FI20095068A - Parannettu sähköisesti säädettävä Fabry-Perot-interferometri, välituote, elektrodijärjestely ja menetelmä sähköisesti säädettävän Fabry-Perot-interferometrin tuottamiseksi - Google Patents

Parannettu sähköisesti säädettävä Fabry-Perot-interferometri, välituote, elektrodijärjestely ja menetelmä sähköisesti säädettävän Fabry-Perot-interferometrin tuottamiseksi Download PDF

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Publication number
FI20095068A
FI20095068A FI20095068A FI20095068A FI20095068A FI 20095068 A FI20095068 A FI 20095068A FI 20095068 A FI20095068 A FI 20095068A FI 20095068 A FI20095068 A FI 20095068A FI 20095068 A FI20095068 A FI 20095068A
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FI
Finland
Prior art keywords
perot
fabry
interferometer
electrically adjustable
electrode arrangement
Prior art date
Application number
FI20095068A
Other languages
English (en)
Swedish (sv)
Other versions
FI125817B (fi
FI20095068A0 (fi
Inventor
Martti Blomberg
Hannu Kattelus
Riikka Puurunen
Original Assignee
Valtion Teknillinen
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Valtion Teknillinen filed Critical Valtion Teknillinen
Priority to FI20095068A priority Critical patent/FI125817B/fi
Publication of FI20095068A0 publication Critical patent/FI20095068A0/fi
Priority to US13/146,319 priority patent/US20110279824A1/en
Priority to EP10735510.9A priority patent/EP2394146B1/en
Priority to PCT/FI2010/050043 priority patent/WO2010086502A1/en
Publication of FI20095068A publication Critical patent/FI20095068A/fi
Application granted granted Critical
Publication of FI125817B publication Critical patent/FI125817B/fi
Priority to US16/525,213 priority patent/US11194152B2/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/284—Interference filters of etalon type comprising a resonant cavity other than a thin solid film, e.g. gas, air, solid plates

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
FI20095068A 2009-01-27 2009-01-27 Parannettu sähköisesti säädettävä Fabry-Perot-interferometri, välituote, elektrodijärjestely ja menetelmä sähköisesti säädettävän Fabry-Perot-interferometrin tuottamiseksi FI125817B (fi)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FI20095068A FI125817B (fi) 2009-01-27 2009-01-27 Parannettu sähköisesti säädettävä Fabry-Perot-interferometri, välituote, elektrodijärjestely ja menetelmä sähköisesti säädettävän Fabry-Perot-interferometrin tuottamiseksi
US13/146,319 US20110279824A1 (en) 2009-01-27 2010-01-27 Electrically tunable fabry-perot interferometer, an intermediate product an electrode arrangement and a method for producing an electrically tunable fabry-perot interferometer
EP10735510.9A EP2394146B1 (en) 2009-01-27 2010-01-27 Improved electrically tunable fabry-perot interferometer, an intermediate product an electrode arrangement and a method for producing an electrically tunable fabry-perot interferometer
PCT/FI2010/050043 WO2010086502A1 (en) 2009-01-27 2010-01-27 Improved electrically tunable fabry-perot interferometer, an intermediate product an electrode arrangement and a method for producing an electrically tunable fabry-perot interferometer
US16/525,213 US11194152B2 (en) 2009-01-27 2019-07-29 Electrically tunable fabry-perot interferometer, an intermediate product an electrode arrangement and a method for producing an electrically tunable fabry-perot interferometer

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20095068 2009-01-27
FI20095068A FI125817B (fi) 2009-01-27 2009-01-27 Parannettu sähköisesti säädettävä Fabry-Perot-interferometri, välituote, elektrodijärjestely ja menetelmä sähköisesti säädettävän Fabry-Perot-interferometrin tuottamiseksi

Publications (3)

Publication Number Publication Date
FI20095068A0 FI20095068A0 (fi) 2009-01-27
FI20095068A true FI20095068A (fi) 2010-07-28
FI125817B FI125817B (fi) 2016-02-29

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
FI20095068A FI125817B (fi) 2009-01-27 2009-01-27 Parannettu sähköisesti säädettävä Fabry-Perot-interferometri, välituote, elektrodijärjestely ja menetelmä sähköisesti säädettävän Fabry-Perot-interferometrin tuottamiseksi

Country Status (4)

Country Link
US (2) US20110279824A1 (fi)
EP (1) EP2394146B1 (fi)
FI (1) FI125817B (fi)
WO (1) WO2010086502A1 (fi)

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JP6003168B2 (ja) * 2012-04-11 2016-10-05 セイコーエプソン株式会社 波長可変干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器
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JP6356427B2 (ja) * 2014-02-13 2018-07-11 浜松ホトニクス株式会社 ファブリペロー干渉フィルタ
US10010145B2 (en) * 2015-09-18 2018-07-03 Apple Inc. Enhanced sidewalls of an accessory device for an electronic device
JP6945450B2 (ja) * 2015-10-02 2021-10-06 浜松ホトニクス株式会社 光検出装置
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WO2017204326A1 (ja) 2016-05-27 2017-11-30 浜松ホトニクス株式会社 ファブリペロー干渉フィルタの製造方法
JP6341959B2 (ja) * 2016-05-27 2018-06-13 浜松ホトニクス株式会社 ファブリペロー干渉フィルタの製造方法
CN109983313B (zh) * 2016-06-15 2021-12-31 斯维尔系统 集成光谱单元
FI3505987T3 (fi) 2016-08-24 2023-12-19 Hamamatsu Photonics Kk Fabry-perot-häiriösuodatin
JP6862216B2 (ja) * 2017-02-28 2021-04-21 浜松ホトニクス株式会社 光検出装置
CN108632731B (zh) * 2017-03-16 2020-06-30 中芯国际集成电路制造(上海)有限公司 Mems麦克风的形成方法以及mems麦克风
FI128101B (fi) * 2017-07-03 2019-09-30 Teknologian Tutkimuskeskus Vtt Oy Mikrosysteemi (MEMS) Fabry–Perot-interferometri, laitteisto ja menetelmä Fabry–Perot-interferometrin valmistamiseksi
US10302492B2 (en) 2017-09-08 2019-05-28 Osram Opto Semiconductors Gmbh Optoelectronic sensor device and method to operate an optoelectronic sensor device
DE102018220272A1 (de) * 2018-11-26 2020-05-28 Robert Bosch Gmbh Interferometereinrichtung und Verfahren zur Herstellung einer Interferometereinrichtung
DE102019205184A1 (de) * 2019-04-11 2020-10-15 Robert Bosch Gmbh Kondensatorvorrichtung für einen optischen Filter
FI20205917A1 (fi) 2020-09-22 2022-03-23 Teknologian Tutkimuskeskus Vtt Oy Kapasitiivisesti ohjattu Fabry-Perot interferometri

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Also Published As

Publication number Publication date
FI125817B (fi) 2016-02-29
EP2394146A1 (en) 2011-12-14
US20200026063A1 (en) 2020-01-23
FI20095068A0 (fi) 2009-01-27
EP2394146A4 (en) 2018-01-03
WO2010086502A1 (en) 2010-08-05
US11194152B2 (en) 2021-12-07
EP2394146B1 (en) 2023-03-29
US20110279824A1 (en) 2011-11-17

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