ES527814A0 - ALARM AND CONTROL SYSTEM FOR SEMICONDUCTOR MANUFACTURING PLANTS - Google Patents
ALARM AND CONTROL SYSTEM FOR SEMICONDUCTOR MANUFACTURING PLANTSInfo
- Publication number
- ES527814A0 ES527814A0 ES527814A ES527814A ES527814A0 ES 527814 A0 ES527814 A0 ES 527814A0 ES 527814 A ES527814 A ES 527814A ES 527814 A ES527814 A ES 527814A ES 527814 A0 ES527814 A0 ES 527814A0
- Authority
- ES
- Spain
- Prior art keywords
- alarm
- control system
- semiconductor manufacturing
- manufacturing plants
- plants
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G08—SIGNALLING
- G08B—SIGNALLING OR CALLING SYSTEMS; ORDER TELEGRAPHS; ALARM SYSTEMS
- G08B17/00—Fire alarms; Alarms responsive to explosion
- G08B17/10—Actuation by presence of smoke or gases, e.g. automatic alarm devices for analysing flowing fluid materials by the use of optical means
- G08B17/117—Actuation by presence of smoke or gases, e.g. automatic alarm devices for analysing flowing fluid materials by the use of optical means by using a detection device for specific gases, e.g. combustion products, produced by the fire
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Business, Economics & Management (AREA)
- Emergency Management (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Emergency Alarm Devices (AREA)
- Fire-Detection Mechanisms (AREA)
- Fire-Extinguishing By Fire Departments, And Fire-Extinguishing Equipment And Control Thereof (AREA)
- Fire Alarms (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20688882A JPS5998293A (en) | 1982-11-27 | 1982-11-27 | Alarm and controller for semiconductor plant or the like |
Publications (2)
Publication Number | Publication Date |
---|---|
ES8505125A1 ES8505125A1 (en) | 1985-04-16 |
ES527814A0 true ES527814A0 (en) | 1985-04-16 |
Family
ID=16530706
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES527814A Granted ES527814A0 (en) | 1982-11-27 | 1983-11-25 | ALARM AND CONTROL SYSTEM FOR SEMICONDUCTOR MANUFACTURING PLANTS |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP0112492B1 (en) |
JP (1) | JPS5998293A (en) |
DE (1) | DE3381099D1 (en) |
ES (1) | ES527814A0 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR910000246Y1 (en) * | 1984-07-11 | 1991-01-18 | 히로시 세끼 | Composite fire sensor |
JP2539067B2 (en) * | 1990-02-20 | 1996-10-02 | 富士通株式会社 | Low pressure vapor phase growth equipment |
WO2005091238A2 (en) * | 2004-03-23 | 2005-09-29 | Du Plessis Jacobus Petrus Fran | Fire preventing or extinguishing system for an appliance |
US20140358300A1 (en) * | 2013-03-15 | 2014-12-04 | Macronix International Co., Ltd. | Portable Control System for Cylinder Cabinet |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54639B2 (en) * | 1971-08-10 | 1979-01-12 | ||
FR2180423B3 (en) * | 1972-04-17 | 1975-06-20 | Securitex Sarl | |
FR2226813A5 (en) * | 1973-04-04 | 1974-11-15 | Cifal | Inflammable product fire prevention system - has IR radiation detector injecting cooling fluid and operating alarm |
US3955186A (en) * | 1974-05-17 | 1976-05-04 | Compugraphic Corporation | Character image generation apparatus and CRT phototypesetting system |
JPS5323195A (en) * | 1976-08-16 | 1978-03-03 | Otsuka Kagaku Yakuhin | Method of treating flame resistance for inflammable organic material and flame resisting composition |
US4069018A (en) * | 1976-09-28 | 1978-01-17 | Weyerhaeuser Company | Explosive gas monitoring method and apparatus |
US4219806A (en) * | 1978-09-15 | 1980-08-26 | American District Telegraph Company | Dual alarm gas detector |
US4267889A (en) * | 1978-12-27 | 1981-05-19 | Williams Robert M | Explosion suppression system for fire or explosion susceptible enclosure |
US4369647A (en) * | 1980-03-21 | 1983-01-25 | New Cosmos Electric Company Limited | Gas leakage detector |
NL8003068A (en) * | 1980-05-28 | 1982-01-04 | Naarden & Shell Aroma Chem | PERFUME COMPOSITIONS AND PERFUMED MATERIALS AND ARTICLES CONTAINING ESTERS OF BICYCLIC MONOTERPEENIC ACIDS AS RAW MATERIAL. |
-
1982
- 1982-11-27 JP JP20688882A patent/JPS5998293A/en active Pending
-
1983
- 1983-11-19 EP EP19830111572 patent/EP0112492B1/en not_active Expired - Lifetime
- 1983-11-19 DE DE8383111572T patent/DE3381099D1/en not_active Expired - Fee Related
- 1983-11-25 ES ES527814A patent/ES527814A0/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5998293A (en) | 1984-06-06 |
ES8505125A1 (en) | 1985-04-16 |
EP0112492A2 (en) | 1984-07-04 |
DE3381099D1 (en) | 1990-02-15 |
EP0112492B1 (en) | 1990-01-10 |
EP0112492A3 (en) | 1987-08-26 |
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