ES8505125A1 - Alarm and control system for semiconductor manufacturing plants. - Google Patents

Alarm and control system for semiconductor manufacturing plants.

Info

Publication number
ES8505125A1
ES8505125A1 ES527814A ES527814A ES8505125A1 ES 8505125 A1 ES8505125 A1 ES 8505125A1 ES 527814 A ES527814 A ES 527814A ES 527814 A ES527814 A ES 527814A ES 8505125 A1 ES8505125 A1 ES 8505125A1
Authority
ES
Spain
Prior art keywords
alarm
control system
semiconductor manufacturing
manufacturing plants
state
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
ES527814A
Other languages
Spanish (es)
Other versions
ES527814A0 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nohmi Bosai Ltd
Original Assignee
Nohmi Bosai Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nohmi Bosai Kogyo Co Ltd filed Critical Nohmi Bosai Kogyo Co Ltd
Publication of ES8505125A1 publication Critical patent/ES8505125A1/en
Publication of ES527814A0 publication Critical patent/ES527814A0/en
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G08—SIGNALLING
    • G08B—SIGNALLING OR CALLING SYSTEMS; ORDER TELEGRAPHS; ALARM SYSTEMS
    • G08B17/00—Fire alarms; Alarms responsive to explosion
    • G08B17/10—Actuation by presence of smoke or gases, e.g. automatic alarm devices for analysing flowing fluid materials by the use of optical means
    • G08B17/117—Actuation by presence of smoke or gases, e.g. automatic alarm devices for analysing flowing fluid materials by the use of optical means by using a detection device for specific gases, e.g. combustion products, produced by the fire

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Business, Economics & Management (AREA)
  • Emergency Management (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Emergency Alarm Devices (AREA)
  • Fire-Detection Mechanisms (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Fire-Extinguishing By Fire Departments, And Fire-Extinguishing Equipment And Control Thereof (AREA)
  • Fire Alarms (AREA)

Abstract

This invention relates to an alarm and control system for semiconductor manufacturing plants which is capable of detecting the leaking processing gas both in gaseous state and in a state that it is generating combustion products as a result of its reaction with oxigen in air and combustion, and of performing adequate controls before or in incipient stage of fire.
ES527814A 1982-11-27 1983-11-25 ALARM AND CONTROL SYSTEM FOR SEMICONDUCTOR MANUFACTURING PLANTS Granted ES527814A0 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20688882A JPS5998293A (en) 1982-11-27 1982-11-27 Alarm and controller for semiconductor plant or the like

Publications (2)

Publication Number Publication Date
ES8505125A1 true ES8505125A1 (en) 1985-04-16
ES527814A0 ES527814A0 (en) 1985-04-16

Family

ID=16530706

Family Applications (1)

Application Number Title Priority Date Filing Date
ES527814A Granted ES527814A0 (en) 1982-11-27 1983-11-25 ALARM AND CONTROL SYSTEM FOR SEMICONDUCTOR MANUFACTURING PLANTS

Country Status (4)

Country Link
EP (1) EP0112492B1 (en)
JP (1) JPS5998293A (en)
DE (1) DE3381099D1 (en)
ES (1) ES527814A0 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR910000246Y1 (en) * 1984-07-11 1991-01-18 히로시 세끼 Composite fire sensor
JP2539067B2 (en) * 1990-02-20 1996-10-02 富士通株式会社 Low pressure vapor phase growth equipment
WO2005091238A2 (en) * 2004-03-23 2005-09-29 Du Plessis Jacobus Petrus Fran Fire preventing or extinguishing system for an appliance
US20140358300A1 (en) * 2013-03-15 2014-12-04 Macronix International Co., Ltd. Portable Control System for Cylinder Cabinet

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54639B2 (en) * 1971-08-10 1979-01-12
FR2180423B3 (en) * 1972-04-17 1975-06-20 Securitex Sarl
FR2226813A5 (en) * 1973-04-04 1974-11-15 Cifal Inflammable product fire prevention system - has IR radiation detector injecting cooling fluid and operating alarm
US3955186A (en) * 1974-05-17 1976-05-04 Compugraphic Corporation Character image generation apparatus and CRT phototypesetting system
JPS5323195A (en) * 1976-08-16 1978-03-03 Otsuka Kagaku Yakuhin Method of treating flame resistance for inflammable organic material and flame resisting composition
US4069018A (en) * 1976-09-28 1978-01-17 Weyerhaeuser Company Explosive gas monitoring method and apparatus
US4219806A (en) * 1978-09-15 1980-08-26 American District Telegraph Company Dual alarm gas detector
US4267889A (en) * 1978-12-27 1981-05-19 Williams Robert M Explosion suppression system for fire or explosion susceptible enclosure
US4369647A (en) * 1980-03-21 1983-01-25 New Cosmos Electric Company Limited Gas leakage detector
NL8003068A (en) * 1980-05-28 1982-01-04 Naarden & Shell Aroma Chem PERFUME COMPOSITIONS AND PERFUMED MATERIALS AND ARTICLES CONTAINING ESTERS OF BICYCLIC MONOTERPEENIC ACIDS AS RAW MATERIAL.

Also Published As

Publication number Publication date
EP0112492A2 (en) 1984-07-04
ES527814A0 (en) 1985-04-16
JPS5998293A (en) 1984-06-06
EP0112492B1 (en) 1990-01-10
DE3381099D1 (en) 1990-02-15
EP0112492A3 (en) 1987-08-26

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