A1 FI 20225530 A1 FI20225530 A1 FI 20225530A1 FI 20225530 A FI20225530 A FI 20225530A FI 20225530 A FI20225530 A FI 20225530A FI 20225530 A1 FI20225530 A1 FI 20225530A1
- Authority
- FI
- Finland
- Prior art keywords
- electrode
- acoustic wave
- wave resonator
- piezoelectric layer
- counter
- Prior art date
Links
- 239000013078 crystal Substances 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
- G01N29/2437—Piezoelectric probes
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02062—Details relating to the vibration mode
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02228—Guided bulk acoustic wave devices or Lamb wave devices having interdigital transducers situated in parallel planes on either side of a piezoelectric layer
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02543—Characteristics of substrate, e.g. cutting angles
- H03H9/02559—Characteristics of substrate, e.g. cutting angles of lithium niobate or lithium-tantalate substrates
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/0504—Holders; Supports for bulk acoustic wave devices
- H03H9/0514—Holders; Supports for bulk acoustic wave devices consisting of mounting pads or bumps
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
- H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
- H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
- H03H9/174—Membranes
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
- H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
- H03H9/175—Acoustic mirrors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/028—Material parameters
- G01N2291/02818—Density, viscosity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/04—Wave modes and trajectories
- G01N2291/042—Wave modes
- G01N2291/0422—Shear waves, transverse waves, horizontally polarised waves
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Akustinen aaltoresonaattori joka sisältää pietsosähköisen kerroksen (31), ajoelektrodin (321) ja vastaelektrodin (322) jotka on kytketty pietsosähköiseen kerrokseen (31). Vastaelektrodi on ajoelektrodin vieressä ja yhdessä ne rajaavat resonanssialueen (391–392) pietsosähköisessä kerroksessa. Pietsosähköinen kerros on tehty yksikiteisestä materiaalista.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI20225530A FI20225530A1 (fi) | 2022-06-14 | 2022-06-14 | Akustinen aaltoresonaattori |
PCT/FI2023/050310 WO2023242468A1 (en) | 2022-06-14 | 2023-06-01 | Acoustic wave resonator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI20225530A FI20225530A1 (fi) | 2022-06-14 | 2022-06-14 | Akustinen aaltoresonaattori |
Publications (1)
Publication Number | Publication Date |
---|---|
FI20225530A1 true FI20225530A1 (fi) | 2023-12-15 |
Family
ID=86732091
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FI20225530A FI20225530A1 (fi) | 2022-06-14 | 2022-06-14 | Akustinen aaltoresonaattori |
Country Status (2)
Country | Link |
---|---|
FI (1) | FI20225530A1 (fi) |
WO (1) | WO2023242468A1 (fi) |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3694677A (en) * | 1971-03-03 | 1972-09-26 | Us Army | Vhf-uhf piezoelectric resonators |
US7053522B1 (en) * | 2003-02-26 | 2006-05-30 | University Of Maine System Board Of Trustees | Surface acoustic wave sensor |
WO2007145108A1 (ja) * | 2006-06-16 | 2007-12-21 | Murata Manufacturing Co., Ltd. | 液中物質検出センサ |
CN103765769B (zh) * | 2011-09-01 | 2016-12-28 | 株式会社村田制作所 | 压电体波装置及其制造方法 |
JP6175743B2 (ja) * | 2012-06-06 | 2017-08-09 | セイコーエプソン株式会社 | 振動素子の製造方法 |
JP2013255051A (ja) * | 2012-06-06 | 2013-12-19 | Seiko Epson Corp | 振動素子、振動子、電子デバイス、電子機器及び振動素子の製造方法 |
US20220116015A1 (en) * | 2018-06-15 | 2022-04-14 | Resonant Inc. | Transversely-excited film bulk acoustic resonator with optimized electrode thickness, mark, and pitch |
GB201802659D0 (en) | 2018-02-19 | 2018-04-04 | Cambridge Entpr Ltd | Resonator and method for operation of resonator |
CN112384797A (zh) | 2018-07-06 | 2021-02-19 | Qorvo美国公司 | 动态范围增加的体声波谐振器 |
DE112021005011T5 (de) * | 2020-10-23 | 2023-07-27 | Murata Manufacturing Co., Ltd. | Akustikwellenbauelement |
-
2022
- 2022-06-14 FI FI20225530A patent/FI20225530A1/fi unknown
-
2023
- 2023-06-01 WO PCT/FI2023/050310 patent/WO2023242468A1/en unknown
Also Published As
Publication number | Publication date |
---|---|
WO2023242468A1 (en) | 2023-12-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US6772490B2 (en) | Method of forming a resonance transducer | |
JP2578638B2 (ja) | 所定波形を有した弾性パルス発振器及びその医療診断又は処理への応用 | |
SE8501829D0 (sv) | Cylindrical bender-type vibration transducer | |
DE602004023457D1 (de) | Volumenwellenresonator mit angepasster Resonanzfrequenz und Herstellungsverfahren hierfür | |
GB2596956A8 (en) | High-order mode surface acoustic wave device | |
FI20225530A1 (fi) | Akustinen aaltoresonaattori | |
WO2021189966A1 (zh) | 一种薄膜体声波谐振器 | |
GB1293670A (en) | Improvements in or relating to electro-acoustical transducers | |
US4638205A (en) | Piezo-electric transducer | |
JPH04199906A (ja) | 弾性表面波共振子 | |
US4950937A (en) | Method of making a resonator from a boule of lithium tetraborate and resonator so made | |
Ballato | Networks for crossed-field and in-line excitation of bulk and surface acoustic waves | |
JPH05309096A (ja) | 衝撃波発生源 | |
JPS5640396A (en) | High-polymer piezoelectric transducer | |
CN1151850C (zh) | 双频超声辐射器声辐射板 | |
JPH0422400Y2 (fi) | ||
JPS5212851A (en) | Acoustic optical modulator | |
JPH05260584A (ja) | 送受波器 | |
JP2844068B2 (ja) | 超音波トランスジューサ | |
JPS6384546A (ja) | 超音波プロ−ブ | |
JPS57159197A (en) | Manufacture for ultrasonic wave oscillator | |
EP0394480A4 (en) | Structure of surface acoustic wave transducer having small electrode gaps and method of producing the same | |
Smith | Surface-acoustic-wave parametric amplifier | |
JPS6412710A (en) | Surface acoustic wave element | |
JPH06311577A (ja) | 低周波水中送波器 |