ES527970A0 - Procedimiento para la fabricacion de una forma de impresion o plantilla fotorresistente. - Google Patents
Procedimiento para la fabricacion de una forma de impresion o plantilla fotorresistente.Info
- Publication number
- ES527970A0 ES527970A0 ES527970A ES527970A ES527970A0 ES 527970 A0 ES527970 A0 ES 527970A0 ES 527970 A ES527970 A ES 527970A ES 527970 A ES527970 A ES 527970A ES 527970 A0 ES527970 A0 ES 527970A0
- Authority
- ES
- Spain
- Prior art keywords
- printing
- procedure
- manufacture
- photo resistant
- resistant template
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/022—Quinonediazides
- G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
- G03F7/0233—Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19823246106 DE3246106A1 (de) | 1982-12-13 | 1982-12-13 | Lichtempfindliches gemisch, daraus hergestelltes lichtempfindliches kopiermaterial und verfahren zur herstellung einer druckform aus dem kopiermaterial |
Publications (2)
Publication Number | Publication Date |
---|---|
ES527970A0 true ES527970A0 (es) | 1985-03-16 |
ES8503863A1 ES8503863A1 (es) | 1985-03-16 |
Family
ID=6180546
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES527970A Expired ES8503863A1 (es) | 1982-12-13 | 1983-12-12 | Procedimiento para la fabricacion de una forma de impresion o plantilla fotorresistente. |
Country Status (9)
Country | Link |
---|---|
EP (1) | EP0111274B1 (es) |
JP (1) | JPS59114535A (es) |
AU (1) | AU571190B2 (es) |
BR (1) | BR8306803A (es) |
CA (1) | CA1254787A (es) |
DE (2) | DE3246106A1 (es) |
ES (1) | ES8503863A1 (es) |
FI (1) | FI834528A (es) |
ZA (1) | ZA839215B (es) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL8500320A (nl) * | 1985-02-06 | 1986-09-01 | Philips Nv | Werkwijze voor het vervaardigen van een inrichting en inrichting vervaardigd met de werkwijze. |
DE3821585A1 (de) * | 1987-09-13 | 1989-03-23 | Hoechst Ag | Positiv arbeitendes strahlungsempfindliches gemisch und daraus hergestelltes strahlungsempfindliches aufzeichnungsmaterial fuer hochenergetische strahlung |
US4812522A (en) * | 1987-12-04 | 1989-03-14 | Shell Oil Company | Molecularly miscible blends of polyketone with polyvinyl phenol |
US5100768A (en) * | 1989-05-09 | 1992-03-31 | Kabushiki Kaisha Toshiba | Photosensitive composition |
DE4106356A1 (de) * | 1991-02-28 | 1992-09-03 | Hoechst Ag | Strahlungsempfindliche polymere mit naphthochinon-2-diazid-4-sulfonyl-gruppen und deren verwendung in einem positiv arbeitenden aufzeichnungsmaterial |
AU2001288865A1 (en) * | 2000-09-08 | 2002-03-22 | Shipley Company, L.L.C. | Polymers and photoresist compositions comprising electronegative groups |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6053301B2 (ja) * | 1979-08-31 | 1985-11-25 | 冨士薬品工業株式会社 | ポジ型感光性組成物 |
JPS5730829A (en) * | 1980-08-01 | 1982-02-19 | Hitachi Ltd | Micropattern formation method |
DE3100077A1 (de) * | 1981-01-03 | 1982-08-05 | Hoechst Ag, 6000 Frankfurt | Lichtempfindliches gemisch, das einen naphthochinondiazidsulfonsaeureester enthaelt, und verfahren zur herstellung des naphthochinondiazidsulfonsaeureesters |
DE3127754A1 (de) * | 1981-07-14 | 1983-02-03 | Hoechst Ag, 6000 Frankfurt | Lichtempfindliches gemisch auf basis von o-naphthochinondiaziden und daraus hergestelltes lichtempfindliches kopiermaterial |
DD206518A3 (de) * | 1981-08-10 | 1984-01-25 | Akad Wissenschaften Ddr | Verfahren zur herstellung von mikrostrukturen |
DE3246037A1 (de) * | 1982-12-09 | 1984-06-14 | Hoechst Ag, 6230 Frankfurt | Lichtempfindliches gemisch, daraus hergestelltes lichtempfindliches kopiermaterial und verfahren zur herstellung einer druckform aus dem kopiermaterial |
-
1982
- 1982-12-13 DE DE19823246106 patent/DE3246106A1/de not_active Withdrawn
-
1983
- 1983-12-01 JP JP58225518A patent/JPS59114535A/ja active Pending
- 1983-12-02 EP EP83112142A patent/EP0111274B1/de not_active Expired
- 1983-12-02 DE DE8383112142T patent/DE3379079D1/de not_active Expired
- 1983-12-07 AU AU22169/83A patent/AU571190B2/en not_active Ceased
- 1983-12-09 FI FI834528A patent/FI834528A/fi not_active Application Discontinuation
- 1983-12-09 CA CA000442945A patent/CA1254787A/en not_active Expired
- 1983-12-12 ZA ZA839215A patent/ZA839215B/xx unknown
- 1983-12-12 ES ES527970A patent/ES8503863A1/es not_active Expired
- 1983-12-12 BR BR8306803A patent/BR8306803A/pt not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
AU2216983A (en) | 1984-06-21 |
FI834528A0 (fi) | 1983-12-09 |
BR8306803A (pt) | 1984-07-17 |
ZA839215B (en) | 1984-08-29 |
CA1254787A (en) | 1989-05-30 |
DE3379079D1 (en) | 1989-03-02 |
EP0111274A3 (en) | 1986-01-15 |
EP0111274B1 (de) | 1989-01-25 |
EP0111274A2 (de) | 1984-06-20 |
DE3246106A1 (de) | 1984-06-14 |
ES8503863A1 (es) | 1985-03-16 |
AU571190B2 (en) | 1988-04-14 |
FI834528A (fi) | 1984-06-14 |
JPS59114535A (ja) | 1984-07-02 |
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