FI118490B - Mikromekaaninen anturi mikroaaltotehon mittaamiseen - Google Patents

Mikromekaaninen anturi mikroaaltotehon mittaamiseen Download PDF

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Publication number
FI118490B
FI118490B FI20040903A FI20040903A FI118490B FI 118490 B FI118490 B FI 118490B FI 20040903 A FI20040903 A FI 20040903A FI 20040903 A FI20040903 A FI 20040903A FI 118490 B FI118490 B FI 118490B
Authority
FI
Finland
Prior art keywords
capacitance
parts
sensor according
sensor
line
Prior art date
Application number
FI20040903A
Other languages
English (en)
Finnish (fi)
Swedish (sv)
Other versions
FI20040903A0 (fi
FI20040903A (fi
Inventor
Heikki Seppae
Jukka Kyynaeraeinen
Original Assignee
Valtion Teknillinen
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Valtion Teknillinen filed Critical Valtion Teknillinen
Priority to FI20040903A priority Critical patent/FI118490B/fi
Publication of FI20040903A0 publication Critical patent/FI20040903A0/fi
Priority to PCT/FI2005/000286 priority patent/WO2006000622A1/fr
Priority to US11/630,575 priority patent/US7548074B2/en
Priority to EP05756132A priority patent/EP1761787B1/fr
Publication of FI20040903A publication Critical patent/FI20040903A/fi
Application granted granted Critical
Publication of FI118490B publication Critical patent/FI118490B/fi
Priority to US12/437,725 priority patent/US7808254B2/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R21/00—Arrangements for measuring electric power or power factor
    • G01R21/10—Arrangements for measuring electric power or power factor by using square-law characteristics of circuit elements, e.g. diodes, to measure power absorbed by loads of known impedance
    • G01R21/12—Arrangements for measuring electric power or power factor by using square-law characteristics of circuit elements, e.g. diodes, to measure power absorbed by loads of known impedance in circuits having distributed constants

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
FI20040903A 2004-06-29 2004-06-29 Mikromekaaninen anturi mikroaaltotehon mittaamiseen FI118490B (fi)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FI20040903A FI118490B (fi) 2004-06-29 2004-06-29 Mikromekaaninen anturi mikroaaltotehon mittaamiseen
PCT/FI2005/000286 WO2006000622A1 (fr) 2004-06-29 2005-06-16 Wattmetre d'hyperfrequence micromecanique
US11/630,575 US7548074B2 (en) 2004-06-29 2005-06-16 Micromechanical microwave power meter
EP05756132A EP1761787B1 (fr) 2004-06-29 2005-06-16 Wattmetre d'hyperfrequence micromecanique
US12/437,725 US7808254B2 (en) 2004-06-29 2009-05-08 Micromechanical microwave power meter

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20040903A FI118490B (fi) 2004-06-29 2004-06-29 Mikromekaaninen anturi mikroaaltotehon mittaamiseen
FI20040903 2004-06-29

Publications (3)

Publication Number Publication Date
FI20040903A0 FI20040903A0 (fi) 2004-06-29
FI20040903A FI20040903A (fi) 2005-12-30
FI118490B true FI118490B (fi) 2007-11-30

Family

ID=32524569

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20040903A FI118490B (fi) 2004-06-29 2004-06-29 Mikromekaaninen anturi mikroaaltotehon mittaamiseen

Country Status (4)

Country Link
US (2) US7548074B2 (fr)
EP (1) EP1761787B1 (fr)
FI (1) FI118490B (fr)
WO (1) WO2006000622A1 (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI118490B (fi) 2004-06-29 2007-11-30 Valtion Teknillinen Mikromekaaninen anturi mikroaaltotehon mittaamiseen
DE102005044330A1 (de) * 2005-09-16 2007-03-29 Epcos Ag Abstimmbarer Kondensator und Schaltung mit einem solchen Kondensator
FI118931B (fi) 2006-03-09 2008-05-15 Valtion Teknillinen Laite ja menetelmä sähkötehon mittaamiseksi
CN102175910B (zh) * 2011-03-08 2013-04-24 东南大学 微电子机械微波功率自动检测系统及其检测方法和制备方法
CN102645579B (zh) * 2011-08-11 2014-10-08 东南大学 四输入微机械悬臂梁热电式微波功率传感器及制备方法
US9018937B2 (en) * 2012-01-17 2015-04-28 Honeywell International Inc. MEMS-based voltmeter
DE102016109118A1 (de) * 2016-05-18 2017-11-23 Infineon Technologies Ag Schaltkreisarchitektur für eine Messanordnung, einen Pegelwandler-Schaltkreis, eine Ladungspumpstufe und eine Ladungspumpe sowie Verfahren zum Betreiben dieser
DE102016109114A1 (de) 2016-05-18 2017-11-23 Infineon Technologies Ag Schaltkreisarchitektur für eine Messanordnung, einen Pegelwandler-Schaltkreis, eine Ladungspumpstufe und eine Ladungspumpe sowie Verfahren zum Betreiben dieser

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0274055B1 (fr) * 1986-12-12 1993-03-10 Gec Alsthom Sa Dispositif de transmission d'informations et/ou d'instructions à large bande passante entre un élément mobile et un poste de contrôle
US4943764A (en) * 1987-12-11 1990-07-24 Hewlett-Packard Company Wide dynamic range radio-frequency power sensor
US5204613A (en) 1991-05-02 1993-04-20 Wavetek Microwave, Inc. Rf power sensor having improved linearity over greater dynamic range
JPH07191764A (ja) * 1993-12-27 1995-07-28 Fujitsu Ltd 高周波電源装置及びプラズマ発生装置
US6242901B1 (en) * 1999-04-09 2001-06-05 Agilent Technologies Inc. True average wide dynamic range microwave power sensor using diode stack attenuator-diode stack
US7330271B2 (en) * 2000-11-28 2008-02-12 Rosemount, Inc. Electromagnetic resonant sensor with dielectric body and variable gap cavity
KR100465235B1 (ko) * 2002-04-16 2005-01-13 삼성전자주식회사 정전용량에 의해 ｒｆ 신호에 대한 전력을 측정하는 ｒｆ파워센서
US6803774B2 (en) 2002-09-23 2004-10-12 Agilent Technologies, Inc. MEMS varactor for measuring RF power
FR2851368B1 (fr) * 2003-02-18 2008-03-07 Agence Spatiale Europeenne Composants electroniques comportant des condensateurs micro electromecaniques a capacite ajustable
FI118490B (fi) 2004-06-29 2007-11-30 Valtion Teknillinen Mikromekaaninen anturi mikroaaltotehon mittaamiseen

Also Published As

Publication number Publication date
FI20040903A0 (fi) 2004-06-29
US20090219036A1 (en) 2009-09-03
US7808254B2 (en) 2010-10-05
WO2006000622A1 (fr) 2006-01-05
US7548074B2 (en) 2009-06-16
FI20040903A (fi) 2005-12-30
EP1761787B1 (fr) 2012-09-19
US20080068031A1 (en) 2008-03-20
EP1761787A1 (fr) 2007-03-14

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